JPH03127033A - Production of glass dispersed with fine particle of semiconductor - Google Patents
Production of glass dispersed with fine particle of semiconductorInfo
- Publication number
- JPH03127033A JPH03127033A JP26644789A JP26644789A JPH03127033A JP H03127033 A JPH03127033 A JP H03127033A JP 26644789 A JP26644789 A JP 26644789A JP 26644789 A JP26644789 A JP 26644789A JP H03127033 A JPH03127033 A JP H03127033A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- sol
- glass
- gel
- fine particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 41
- 239000004065 semiconductor Substances 0.000 title claims abstract description 24
- 239000010419 fine particle Substances 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 150000001768 cations Chemical class 0.000 claims abstract description 10
- 239000002612 dispersion medium Substances 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 14
- 150000003464 sulfur compounds Chemical class 0.000 claims description 11
- 238000003980 solgel method Methods 0.000 claims description 6
- 150000002611 lead compounds Chemical class 0.000 claims description 3
- 229940065285 cadmium compound Drugs 0.000 claims description 2
- 150000001662 cadmium compounds Chemical class 0.000 claims description 2
- 150000003752 zinc compounds Chemical class 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 7
- -1 bulk Substances 0.000 abstract description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052717 sulfur Inorganic materials 0.000 abstract description 4
- 239000011593 sulfur Substances 0.000 abstract description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 27
- 230000003287 optical effect Effects 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000003756 stirring Methods 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 239000005416 organic matter Substances 0.000 description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005486 sulfidation Methods 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は非線形光学効果を利用した光デバイスの基礎を
なす半導体微粒子分散ガラスの製造方法に関するもので
あも
従来の技術
従来の技術としては例えば日本セラミックス塩& 1
989年年次大会講演要旨集336ページに記載されて
いるようなゾル−ゲル法によるCdS含有シリカガラス
の作成法があも
この方法はシリコンのアルコキシド(Si(OCaHs
)4)を加水分解した喪 メタノールに溶解させたCd
(CHsCOO)12HaOを加えて撹拌すも その
微水エタノ−/k アンモニア水の混合溶液を加えて
撹拌を続εす、この溶液をシャーレに移行しゲル板を作
威すも さらにこのゲル板を硫化水素(Has)ガスを
含んだ雰囲気中に置き、硫化反応によってCdS含有ガ
ラスを作成するものであも
また J、Appl、Phys、63(3)、9571
988に開示されているようなCdS微粒子ドープ薄膜
ガラスがあもこの薄膜ガラスはターゲットにコーニング
社製7095ガラスと、CdSとを用い高周波マグネト
ロンスパッタリング法により、7095ガラス中にCd
Sを2〜4重量%分散させたものであも
発明が解決しようとする課題
上記方法の半導体微粒子分散ガラスの製造方法でζ上
次のような2つの課題があっ1゜イ)ゾル−ゲル法の場
合: ゲル体を硫化水素雰囲気中に置き硫化反応によっ
てCdS含有ガラスを作成するたべ ゲル体内部にまで
均一にCdSを分散させることが困難であも
口)スパッタリング法を用いた場合: 装置が高価であ
るとともにガラス薄膜の形成に時間かかり、(特にスパ
ッタリング速度の小さな5insガラスの形成の場合)
厚膜を形成するのが困難であん本発明Cヨ 半導体微
粒子を均質に分散したガラスの製造方法を提供すること
を目的とすも課題を解決するための手段
上記課題を解決するために本発明(上 ゾル−ゲル法に
より半導体微粒子分散ガラスを作成する過程において、
あらかじめ水もしくはアルコール可溶性のカチオン源と
イオウ化合物とを加えておいたゾルをゲル化させ、得ら
れたゲルを熱処理することにより半導体微粒子を分散さ
せることにより半導体微粒子分散ガラスを製造すも
作用
本発明の半導体微粒子分散ガラスの製造方法では ゾル
−ゲル法により半導体微粒子分散ガラスを作成する過程
において、あらかじめカチオン源とイオウ源を加えてお
いたゾルをゲル化させ、得られたゲルを熱処理すること
により組成に均一化が計られるたへ 薄膜 パル久 フ
ァイバー状等の形態を有する半導体微粒子分散ガラスを
得ることができも
実施例
本発明は ゾル中にカチオン源とイオウ化合物とを加え
るた敗 ゾルの分散媒に可溶なカチオン源とイオウ化合
物力丈 より生成した塩がより均一に分散できるため好
ましへ ゾルの分散媒としてε上 水もしくはメタノ−
/k エタノール等のアルコールが専ら用いられも
カチオン源としてはカドミウム 亜鰍鰍 セレン、モ
リブデン等が挙げられも その中でもカドミウム 亜鍜
鉛化合物(友 イオウ化合物と均一に反応して半導体
を形成し易いため好ましへカドミウム化合物としては
例えばCdC1a、 CdCO5,Cd(NOs)*、
Cd(CHsCOO)*、 Cd(HCOO)a
啄 亜鉛化合物として(よ 例えばZnC1*、
Zn(CHCOO)at * タ鉛化合物としテg!
