JPH03125063U - - Google Patents
Info
- Publication number
- JPH03125063U JPH03125063U JP3361390U JP3361390U JPH03125063U JP H03125063 U JPH03125063 U JP H03125063U JP 3361390 U JP3361390 U JP 3361390U JP 3361390 U JP3361390 U JP 3361390U JP H03125063 U JPH03125063 U JP H03125063U
- Authority
- JP
- Japan
- Prior art keywords
- cooling roll
- vapor deposition
- evaporation chamber
- cooling
- disposed below
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例に係る真空蒸着装置
の破断側面図、第２図は第１図のＡ−Ａ線に沿う
断面図、第３図は従来の真空蒸着装置の破断側面
図、第４図は第３図のＡ−Ａ線に沿う断面図であ
る。
１……ケーシング、１ａ……真空蒸着室、２…
…走行基板、４……冷却ロール、５……デフレク
タロール、６……るつぼ、７……ヒータ、１０…
…付着物除去装置、１１……受け皿、１５……蒸
着材、３１……レール、３２……エツジマスク。
Fig. 1 is a cutaway side view of a vacuum evaporation apparatus according to an embodiment of the present invention, Fig. 2 is a sectional view taken along line A-A in Fig. 1, and Fig. 3 is a cutaway side view of a conventional vacuum evaporation apparatus. , FIG. 4 is a sectional view taken along line A--A in FIG. 3. 1...Casing, 1a...Vacuum deposition chamber, 2...
... Running board, 4... Cooling roll, 5... Deflector roll, 6... Crucible, 7... Heater, 10...
... Deposit removal device, 11 ... saucer, 15 ... vapor deposition material, 31 ... rail, 32 ... edge mask.
Claims (1)
の走行基板を巻回して冷却する冷却ロールと、前
記蒸着室内で前記冷却ロールの下方に配置され、
蒸着材の蒸気を発生させるるつぼと、前記蒸着室
内に設けられ、前記走行基板の両エツジ及び前記
冷却ロールの両端部を覆つてこの部分に前記蒸着
材が付着するのを防止する一対のエツジマスクと
を具備し、前記エツジマスクのマスク面を前記冷
却ロールの外周面に沿つて円弧状に形成するとと
もに冷却ロール及び走行基板と非接触の状態でそ
の両端部の下方に配置し、かつ前記冷却ロールを
軸心方向へ移動できるようにしたことを特徴とす
る真空蒸着装置。 a vacuum evaporation chamber; a cooling roll provided in the evaporation chamber for winding and cooling a strip-shaped traveling substrate; and a cooling roll disposed below the cooling roll in the evaporation chamber;
a crucible that generates vapor of a vapor deposition material; a pair of edge masks that are provided in the vapor deposition chamber and cover both edges of the running substrate and both ends of the cooling roll to prevent the vapor deposition material from adhering to these portions; The mask surface of the edge mask is formed in an arc shape along the outer peripheral surface of the cooling roll, and is disposed below both ends of the cooling roll and the running substrate in a non-contact state, and the cooling roll is A vacuum evaporation device characterized by being able to move in the axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361390U JPH03125063U (en) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361390U JPH03125063U (en) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125063U true JPH03125063U (en) | 1991-12-18 |
Family
ID=31537409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361390U Pending JPH03125063U (en) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125063U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018530B2 (en) * | 1977-02-28 | 1985-05-10 | 積水化学工業株式会社 | Method and device for manufacturing thermoplastic resin blow molded products |
| JPS6436554A (en) * | 1987-07-31 | 1989-02-07 | Nissin Kogyo Kk | Tandem-type master cylinder |
| JPH029109A (en) * | 1988-06-28 | 1990-01-12 | Matsushita Electric Ind Co Ltd | High tension transformer |
-
1990
- 1990-03-30 JP JP3361390U patent/JPH03125063U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018530B2 (en) * | 1977-02-28 | 1985-05-10 | 積水化学工業株式会社 | Method and device for manufacturing thermoplastic resin blow molded products |
| JPS6436554A (en) * | 1987-07-31 | 1989-02-07 | Nissin Kogyo Kk | Tandem-type master cylinder |
| JPH029109A (en) * | 1988-06-28 | 1990-01-12 | Matsushita Electric Ind Co Ltd | High tension transformer |