JPH0312246U - - Google Patents
Info
- Publication number
- JPH0312246U JPH0312246U JP7168989U JP7168989U JPH0312246U JP H0312246 U JPH0312246 U JP H0312246U JP 7168989 U JP7168989 U JP 7168989U JP 7168989 U JP7168989 U JP 7168989U JP H0312246 U JPH0312246 U JP H0312246U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- case
- antistatic
- houses
- windows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011888 foil Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Description
第1図は本考案マスクケースの斜視図、第2図
は従来マスクケースの斜視図である。
1……上蓋、2……下蓋、3……ちようつがい
、4……止め具、6……金属箔(導電性材料箔)
。
FIG. 1 is a perspective view of a mask case of the present invention, and FIG. 2 is a perspective view of a conventional mask case. 1...Top lid, 2...Bottom cover, 3...Top pair, 4...Stopper, 6...Metal foil (conductive material foil)
.
Claims (1)
、半導体装置の製造に使用するマスクを収納し、
該マスクの保管及び運搬を行なうための帯電防止
マスクケースにおいて、 内面及び外面に、内部に収納された上記マスク
の確認を行なうための窓部を有する導電性材料箔
を被着したことを特徴とする帯電防止マスクケー
ス。[Claims for Utility Model Registration] A mask made of a material that can be seen through and has an antistatic effect, and which houses a mask used in the manufacture of semiconductor devices,
An antistatic mask case for storing and transporting the mask, characterized in that the inner and outer surfaces are coated with conductive material foil having windows for checking the mask stored inside. Anti-static mask case.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7168989U JPH0312246U (en) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7168989U JPH0312246U (en) | 1989-06-21 | 1989-06-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0312246U true JPH0312246U (en) | 1991-02-07 |
Family
ID=31608945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7168989U Pending JPH0312246U (en) | 1989-06-21 | 1989-06-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0312246U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48103205U (en) * | 1972-03-06 | 1973-12-03 | ||
JP2005351935A (en) * | 2004-06-08 | 2005-12-22 | Toppan Printing Co Ltd | Container for housing photomask or photomask blanks |
-
1989
- 1989-06-21 JP JP7168989U patent/JPH0312246U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48103205U (en) * | 1972-03-06 | 1973-12-03 | ||
JP2005351935A (en) * | 2004-06-08 | 2005-12-22 | Toppan Printing Co Ltd | Container for housing photomask or photomask blanks |
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