例えばPbC1,、PbC0*、 Pb(NOs
)*、 Pb(CHsCOO)a等が挙げられもざら
にイオウ化合物として(友 例えばNa5a (NH
a)*a 8C(NHa)を等カ挙if ラレ4以下
本発明の実施例について説明すも
実施例1
第1図に示す工程を経て、Cd8ドープ5ideガラス
を試作し九
第1表に示した原料を用いてマトリックスガラスとなる
ゾルを作製り、 5iftガラスに対してドープする
CdSが重量比で3%になるように 以下のCd源およ
びイオウ化合物(S源)をゾルに添加したすなわちメタ
ノールに溶解させたCd(HCOO)*をゾルに撹拌し
ながら添加し その後メタノールに溶解させた5C(N
Ha)*を続いて添加り、 80tで加熱してゾルを
ゲル化させ1. さらにゲル体(バルク状)に残存す
る有機物を燃焼するた& 350t:で加熱しf;
CdSの結晶粒径を制御するため500tで2時間熱
処理しtら
この時得られたCdSの粒径は50〜80Aであり、微
粒子のCdSが5ins中に分散していることがわかん
このガラスの光学的特性を第2図に示もまたCd源にメ
タノールに溶解させたCd(HCOO)*の代わり4Q
CdC1a、 CdCO5,Cd(NOs)a及
びCd(CHsCOO)2を、モしてイオウ化合物のメ
タノールに溶解させた5C(NHs)*の代わりにNa
5H及び(NH4)*Sを用いて転 第2図とほぼ同様
な特性が得られ?。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing semiconductor fine particle dispersed glass, which forms the basis of an optical device that utilizes nonlinear optical effects. salt & 1
The method for producing CdS-containing silica glass by the sol-gel method, as described on page 336 of the abstracts of the 989 Annual Conference, is based on silicon alkoxide (Si(OCaHs).
)4) Cd dissolved in methanol
Add (CHsCOO)12HaO and stir. Add the mixed solution of slightly aqueous ethanol/k ammonia water and continue stirring. Transfer this solution to a petri dish and make a gel plate. It can also be placed in an atmosphere containing hydrogen sulfide (Has) gas to create a CdS-containing glass by a sulfidation reaction.J, Appl, Phys, 63(3), 9571
CdS fine particle doped thin film glass as disclosed in No. 988 is manufactured by using Corning's 7095 glass as a target and CdS by high frequency magnetron sputtering method.
Problems to be Solved by the Invention The above method for manufacturing semiconductor fine particle dispersed glass can be used to disperse S in an amount of 2 to 4% by weight.
There are the following two issues: 1) In the case of the sol-gel method: Place the gel body in a hydrogen sulfide atmosphere to create a CdS-containing glass through a sulfurization reaction. Distribute CdS uniformly inside the gel body. When using the sputtering method: The equipment is expensive and it takes time to form a glass thin film (especially when forming glass with a low sputtering speed of 5 inches).
An object of the present invention is to provide a method for manufacturing glass in which semiconductor fine particles are homogeneously dispersed.Means for Solving the ProblemsIn order to solve the above problems, the present invention (Top: In the process of creating semiconductor fine particle dispersed glass using the sol-gel method,
A sol to which a water or alcohol-soluble cation source and a sulfur compound have been added in advance is gelled, and the resulting gel is heat-treated to disperse semiconductor particles, thereby producing a semiconductor particle-dispersed glass. In the manufacturing method of semiconductor fine particle dispersed glass, in the process of creating semiconductor fine particle dispersed glass by the sol-gel method, a sol to which a cation source and a sulfur source have been added in advance is gelled, and the resulting gel is heat-treated. Although the composition can be made uniform, it is possible to obtain a glass in which semiconductor fine particles are dispersed in the form of a thin film, fiber or the like. A cation source and a sulfur compound that are soluble in the solvent are preferable because the salt produced can be dispersed more uniformly.Epsilon water or methanol is used as the dispersion medium for the sol.
