JPH03122277A - Differential pressure sealing device - Google Patents

Differential pressure sealing device

Info

Publication number
JPH03122277A
JPH03122277A JP26025489A JP26025489A JPH03122277A JP H03122277 A JPH03122277 A JP H03122277A JP 26025489 A JP26025489 A JP 26025489A JP 26025489 A JP26025489 A JP 26025489A JP H03122277 A JPH03122277 A JP H03122277A
Authority
JP
Japan
Prior art keywords
guide roll
long
ribbon
differential pressure
sealing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26025489A
Other languages
Japanese (ja)
Inventor
Masao Iguchi
征夫 井口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP26025489A priority Critical patent/JPH03122277A/en
Publication of JPH03122277A publication Critical patent/JPH03122277A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To apply high differential pressure sealing without contaminating or damaging the surface of a thin strip by providing a sealing attachment on a guide roll to form two concave circular sealing surfaces and blowing a high- rpressure gas in the opposite direction to the traveling of the strip. CONSTITUTION:The guide roll 2 is surrounded by the sealing attachment 3, and the concave circular sealing surface S1 for forming a tiny gap alpha, a second circular sealing surface S2 at a winding area and a slit (t) communication with the surface S2 are formed. A high-pressure gas is uniformly injected on the second circular sealing surface S2 in the cross direction of a long-sized thin strip 1 from a nozzle group 4 in the opposite direction to the traveling of the strip 1. The strip 1 is firmly attached to the guide roll 2 by the high-pressure gas. Consequently, the strip is not vibrated in traveling or cracked, and its surface is not damaged or contaminated by the dirt deposited before treatment.

Description

【発明の詳細な説明】 (産業上の利用分野) 長尺薄帯、例えば冷延ないし熱延鋼帯のような長尺材を
連続的に送給しつつこれに真空蒸着、イオンブレーティ
ング、スパッタリングなどのいわゆるドライブレーティ
ング法によって表面処理を施す際には複数の圧力差のあ
る空間領域相互によってドライブレーティング領域に至
る間に順次真空度を上げ、ついで下げていくエアー・ト
ウ・エアー(Air−to−Air)方式が用いられる
。この発明はこの差圧室相互間の圧力差を維持しつつ長
尺薄帯の通過を誘導するのに好適な差圧シール装置に関
するものである。
Detailed Description of the Invention (Industrial Field of Application) While continuously feeding a long ribbon, such as a cold-rolled or hot-rolled steel strip, it is subjected to vacuum deposition, ion blasting, etc. When surface treatment is performed using a so-called dry rating method such as sputtering, air-to-air (Air- (to-Air) method is used. The present invention relates to a differential pressure sealing device suitable for guiding the passage of a long ribbon while maintaining the pressure difference between the differential pressure chambers.

(従来の技術) エア・トウ・エア方式に関しては、例えば米国特許第2
384500号、同2972330号、同299641
0号明細書をはじめ、三菱重工技報Vo1.21 (1
984)h6のp1〜7などのように近年来の精密工作
技術の進歩と相まって、実用化が進められつつある。
(Prior art) Regarding the air-to-air method, for example, U.S. Patent No. 2
No. 384500, No. 2972330, No. 299641
Including Specification No. 0, Mitsubishi Heavy Industries Technical Report Vol. 1.21 (1
984) H6 p1 to p7, etc., are being put into practical use in conjunction with recent advances in precision machining technology.

これらのシール法のうちの、とくに最後に引用した文献
には、通板の向きにわずかに軸心をずらせた一対のロー
ル間に挟んで長尺材を各ロール周面に沿わせるようにし
て、シール面積を拡大することが、また最近に至って特
開昭62−13572号公報では、一対の通板ロールに
長尺材を囲うシールバーとアダプターとを組み合わせて
、その、囲いの内部にて差圧を維持する試みが提案され
ているが、何れにあっても一対のロール間に長尺材を挟
圧して通板するので、被処理物はその表裏面で曲げ応力
、圧縮応力が働き、さらには大きな張力も受ける。
Of these sealing methods, especially in the last cited document, a long material is sandwiched between a pair of rolls whose axes are slightly shifted in the direction of threading, and the long material is placed along the circumferential surface of each roll. Recently, Japanese Patent Application Laid-Open No. 13572/1983 has proposed a method of expanding the sealing area by combining a pair of threading rolls with a sealing bar and an adapter that encloses a long material. Attempts to maintain differential pressure have been proposed, but in either case, the long material is pressed between a pair of rolls and passed through, so bending stress and compressive stress act on the front and back surfaces of the workpiece. , and is also subjected to large amounts of tension.

