JPH03122888A - Magnetic bubble element - Google Patents

Magnetic bubble element

Info

Publication number
JPH03122888A
JPH03122888A JP1259914A JP25991489A JPH03122888A JP H03122888 A JPH03122888 A JP H03122888A JP 1259914 A JP1259914 A JP 1259914A JP 25991489 A JP25991489 A JP 25991489A JP H03122888 A JPH03122888 A JP H03122888A
Authority
JP
Japan
Prior art keywords
bubble
transfer path
transfer
parts
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1259914A
Other languages
Japanese (ja)
Inventor
Minoru Hiroshima
實 廣島
Masahiro Yanai
雅弘 箭内
Kazuhiko Nakahama
和彦 中浜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1259914A priority Critical patent/JPH03122888A/en
Publication of JPH03122888A publication Critical patent/JPH03122888A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To stabilize the transfer of bubbles and to suppress the malfunction of transfer by introducing discontinuous parts into the parts where the transfer is unstable and the malfunction is liable to occur. CONSTITUTION:This element has the discontinuous and uncoupled gap parts G in the junction parts E where the bubbles transfer from horizontal part patterns 10-1 to vertical part patterns 10-2, i.e. the parts E emitting to the transfer path of the straight parts B from the corner parts A. The transfer of the bubbles in the arrow direction in these parts is stabilized and the malfunction is prevented by the introduction of the discontinuous parts G. The magnetic bubble element which eliminates the malfunction and has the improved bubble transfer paths is obtd. in this way.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、イオン打込み方式による磁気バブル転送路を
備えた磁気バブル素子に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic bubble element having a magnetic bubble transfer path using an ion implantation method.

[従来の技術] 磁気バブル素子のバブル転送路として従来のパーマロイ
薄膜パタンに替わり、イオン打込み方式の転送路パタン
を使用することが試みられており。
[Prior Art] In place of the conventional permalloy thin film pattern, attempts have been made to use an ion implantation type transfer path pattern as a bubble transfer path in a magnetic bubble element.

これにより高集積の素子の実現が可能であることが知ら
れている。イオン打込み方式の転送路は、磁気バブル媒
体となる磁性膜の表面にH2”、 He”、Ne+等の
イオンを選択的に打込むことにより形成される。このイ
オン打込み層を面内回転磁界HRで磁化することにより
、磁気バブルはイオン打込み層パタンの境界に沿って転
送される。この種のバブル転送方式については例えば、
I E’ Trans。
It is known that this makes it possible to realize highly integrated devices. The ion implantation transfer path is formed by selectively implanting ions such as H2'', He'', Ne+, etc. into the surface of a magnetic film that serves as a magnetic bubble medium. By magnetizing this ion implantation layer with an in-plane rotating magnetic field HR, magnetic bubbles are transferred along the boundaries of the ion implantation layer pattern. For this kind of bubble transfer method, for example,
I E' Trans.

Magn、、MAG−13、No、6 P、1744(
1977)において論じられている。
Magn, MAG-13, No. 6 P, 1744 (
1977).

[発明が解決しようとする課題] 第2図は、従来の磁気バブル素子の磁気バブル転送路の
要部を拡大した模式図で、以下これにしたがって説明す
る。
[Problems to be Solved by the Invention] FIG. 2 is an enlarged schematic diagram of the main part of a magnetic bubble transfer path of a conventional magnetic bubble element, and the following description will be made accordingly.