Alcohols such as ethanol are used exclusively, but cation sources include cadmium, selenium, molybdenum, etc. Among them, cadmium, zinc, and lead compounds (because they easily react uniformly with sulfur compounds to form semiconductors) The preferred cadmium compound is
For example, CdC1a, CdCO5, Cd(NOs)*,
Cd(CHsCOO)*, Cd(HCOO)a
As a zinc compound (for example, ZnC1*,
Zn(CHCOO)at* As a lead compound!
For example, PbC1,, PbC0*, Pb(NOs
)*, Pb(CHsCOO)a, etc. are listed as sulfur compounds (for example, Na5a (NH
a) *a 8C (NHa), etc. If Rare 4 Below, we will explain the embodiments of the present invention.Example 1 A Cd8-doped 5ide glass was prototyped through the steps shown in Figure 1, and the results are shown in Table 1. The following Cd source and sulfur compound (S source) were added to the sol so that the CdS to be doped with the 5ift glass was 3% by weight, i.e., methanol. Cd(HCOO)* dissolved in methanol was added to the sol with stirring, and then 5C(N
Ha)* was then added and heated at 80 t to gel the sol.1. Furthermore, it was heated at 350 tons to burn off the organic matter remaining in the gel body (bulk).
In order to control the crystal grain size of CdS, heat treatment was performed at 500 t for 2 hours. The grain size of the CdS obtained at this time was 50 to 80 A, indicating that fine particles of CdS were dispersed within 5 ins. The optical properties are shown in Figure 2. 4Q was also used instead of Cd(HCOO)* dissolved in methanol as a Cd source.
CdC1a, CdCO5, Cd(NOs)a and Cd(CHsCOO)2 were mixed with Na instead of 5C(NHs)*, which was dissolved in methanol as a sulfur compound.
By using 5H and (NH4)*S, almost the same characteristics as shown in Figure 2 can be obtained. .
さらに同様な原職 方法を用いて直径0 、5 m&長
さ20cmのファイバー状CdSドープ5ideガラス
も試作することができtら
以下余白
第1表
実施例2
実施例1と同様な過程を経てZnSドープSiO2ガラ
スを試作しtも
第1表に示した原料を用いてゾルを作製り、 SiO
2ガラスに対してドープするZnSが重量比で3%にな
るように 以下のZn源およびイオウ化合物をゾルに添
加した すなわちメタノールに溶解させたZn(CH3
Coo )2をゾルに撹拌しながら添加し その後メタ
ノールに溶解させたSC(NHe )aを続いて添加し
80℃で加熱してゾルをゲル化させた さらにゲル体(
バルク状)に残存する有機物を燃焼するたべ350℃で
加熱しf; ZnSの結晶粒径を制御するため500
℃で2時間加熱しtも
この時得られたZnSの粒径は60〜80Aであつた。Furthermore, using the same method, we were able to fabricate a fibrous CdS-doped 5ide glass with a diameter of 0.5 m and a length of 20 cm. We made a prototype of SiO2 glass and made a sol using the raw materials shown in Table 1.
The following Zn sources and sulfur compounds were added to the sol so that the ZnS doped with 2 glasses was 3% by weight. That is, the Zn (CH3
Coo )2 was added to the sol with stirring, and then SC(NHe)a dissolved in methanol was added and heated at 80°C to gel the sol.
The organic matter remaining in the bulk (bulk) was heated at 350°C to burn;
After heating for 2 hours at .degree. C., the particle size of the ZnS obtained at this time was 60 to 80 A.
