JPH03122285U - - Google Patents
Info
- Publication number
- JPH03122285U JPH03122285U JP3091190U JP3091190U JPH03122285U JP H03122285 U JPH03122285 U JP H03122285U JP 3091190 U JP3091190 U JP 3091190U JP 3091190 U JP3091190 U JP 3091190U JP H03122285 U JPH03122285 U JP H03122285U
- Authority
- JP
- Japan
- Prior art keywords
- cam ring
- pump
- vane
- sliding body
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Rotary Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3091190U JPH03122285U (it) | 1990-03-26 | 1990-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3091190U JPH03122285U (it) | 1990-03-26 | 1990-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03122285U true JPH03122285U (it) | 1991-12-13 |
Family
ID=31533633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3091190U Pending JPH03122285U (it) | 1990-03-26 | 1990-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03122285U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9200368B2 (en) | 2004-05-12 | 2015-12-01 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser hole design |
-
1990
- 1990-03-26 JP JP3091190U patent/JPH03122285U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9200368B2 (en) | 2004-05-12 | 2015-12-01 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser hole design |