JPH03130018U - - Google Patents

Info

Publication number

JPH03130018U

JPH03130018U JP3632690U JP3632690U JPH03130018U JP H03130018 U JPH03130018 U JP H03130018U JP 3632690 U JP3632690 U JP 3632690U JP 3632690 U JP3632690 U JP 3632690U JP H03130018 U JPH03130018 U JP H03130018U

Authority

JP

Japan

Prior art keywords

focus

exposure

optical

light source

optical axis

Prior art date

1990-04-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 20
• 238000001514 detection method Methods 0.000 claims description 6
• 238000012544 monitoring process Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2

Cited By (1)