またZn源にZnCII!を、イオウ化合物にNa5H
,(NH4)23を用いても実施例2と同様なZnSド
ープガラスを得ることができた
実施例3
実施例1と同様な過程を経てPbSドープ5i(hガラ
スを試作しtも
第1表に示した原料を用いてゾルを作製シSiO2ガラ
スに対して、 ドープするPbSが重量比で3%になる
ように 以下のpb源およびS源をゾルに添加した す
なわちメタノールに溶解させたPb(CHsCOO)2
をゾルに撹拌しながら添加し その後メタノールに溶解
させた5C(NH2)2を続いて添加し80℃で加熱し
てゾルをゲル化させた さらにゲル体(バルク状)に残
存する有機物を燃焼するため350℃で加熱しt:、
pbsの結晶粒径を制御するため500℃で2時間加
熱し丸
この時得られたPbSの粒径は60〜100Aでありt
も
またpb源にPbC1a、 PbC0a及びPb(N
Os )aを、モしてイオウ化合物にNa5H及び(N
H4)2Sを用いても実施例3と同様なPbSドープガ
ラスを得ることができた実施例4
実施例1と同様な過程を経てシリコンのアルコキシド以
外に はう素のアルコキシドあるいはチタンのアルコキ
シドを添加LACdSドープ5iO2−BaO3あるい
はCdSドープSi0g−TiO2ガラスを試作したと
こム 実施例1とほぼ同様な光学的特性を示す半導体ド
ープガラスを得ることができた実施例5
実施例1に示したゾルを用いて、厚み0 、5 mmの
石英ガラス基板上表i; CdSが重量比で5%含大
した2、5μm厚の5iChガラス薄膜をブライピング
法により形成し 光双安定素子を作製し1゜この素子の
石英ガラス基板側から波長530nmのレザ光(N2光
励起色素レーザ光)をスポット径5μmで入射し九
次に入射光の強度と出射光の強度の関係を室温(25℃
〉にて測定したとこム 第3図に示したような双安定特
性を示した
実施例6
実施例2に示したゾルを用いて、厚み0 、5 mmの
石英ガラス基板上表!L:、 ZnSが重量比で5%
含大した2、8μm厚の5insガラス薄膜をブライピ
ング法により形成し 光双安定素子を作製し1゜この素
子の石英ガラス基板側から波長530nmのレーザ光(
N2光励起色素レーザ光)をスポット径5μmで入射し
tも
次に入射光の強度と出射光の強度の関係を室温(25℃
)にて測定したとこム 第3図とほぼ同様な双安定特性
を示し1゜
また本発明の方法によればアルコールに可溶な物質、例
えば(NH4)MO34を用いてMo5a分散ガラスを
試作することができも
発明の効果
本発明Q あらかじめゾルの分散媒に可溶性のカチオン
源とイオウ化合物とを加えたゾルをゲル化させ、得られ
たゲルを熱処理する半導体微粒子分散ガラスの製造方法
によれば 薄膜 パル久ファイバー状等の形態を有する
均質な半導体微粒子分散ガラスを得ることが可能式 そ
の応用として光双安定素子等を作製することができもAlso, ZnCII as a Zn source! , Na5H to the sulfur compound
, (NH4)23, a ZnS-doped glass similar to that of Example 2 could be obtained.Example 3 A PbS-doped 5i (h glass) was prototyped through the same process as in Example 1, and t was also shown in Table 1. A sol was prepared using the raw materials shown in .The following Pb sources and S sources were added to the SiO2 glass so that the PbS to be doped was 3% by weight.In other words, Pb dissolved in methanol ( CHsCOO)2
was added to the sol with stirring. Then, 5C(NH2)2 dissolved in methanol was added and heated at 80℃ to gel the sol. Furthermore, the organic matter remaining in the gel body (bulk) was burned. Heat at 350℃ for
In order to control the crystal grain size of PBS, it was heated at 500°C for 2 hours, and the grain size of PbS obtained at this time was 60 to 100A, and
Also, PbC1a, PbC0a and Pb(N
Os)a is converted into a sulfur compound by adding Na5H and (N
H4) Example 4 A PbS-doped glass similar to Example 3 could be obtained using 2S. Through the same process as Example 1, boron alkoxide or titanium alkoxide was added in addition to silicon alkoxide. Experimental production of LACdS-doped 5iO2-BaO3 or CdS-doped Si0g-TiO2 glass Example 5 A semiconductor-doped glass with almost the same optical properties as Example 1 was obtained Using the sol shown in Example 1 Then, on a quartz glass substrate with a thickness of 0.5 mm, a 5iCh glass thin film with a thickness of 2.5 μm containing 5% CdS by weight was formed by the briping method, and an optical bistable device was fabricated. Laser light (N2 light excited dye laser light) with a wavelength of 530 nm is incident from the quartz glass substrate side with a spot diameter of 5 μm.
