JPH03123244U - - Google Patents
Info
- Publication number
- JPH03123244U JPH03123244U JP3310690U JP3310690U JPH03123244U JP H03123244 U JPH03123244 U JP H03123244U JP 3310690 U JP3310690 U JP 3310690U JP 3310690 U JP3310690 U JP 3310690U JP H03123244 U JPH03123244 U JP H03123244U
- Authority
- JP
- Japan
- Prior art keywords
- leak detector
- detector
- helium gas
- gas
- liquid nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 239000003463 adsorbent Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000004949 mass spectrometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図は本考案の実施例に係るヘリウムリーク
デイテクタの概略図、第２図は従来のヘリウムリ
ークデイテクタの概略図、第３図はデイテクタ本
体の外部に液体窒素冷却吸着材を設けた従来例の
ヘリウムリークデイテクタを示す概略図である。
１……コールドトラツプ、２……質量分析器、
３……油拡散真空ポンプ、４……油回転真空ポン
プ、６……多孔性吸着材、７……漏洩箇所、８…
…真空装置、９……ヘリウムガス供給容器、１０
……デイテクタ本体、１１……液体窒素。
Fig. 1 is a schematic diagram of a helium leak detector according to an embodiment of the present invention, Fig. 2 is a schematic diagram of a conventional helium leak detector, and Fig. 3 is a schematic diagram of a helium leak detector according to an embodiment of the present invention. FIG. 2 is a schematic diagram showing a conventional helium leak detector. 1...cold trap, 2...mass spectrometer,
3...Oil diffusion vacuum pump, 4...Oil rotary vacuum pump, 6...Porous adsorbent, 7...Leakage location, 8...
...Vacuum device, 9...Helium gas supply container, 10
...detector body, 11...liquid nitrogen.
Claims (1)
器において、前記検知器に内蔵された液体窒素に
よるコールドトラツプ容器の真空部壁面の一部に
気体を吸着する吸着材を設置することを特徴とす
るヘリウムガス漏洩検知器。 A mass spectrometry type leak detector for detecting helium gas, characterized in that an adsorbent for adsorbing gas is installed on a part of the wall surface of a vacuum section of a liquid nitrogen cold trap container built into the detector. Helium gas leak detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3310690U JPH03123244U (en) | 1990-03-29 | 1990-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3310690U JPH03123244U (en) | 1990-03-29 | 1990-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123244U true JPH03123244U (en) | 1991-12-16 |
Family
ID=31536493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3310690U Pending JPH03123244U (en) | 1990-03-29 | 1990-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123244U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007335391A (en) * | 2006-06-16 | 2007-12-27 | Nan Ya Printed Circuit Board Corp | Passage board of fuel cell |
| JP2008010385A (en) * | 2006-06-28 | 2008-01-17 | Nan Ya Printed Circuit Board Corp | Fuel cell module with corrugated passage plate |
-
1990
- 1990-03-29 JP JP3310690U patent/JPH03123244U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007335391A (en) * | 2006-06-16 | 2007-12-27 | Nan Ya Printed Circuit Board Corp | Passage board of fuel cell |
| JP2008010385A (en) * | 2006-06-28 | 2008-01-17 | Nan Ya Printed Circuit Board Corp | Fuel cell module with corrugated passage plate |