JPH0312246U - - Google Patents

Info

Publication number
JPH0312246U
JPH0312246U JP7168989U JP7168989U JPH0312246U JP H0312246 U JPH0312246 U JP H0312246U JP 7168989 U JP7168989 U JP 7168989U JP 7168989 U JP7168989 U JP 7168989U JP H0312246 U JPH0312246 U JP H0312246U
Authority
JP
Japan
Prior art keywords
mask
case
antistatic
houses
windows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7168989U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7168989U priority Critical patent/JPH0312246U/ja
Publication of JPH0312246U publication Critical patent/JPH0312246U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案マスクケースの斜視図、第２図
は従来マスクケースの斜視図である。 １……上蓋、２……下蓋、３……ちようつがい
、４……止め具、６……金属箔（導電性材料箔）
。 FIG. 1 is a perspective view of a mask case of the present invention, and FIG. 2 is a perspective view of a conventional mask case. 1...Top lid, 2...Bottom cover, 3...Top pair, 4...Stopper, 6...Metal foil (conductive material foil)
.

Claims (1)

【実用新案登録請求の範囲】 透視可能で帯電防止効果を有する材料から成り
、半導体装置の製造に使用するマスクを収納し、
該マスクの保管及び運搬を行なうための帯電防止
マスクケースにおいて、 内面及び外面に、内部に収納された上記マスク
の確認を行なうための窓部を有する導電性材料箔
を被着したことを特徴とする帯電防止マスクケー
ス。[Claims for Utility Model Registration] A mask made of a material that can be seen through and has an antistatic effect, and which houses a mask used in the manufacture of semiconductor devices,
An antistatic mask case for storing and transporting the mask, characterized in that the inner and outer surfaces are coated with conductive material foil having windows for checking the mask stored inside. Anti-static mask case.
JP7168989U 1989-06-21 1989-06-21 Pending JPH0312246U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7168989U JPH0312246U (en) 1989-06-21 1989-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7168989U JPH0312246U (en) 1989-06-21 1989-06-21

Publications (1)

Publication Number Publication Date
JPH0312246U true JPH0312246U (en) 1991-02-07

Family

ID=31608945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7168989U Pending JPH0312246U (en) 1989-06-21 1989-06-21

Country Status (1)

Country Link
JP (1) JPH0312246U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103205U (en) * 1972-03-06 1973-12-03
JP2005351935A (en) * 2004-06-08 2005-12-22 Toppan Printing Co Ltd Container for housing photomask or photomask blanks

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103205U (en) * 1972-03-06 1973-12-03
JP2005351935A (en) * 2004-06-08 2005-12-22 Toppan Printing Co Ltd Container for housing photomask or photomask blanks

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