このような張力や局部的な面圧の作用は、製品の品質に
悪影響を及ぼし、例えば一方向性けい素鋼板にエア・ト
ウ・エア方式を適用した際には磁気特性の劣化を起こす
ことがわかった。
The effects of such tension and local surface pressure have a negative impact on product quality, and for example, when applying the air-to-air method to unidirectional silicon steel sheets, they can cause deterioration of magnetic properties. Understood.

また上記のような問題に加え、長尺材の通板中の振動に
よる仮割れなども発生し易く、さらには長尺薄帯の搬送
過程で付着したごみなどによって、汚れや表面きずが生
じたりすることが指摘されるようになった。
In addition to the above-mentioned problems, temporary cracks are likely to occur due to vibrations during the threading of long strips, and dirt and surface scratches may occur due to dust that has adhered during the conveyance process of long strips. It has been pointed out that

(発明が解決しようとする課題) 長尺薄帯の通板時に品質劣化の原因となる強い面圧を受
けたり、通板中の長尺材の振動に起因した仮割れ、ある
いは薄帯の搬送過程で付着したごみに起因した汚れや表
面きずの発生なしにより高い差圧シールが実現できる装
置を提案することがこの発明の目的である。
(Problems to be solved by the invention) During the threading of a long thin strip, strong surface pressure that causes quality deterioration may occur, temporary cracking may occur due to vibration of the long thin strip during threading, or the thin strip may be transported. It is an object of the present invention to propose an apparatus that can realize a higher differential pressure seal without generating dirt or surface scratches due to dust attached during the process.

(課題を解決するための手段) この発明は、圧力差のある空間領域相互間の境界にて長
尺薄帯の巻きがけ案内を司る単一のガイドロールと、こ
のガイドロールの外周をほぼ半周にわたって取り囲み長
尺薄帯の巻きがけ域を除いてガイドロールの外周面に対
し極微小なすき間を形成する凹円弧状シール面と巻きが
け域にて長尺薄帯の背面ならびに両側縁に対してやはり
極微細なすき間を直接形成する第2の凹円弧状シール面
および第2の凹円弧状シール面の奥でこれに連なってガ
イドロールの接線方向に長尺薄帯の断面寸法に比しはる
かに太き(開口するスリットを有するアタッチメントを
備え、上記第2の凹円弧状シール面に、搬送過程におけ
る長尺薄帯の進行方向に対して逆向きに高圧ガスを吹き
つけ、この高圧ガスを該シール面とガイドロールとで形
成されるすき間を通して大気側に放出するノズル群を配
置したことを特徴とする差圧シール装置である。
(Means for Solving the Problems) The present invention includes a single guide roll that guides the winding of a long ribbon at the boundary between spatial regions where there is a pressure difference, and a single guide roll that guides the winding of a long ribbon at the boundary between spatial regions where there is a pressure difference. A concave arc-shaped sealing surface that surrounds the long thin strip and forms an extremely small gap with the outer peripheral surface of the guide roll except for the winding area of the long thin strip, and the back surface and both side edges of the long thin strip in the winding area. Also, there is a second concave arc-shaped sealing surface that directly forms an extremely fine gap, and a concave arc-shaped sealing surface that extends in the tangential direction of the guide roll at the back of the second concave arc-shaped sealing surface, which is much larger than the cross-sectional dimension of the long ribbon. The high-pressure gas is sprayed onto the second concave arc-shaped sealing surface in a direction opposite to the traveling direction of the long ribbon during the conveyance process. This differential pressure sealing device is characterized in that a group of nozzles are arranged to emit air to the atmosphere through a gap formed between the sealing surface and the guide roll.

ここにこの発明では、巻きがけ域にて長尺薄帯の背面に
対して微小すき間を直接形成する第2の凹円弧状シール
面に長尺薄帯の長手方向と交差する向きに複数の溝を形
成しておくのがよい。
Here, in this invention, a plurality of grooves are provided in a direction intersecting the longitudinal direction of the long ribbon on the second concave arc-shaped sealing surface that directly forms a minute gap with the back surface of the long ribbon in the winding region. It is better to form