第2図(a)は転送路パタンの平面図の例、そして第2
図(b)はその断面図の例を、それぞれ示している。平
面図(a)において10は、磁気バブルを転送するイオ
ン打込み方式による転送路であり、10の外部工2がイ
オンの打込まれている領域である。断面図(b)におい
て1は、磁気バブルBuを存在させている磁性膜から成
るバブル材料層である。この層の表面に部分的に82 
”、He”、Ne+等のイオンを打込むことによって、
周囲がイオン打込み領域■2に囲まれ、内部が非打込み
領域からなるバブル転送路10が形成される。
FIG. 2(a) is an example of a plan view of a transfer path pattern, and
Figure (b) shows an example of the cross-sectional view. In the plan view (a), reference numeral 10 indicates a transfer path using an ion implantation method for transferring magnetic bubbles, and an external process 2 of 10 is a region where ions are implanted. In the cross-sectional view (b), reference numeral 1 denotes a bubble material layer made of a magnetic film in which magnetic bubbles Bu exist. Partially on the surface of this layer 82
By implanting ions such as ", He", Ne+, etc.
A bubble transfer path 10 is formed, which is surrounded by the ion implantation region (2) and has a non-implantation region inside.

この磁性膜上にSiO2、SiO、ポリイミド樹脂など
の絶縁膜2を形成する。さらに、この上に導体バタンや
保護膜やバブル検出器やボンディングバット等の層を含
むが、本発明と直接関係しないのでこの図では省略して
いる。
An insulating film 2 made of SiO2, SiO, polyimide resin, etc. is formed on this magnetic film. Further, there are layers such as a conductor button, a protective film, a bubble detector, and a bonding bat on top of this, but these are omitted in this figure because they are not directly related to the present invention.

再び第2図(a)を用いて、磁気バブルが転送路にした
がって転送される動作機構について説明する。外部から
面内回転磁界I(Rを加え、転送路10の周囲にあるイ
オン打込み層を磁化することにより、バブルを転送路1
0の境界に沿って転送させることができる。回転磁界H
Rの回転方向が同図の例のように反時計回りである場合
、バブルは矢印方向に転送される。同図では、バブルの
転送径路を90°又は180°変更するコーナ転送路の
例を示しているが、従来のバブル転送路10のバタンは
、連続してつながっているのが特徴的である。従って、
これらのバタン境界に沿って転送されるバブルの転送径
路も、バブル転送路10上を連続的につながった径路と
なる。
Referring again to FIG. 2(a), the operating mechanism in which magnetic bubbles are transferred along the transfer path will be explained. By applying an in-plane rotating magnetic field I (R) from the outside and magnetizing the ion implantation layer around the transfer path 10, the bubbles are transferred to the transfer path 1.
It can be transferred along the 0 boundary. Rotating magnetic field H
If the rotation direction of R is counterclockwise as in the example in the figure, the bubbles are transferred in the direction of the arrow. Although the figure shows an example of a corner transfer path that changes the bubble transfer path by 90 degrees or 180 degrees, the conventional bubble transfer path 10 is characterized in that the bangs are connected continuously. Therefore,
The transfer path of bubbles transferred along these baton boundaries is also a continuous path on the bubble transfer path 10.

このようにバブル転送路10のバタンか連続してつなが
っているのが、従来のイオン打込み転送路の特徴であり
、このため、イオン打込み転送路のことをコンティギュ
アス・ディスク(連続した円板状バタン)と呼ばれるこ
ともあり、連続的につながっていることが、半ば前提条
件でもあった。
It is a characteristic of the conventional ion implantation transfer path that the bubble transfer path 10 is connected continuously in this way, and for this reason, the ion implantation transfer path is called a continuous disk. It was also called a ``batan'', and it was partly a prerequisite that they be connected in a continuous manner.

さて、このように連続したバタン構成をとっている従来
のバブル転送路において、同図(a)に示すように、バ
ブルが水平部バタン10−1から垂直部バタン10−2
にかかるつなぎ部E、つまリコーナ部Aから直線部Bに
出る所Eで、転送が不安定となり、誤動作を起こし易く
1問題があった。
Now, in the conventional bubble transfer path having such a continuous bump configuration, as shown in FIG.
There was one problem in that the transfer became unstable and malfunctions were likely to occur at the connecting portion E where the transfer was made, and at the point E where the reclining portion A exited from the rectilinear portion B.