Example 6 Examples 6 Example 6 shown in Example 2 shown in Fig. 3 measured in Fig. 3 L:, ZnS is 5% by weight
A 5-ins glass thin film with a thickness of 2.8 μm was formed using a briping method to fabricate an optically bistable device, and a laser beam with a wavelength of 530 nm (
N2 photoexcited dye laser light) was incident with a spot diameter of 5 μm, and then the relationship between the intensity of the incident light and the intensity of the output light was measured at room temperature (25°C).
), it showed almost the same bistable characteristics as shown in Figure 3.According to the method of the present invention, Mo5a dispersion glass can be prototyped using an alcohol-soluble substance, such as (NH4)MO34. Effects of the Invention Invention Q According to the method for producing semiconductor fine particle dispersed glass, the sol is gelled by adding a soluble cation source and a sulfur compound to the dispersion medium of the sol in advance, and the resulting gel is heat-treated. It is possible to obtain a homogeneous semiconductor particle-dispersed glass having a thin film or fiber-like morphology.As an application of this method, it is possible to produce optical bistable devices, etc.
第1図は本発明のゾル−ゲル法による半導体ドープガラ
スの製造行程を示す楓 第2図は半導体ドープガラスの
光学的特性を示す飄 第3図は光双安定特性を示す図で
あもFigure 1 shows the manufacturing process of semiconductor-doped glass using the sol-gel method of the present invention. Figure 2 shows the optical properties of semiconductor-doped glass. Figure 3 shows the optical bistability characteristics.
Claims (3)
成する過程において、あらかじめゾルの分散媒に可溶性
のカチオン源とイオウ化合物とを加えておいたゾルをゲ
ル化させ、得られたゲルを熱処理することにより半導体
微粒子を分散させることを特徴とする半導体微粒子分散
ガラスの製造方法。(1) In the process of creating semiconductor fine particle dispersed glass using the sol-gel method, a sol is gelled by adding a soluble cation source and a sulfur compound to the dispersion medium of the sol in advance, and the resulting gel is heat-treated. A method for producing semiconductor fine particle dispersed glass, characterized by dispersing semiconductor fine particles.
いは鉛化合物の内の何れか一種であることを特徴とする
請求項1記載の半導体微粒子分散ガラスの製造方法。(2) The method for producing semiconductor fine particle dispersed glass according to claim 1, wherein the cation source is one of a cadmium compound, a zinc compound, or a lead compound.
るいはファイバー状であることを特徴とする請求項1も
しくは2何れかに記載の半導体微粒子分散ガラスの製造
方法。(3) The method for producing a semiconductor particle-dispersed glass according to claim 1 or 2, wherein the semiconductor particle-dispersed glass is in the form of a bulk, a film, or a fiber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1266447A JP2803229B2 (en) | 1989-10-13 | 1989-10-13 | Method for producing semiconductor fine particle dispersed glass |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1266447A JP2803229B2 (en) | 1989-10-13 | 1989-10-13 | Method for producing semiconductor fine particle dispersed glass |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03127033A true JPH03127033A (en) | 1991-05-30 |
JP2803229B2 JP2803229B2 (en) | 1998-09-24 |
Family
ID=17431063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1266447A Expired - Fee Related JP2803229B2 (en) | 1989-10-13 | 1989-10-13 | Method for producing semiconductor fine particle dispersed glass |
Country Status (1)
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JP (1) | JP2803229B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009103055A (en) * | 2007-10-23 | 2009-05-14 | Toyota Motor Corp | Control device for internal combustion engine |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03109236A (en) * | 1989-09-22 | 1991-05-09 | Hoya Corp | Production of glass dispersed with superfine particle of semiconductor |
-
1989
- 1989-10-13 JP JP1266447A patent/JP2803229B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03109236A (en) * | 1989-09-22 | 1991-05-09 | Hoya Corp | Production of glass dispersed with superfine particle of semiconductor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009103055A (en) * | 2007-10-23 | 2009-05-14 | Toyota Motor Corp | Control device for internal combustion engine |
Also Published As
Publication number | Publication date |
---|---|
JP2803229B2 (en) | 1998-09-24 |
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