さて第1図(a)(ロ)(C)にこの発明に従う装置の
一例を大気圧P、から添数字の順の圧力Pに高めていく
場合について示し、同図における番号1は長尺薄帯、2
は例えば圧力P1になる空間と圧力P0になる空間領域
の境界にて長尺薄帯1の巻きがけ案内を司る単一のガイ
ドロールであり、このガイドロール2は図示はしないが
軸受は支持されていて長尺薄帯1を予め設定された巻付
き接触角eにて巻きがけする。また3はアタッチメント
であって、このアタッチメント3はガイドロール2の外
周をほぼ半周にわたって取り囲み該薄帯1の巻きがけ域
を除いてガイドロール2の外周面に対して極微小なすき
間αを形成する凹円弧状シール面Slと巻きがけ域にて
該薄帯lの背面並びに両縁に対してやはり極微細なすき
間α1.α2を直接形成する第2の凹円弧状シール面S
2とこのシール面S2の奥でこれに連なってガイドロー
ル2の接線方向に該薄帯lの断面寸法に比しはるかに大
きく開口するスリットtを有する。また4はヘッダーH
を有し、搬送過程にある長尺薄帯lの進行方向に対して
逆向きに高圧ガスを吹きつけ、このガスをすき間α1を
通して大気側に放出させるノズル群であり、このノズル
群4はシーリングアタッチメント3の第2の凹円弧状シ
ール面S2に、長尺薄帯1の幅方向にわたって均一に噴
射できるように設けられる。なお、ノズル群4による高
圧ガスの吹きつけ機構は図示の如きに限定されるもので
はなくいかようであってもよい。また5はケーシングk
によって形成される第一差圧室、6は同じく第二差圧室
、7は第三差圧室である。上記の構成になる差圧シール
装置においてより高い差圧を維持するために第2図に示
すように、アタッチメント3の少なくとも凹円弧状シー
ル面S!に長尺薄帯1の長手方向と交差する向きで複数
の溝3aを設けることができる。この溝3aは幅が0.
1〜10mm。
Now, Fig. 1 (a), (b), and (c) show an example of a device according to the present invention in which the pressure is increased from atmospheric pressure P to pressure P in the order of the subscript number, and number 1 in the figure is a long thin Obi, 2
For example, is a single guide roll that guides the winding of the long ribbon 1 at the boundary between a space where the pressure is P1 and a space where the pressure is P0, and although this guide roll 2 is not shown, a bearing is supported. Then, the long thin ribbon 1 is wound at a preset winding contact angle e. Reference numeral 3 denotes an attachment, which surrounds the outer circumference of the guide roll 2 over approximately half the circumference and forms an extremely small gap α with respect to the outer circumferential surface of the guide roll 2 except for the area where the thin ribbon 1 is wound. There is also an extremely fine gap α1 between the concave arc-shaped sealing surface Sl and the back surface and both edges of the ribbon l in the winding region. Second concave arc-shaped sealing surface S directly forming α2
2, and a slit t which is connected to the sealing surface S2 in the tangential direction of the guide roll 2 and has a much larger opening than the cross-sectional dimension of the ribbon l. Also, 4 is header H
This nozzle group 4 blows high-pressure gas in the opposite direction to the traveling direction of the long ribbon l in the conveying process and releases this gas to the atmosphere through the gap α1. It is provided on the second concave arc-shaped sealing surface S2 of the attachment 3 so that the spray can be sprayed uniformly across the width of the long ribbon 1. Note that the mechanism for blowing high-pressure gas by the nozzle group 4 is not limited to that shown in the drawings, and may be of any other type. Also, 5 is the casing k
Similarly, 6 is a second differential pressure chamber, and 7 is a third differential pressure chamber. In order to maintain a higher differential pressure in the differential pressure sealing device configured as described above, at least the concave arc-shaped sealing surface S of the attachment 3 is required as shown in FIG. A plurality of grooves 3a can be provided in a direction intersecting the longitudinal direction of the long ribbon 1. This groove 3a has a width of 0.
1-10mm.