したがって、本発明の目的は、この誤動作を解消し、改
良されたバブル転送路を備えた磁気バブル素子を提供す
ることにある。
Therefore, an object of the present invention is to eliminate this malfunction and provide a magnetic bubble element with an improved bubble transfer path.

[課題を解決するための手段] 上記目的を達成するために1本発明では、バブル転送路
を、連続的につながった連結バタンで構成する従来の方
式と異なり、不連続部分をバブル転送径路上に備えた構
成にしている点に特徴がある。それ故、上記本発明の目
的は、 (1)、イオン打込み方式の磁気バブル転送路を備えた
磁気バブル素子であって、磁気バブルが転送される前記
転送径路上の途中に使用バブル径dの2倍以下のギャッ
プ長の不連続部分を設けた転送路を備えて成る磁気バブ
ル素子により、そして、好ましくは、 (2)、上記不連続部分を上記バブル転送路のバブルの
転送方向を90’又は180°変えるコーナ転送路に設
けて成る磁気バブル素子により、達成される。
[Means for Solving the Problems] In order to achieve the above object, the present invention differs from the conventional system in which the bubble transfer path is constructed of continuously connected connecting tabs, in that discontinuous portions are placed on the bubble transfer path. It is distinctive in that it is structured in preparation for. Therefore, the object of the present invention is as follows: (1) A magnetic bubble element equipped with an ion implantation type magnetic bubble transfer path, in which a bubble diameter d of the used bubble is placed in the middle of the transfer path where magnetic bubbles are transferred. A magnetic bubble element comprising a transfer path provided with a discontinuous portion having a gap length of twice or less, and (2) preferably, (2) the discontinuous portion is arranged so that the bubble transfer direction of the bubble transfer path is 90'. Alternatively, this can be achieved by a magnetic bubble element provided in a corner transfer path that changes by 180°.

なお、この不連続・不連結なギャップ部分Gの好ましい
ギャップ長は、使用バブル径dの2倍以下で、さらに好
ましくはバブル径dにほぼ近いか、それより若干短い長
さである。いずれにしても使用バブル径dの2倍より長
いギャップは好ましくない。
The preferable gap length of this discontinuous/disconnected gap portion G is not more than twice the bubble diameter d used, and more preferably a length substantially close to or slightly shorter than the bubble diameter d. In any case, a gap longer than twice the bubble diameter d used is not preferred.

[作用コ バブル転送径路上において、転送が不安定となり誤動作
を起こし易い第2図(a)のE部に不連続部分を導入す
ることによって、E部でのイオン打込み層の磁化状態が
、回転磁界HRによって確実に磁化されて安定化し、バ
ブル転送誤動作を抑制することができる。
[By introducing a discontinuous part in the E part of Fig. 2 (a) on the action cobubble transfer path, where the transfer becomes unstable and tends to cause malfunctions, the magnetization state of the ion implantation layer in the E part is changed by the rotating magnetic field. It is reliably magnetized and stabilized by HR, and bubble transfer malfunctions can be suppressed.

[実施例コ 以下、図面を用いて本発明の一実施例を説明する。[Example code] An embodiment of the present invention will be described below with reference to the drawings.

第1図は、本発明の一実施例を示した転送路バタンの平
面図であり、先の第2図と同じものには同じ符号で示し
ている。この図から明らかなようにバブルが水平部バタ
ン10−1から垂直部バタン10−2にかかるつなぎ部
E、っまりコーナ部Aから直線部Bの転送路に出る所E
部に、不連続・不連結なギャップ部分Gを備えている点
に特徴がある。
FIG. 1 is a plan view of a transfer path button showing an embodiment of the present invention, and the same parts as in FIG. 2 are designated by the same reference numerals. As is clear from this figure, the bubble exits the transfer path from the horizontal part A to the vertical part B at the connecting part E from the horizontal part button 10-1 to the vertical part button 10-2, and from the corner part A to the straight part B.
It is characterized by having a gap portion G that is discontinuous and unconnected.

