JPH03122531U - - Google Patents

Info

Publication number
JPH03122531U
JPH03122531U JP3049790U JP3049790U JPH03122531U JP H03122531 U JPH03122531 U JP H03122531U JP 3049790 U JP3049790 U JP 3049790U JP 3049790 U JP3049790 U JP 3049790U JP H03122531 U JPH03122531 U JP H03122531U
Authority
JP
Japan
Prior art keywords
quartz
silicon wafer
heat treatment
high temperature
quartz boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3049790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3049790U priority Critical patent/JPH03122531U/ja
Publication of JPH03122531U publication Critical patent/JPH03122531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP3049790U 1990-03-27 1990-03-27 Pending JPH03122531U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3049790U JPH03122531U (enrdf_load_html_response) 1990-03-27 1990-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3049790U JPH03122531U (enrdf_load_html_response) 1990-03-27 1990-03-27

Publications (1)

Publication Number Publication Date
JPH03122531U true JPH03122531U (enrdf_load_html_response) 1991-12-13

Family

ID=31533208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3049790U Pending JPH03122531U (enrdf_load_html_response) 1990-03-27 1990-03-27

Country Status (1)

Country Link
JP (1) JPH03122531U (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252932A (ja) * 1986-04-25 1987-11-04 Matsushita Electric Ind Co Ltd 半導体ウエハの熱処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252932A (ja) * 1986-04-25 1987-11-04 Matsushita Electric Ind Co Ltd 半導体ウエハの熱処理装置

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