深さ0.01〜5mm 、間隔(ピッチ)が1〜20m
*+程度の複数の線状とするのが好ましく、その断面形
状はいかようであってもかまわない。第3図(a)(ト
))に上掲第1図に示した装置のシーリングアッタチメ
ント3の外観を、又第4図に上掲第2図に示した装置の
シーリングアッタチメント3の外観をそれぞれ分かり易
く図解した。なお、第1図に示した例において差圧室5
.6問および6.7間の差圧(P+  Pg)、(Pg
  Pz)は(Pm −p+)に比しはるかに小さいこ
ともあって、軸心を通板方向にずらせたロール対8,9
によるロールシールを用いた場合を示した。
Depth 0.01~5mm, interval (pitch) 1~20m
It is preferable to have a plurality of linear shapes of about *+, and the cross-sectional shape may be any shape. 3(a)(g)) show the appearance of the sealing attachment 3 of the device shown in FIG. 1 above, and FIG. 4 shows the appearance of the sealing attachment 3 of the device shown in FIG. 2 above. Illustrated for easy understanding. In addition, in the example shown in FIG.
.. Differential pressure (P+ Pg) between questions 6 and 6.7, (Pg
Since Pz) is much smaller than (Pm - p+), a pair of rolls 8 and 9 whose axes are shifted in the threading direction is used.
The case using a roll seal according to the above is shown.

(作 用) 長尺薄帯1はガイドロール2に巻きがけられて極く微小
なすき間を通して大気圧P0から第1差圧室5内の圧力
P、に至るとくに高い差圧の下に送り進められ、しかも
この際第2の凹円弧状シール面S2のノズル群4より噴
出させた空気、窒素あるいはアルゴンガス等の高圧ガス
によって、微小すき間α、に比較的大きな乱流を積極的
に発生させることができるので、品質の劣化原因となる
強い面圧を受けることなしにより高い差圧シールが実現
できることとなる。また長尺薄帯lはこの高圧ガスによ
ってガイドロール2に強固に密着させられることになる
から、薄帯lの振動に起因した仮割れは効果的に回避さ
れる。
(Function) The long ribbon 1 is wound around the guide roll 2 and fed through an extremely small gap under a particularly high differential pressure from atmospheric pressure P0 to pressure P in the first differential pressure chamber 5. Moreover, at this time, a relatively large turbulent flow is actively generated in the minute gap α by high-pressure gas such as air, nitrogen, or argon gas jetted from the nozzle group 4 of the second concave arc-shaped sealing surface S2. Therefore, a higher differential pressure seal can be realized without being subjected to strong surface pressure that causes quality deterioration. Further, since the long ribbon l is firmly brought into close contact with the guide roll 2 by this high-pressure gas, temporary cracking caused by vibration of the ribbon l is effectively avoided.

なお、第1図に示したところにおいてすき間α2につい
ては長尺薄帯1の幅が変わった場合多少は許容せざるを
えないが、気密性を有しロールの軸方向に移動可能な補
助板等を設置することにより適宜に対処できる。
In addition, in the case shown in Fig. 1, the gap α2 must be allowed to some extent if the width of the long ribbon 1 changes; This can be dealt with as appropriate by setting up the following.

(実施例) この発明に従い差圧シールを2回繰り返すことによって
大気圧P、から圧力P、さらにPtからP、への高差圧
をより有利に達成し得る例を示した第2図の装置を適用
して、ここに板厚0.20m1w、板幅500gamの
冷延鋼板をラインスピード15a/sinにて通板させ
、各差圧室のシール状況について調査した。その結果を
表−1に示すが、この発明に従うことで高い差圧を維持
できるのは勿論、仮割れやごみ等の付着による汚れ、表
面きずの発生が全くないことが確かめられた。
(Example) The apparatus shown in FIG. 2 shows an example in which a high differential pressure from atmospheric pressure P to pressure P and further from Pt to P can be more advantageously achieved by repeating the differential pressure seal twice according to the present invention. A cold-rolled steel plate having a thickness of 0.20 m1w and a width of 500 gam was passed through the test tube at a line speed of 15 a/sin, and the sealing condition of each differential pressure chamber was investigated. The results are shown in Table 1, and it was confirmed that according to the present invention, not only a high differential pressure could be maintained, but also no temporary cracks, no stains due to adhesion of dust, and no surface scratches.