この不連続部分Gの導入により、バブルのこの部分での
矢印方向への転送が安定化し、誤動作が防止できること
を、実験により確認できた。この実施例では、バブル径
d=0.8μmのバブルを用いギャップ長1μmで全く
誤動作のない信頼性の高い転送特性が得られた。
It has been confirmed through experiments that the introduction of this discontinuous portion G stabilizes the transfer of the bubble in the direction of the arrow in this portion and prevents malfunctions. In this example, highly reliable transfer characteristics with no malfunctions were obtained using bubbles with a bubble diameter of d=0.8 μm and a gap length of 1 μm.

なお、上記実施例で説明したイオン打込み転送路10の
バタンの形状は1本発明の一例を示したものであり、こ
れ以外のその他の形状に対しても同様に適用でき、全く
同様の効果が得られることは、言うまでもない。
The shape of the button of the ion implantation transfer path 10 explained in the above embodiment shows one example of the present invention, and it can be applied to other shapes as well, and the same effect can be obtained. Needless to say, what you get.

[発明の効果] 本発明によれば、バブルの転送を安定化でき。[Effect of the invention] According to the present invention, bubble transfer can be stabilized.

転送誤動作を抑えたイオン打込み方式のバブル転送路を
備えた磁気バブル素子を実現することができた。
We were able to realize a magnetic bubble element equipped with an ion implantation bubble transfer path that suppresses transfer malfunctions.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例となるバブル転送路パタンの
平面図、そして第2図(a)及び(b)は従来のバブル
転送路パタンの平面図及び断面図である。 図において、 1・・・磁性膜       2・・・絶縁膜10・・
・イオン打込み方式バブル転送路101・・・バブル転
送路の水平部分 102・・・バブル転送路の垂直部分
FIG. 1 is a plan view of a bubble transfer path pattern according to an embodiment of the present invention, and FIGS. 2(a) and 2(b) are a plan view and a sectional view of a conventional bubble transfer path pattern. In the figure, 1...Magnetic film 2...Insulating film 10...
- Ion implantation bubble transfer path 101...Horizontal portion of the bubble transfer path 102...Vertical portion of the bubble transfer path

Claims (1)

【特許請求の範囲】 1、イオン打込み方式の磁気バブル転送路を備えた磁気
バブル素子であって、磁気バブルが転送される前記転送
径路上の途中に使用バブル径dの2倍以下のギャップ長
の不連続部分を設けた転送路を備えて成る磁気バブル素
子。 2、上記不連続部分を上記バブル転送路のバブルの転送
方向を90°又は180°変えるコーナ転送路に設けて
成る請求項1記載の磁気バブル素子。
[Claims] 1. A magnetic bubble element equipped with an ion implantation type magnetic bubble transfer path, in which a gap length on the transfer path where magnetic bubbles are transferred is not more than twice the bubble diameter d used. A magnetic bubble element comprising a transfer path with discontinuous portions. 2. The magnetic bubble element according to claim 1, wherein the discontinuous portion is provided in a corner transfer path that changes the bubble transfer direction of the bubble transfer path by 90 degrees or 180 degrees.
JP1259914A 1989-10-06 1989-10-06 Magnetic bubble element Pending JPH03122888A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1259914A JPH03122888A (en) 1989-10-06 1989-10-06 Magnetic bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1259914A JPH03122888A (en) 1989-10-06 1989-10-06 Magnetic bubble element

Publications (1)

Publication Number Publication Date
JPH03122888A true JPH03122888A (en) 1991-05-24

Family

ID=17340684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1259914A Pending JPH03122888A (en) 1989-10-06 1989-10-06 Magnetic bubble element

Country Status (1)

Country Link
JP (1) JPH03122888A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006230540A (en) * 2005-02-23 2006-09-07 Win Tec:Kk Game medium distributing and feeding device and game medium dispenser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006230540A (en) * 2005-02-23 2006-09-07 Win Tec:Kk Game medium distributing and feeding device and game medium dispenser

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