(発明の効果) かくしてこの発明によれば、より高い差圧が維持できる
のは勿論であるが品質劣化の原因となる強い面圧を受け
ることもないし、搬送過程における板の振動に起因した
板割れや処理前に付着した薄帯表面のごみなどに起因し
た表面きず、よごれ等を効果的に回避できる。
(Effects of the Invention) Thus, according to the present invention, not only can a higher differential pressure be maintained, but the plate is not subjected to strong surface pressure that causes quality deterioration, and the plate It is possible to effectively avoid surface flaws, dirt, etc. caused by cracks and dust attached to the surface of the ribbon before processing.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)(b)(C)はこの発明に従う差圧シール
装置の構成説明図、 第2図はこの発明に従う差圧シール装置の他の例を示し
た図、 第3図(a)(b)及び第4図は、この発明に従う差圧
シール装置の要部の斜視図である。 1・・・長尺薄帯     2・・・ガイドロール3・
・・シーリングアタッチメント 3a・・・溝       4・・・噴射ノズル5・・
・第一差圧室    6・・・第二差圧室7・・・第三
差圧室8,9・・・シールロールS1・・・凹円弧状シ
ール面 ・・・第2の凹円弧状シール面 α8.α2・・・微小すき間
Figures 1(a), (b), and (C) are explanatory diagrams of the configuration of the differential pressure sealing device according to the present invention, Figure 2 is a diagram showing another example of the differential pressure sealing device according to the present invention, and Figure 3(a) )(b) and FIG. 4 are perspective views of essential parts of the differential pressure sealing device according to the present invention. 1... Long ribbon 2... Guide roll 3.
...Sealing attachment 3a...Groove 4...Injection nozzle 5...
-First differential pressure chamber 6...Second differential pressure chamber 7...Third differential pressure chamber 8, 9...Seal roll S1...Concave arc sealing surface...Second concave arc shape Seal surface α8. α2...Small gap

Claims (2)

【特許請求の範囲】[Claims] 1.圧力差のある空間領域相互間の境界にて長尺薄帯の
巻きがけ案内を司る単一のガイドロールと、このガイド
ロールの外周をほぼ半周にわたって取り囲み長尺薄帯の
巻きがけ域を除いてガイドロールの外周面に対し極微小
なすき間を形成する凹円弧状シール面と巻きがけ域にて
長尺薄帯の背面ならびに両側縁に対してやはり極微細な
すき間を直接形成する第2の凹円弧状シール面および第
2の凹円弧状シール面の奥でこれに連なってガイドロー
ルの接線方向に長尺薄帯の断面寸法に比しはるかに大き
く開口するスリットを有するアタッチメントを備え、上
記第2の凹円弧状シール面に、搬送過程における長尺薄
帯の進行方向に対して逆向きに高圧ガスを吹きつけ、こ
の高圧ガスを該シール面とガイドロールとで形成される
すき間を通して大気側に放出するノズル群を配置したこ
とを特徴とする差圧シール装置。
1. A single guide roll that guides the winding of the long thin ribbon at the boundary between spatial regions where there is a pressure difference, and a single guide roll that surrounds the outer circumference of this guide roll for approximately half the circumference, excluding the winding area of the long thin ribbon. A concave arc-shaped seal surface that forms an extremely small gap with respect to the outer peripheral surface of the guide roll, and a second recess that also directly forms an extremely small gap with the back surface and both side edges of the long thin strip in the winding region. An attachment having a slit connected to the arcuate sealing surface and the second concave arcuate sealing surface and opening in the tangential direction of the guide roll much larger than the cross-sectional dimension of the long ribbon; High-pressure gas is blown onto the concave arc-shaped sealing surface of No. 2 in the opposite direction to the traveling direction of the long ribbon during the conveyance process, and the high-pressure gas is passed through the gap formed between the sealing surface and the guide roll to the atmosphere side. A differential pressure sealing device characterized by having a group of nozzles arranged to emit water.
2.巻きがけ域にて長尺薄帯の背面に対して微小すき間
を直接形成する第2の凹円弧状シール面に長尺薄帯の長
手方向と交差する向きに複数の溝を形成した請求項1に
記載の差圧シール装置。
2. Claim 1: A plurality of grooves are formed in a direction intersecting the longitudinal direction of the long ribbon on the second concave arc-shaped sealing surface that directly forms a minute gap with the back surface of the long ribbon in the winding region. The differential pressure sealing device described in .
JP26025489A 1989-10-06 1989-10-06 Differential pressure sealing device Pending JPH03122277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26025489A JPH03122277A (en) 1989-10-06 1989-10-06 Differential pressure sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26025489A JPH03122277A (en) 1989-10-06 1989-10-06 Differential pressure sealing device

Publications (1)

Publication Number Publication Date
JPH03122277A true JPH03122277A (en) 1991-05-24

Family

ID=17345493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26025489A Pending JPH03122277A (en) 1989-10-06 1989-10-06 Differential pressure sealing device

Country Status (1)

Country Link
JP (1) JPH03122277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016017182A (en) * 2014-07-04 2016-02-01 株式会社Ihi Vacuum seal device and vacuum process processing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016017182A (en) * 2014-07-04 2016-02-01 株式会社Ihi Vacuum seal device and vacuum process processing system

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