JPH03120571U - - Google Patents
Info
- Publication number
- JPH03120571U JPH03120571U JP2916690U JP2916690U JPH03120571U JP H03120571 U JPH03120571 U JP H03120571U JP 2916690 U JP2916690 U JP 2916690U JP 2916690 U JP2916690 U JP 2916690U JP H03120571 U JPH03120571 U JP H03120571U
- Authority
- JP
- Japan
- Prior art keywords
- filament wire
- substrate
- arm
- phase synthesis
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000003786 synthesis reaction Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例の斜視図、第２図は
一般的な気相合成装置の構成図である。
１１，２１……基板、１２，２２……基板加熱
装置、１３，２３……フイラメント線、１４，２
４……電極、１５……アーム、１６……回動軸、
１７……バランスウエイト、１８……支柱、１９
……引き出し端子。
FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a configuration diagram of a general vapor phase synthesis apparatus. 11, 21... Substrate, 12, 22... Substrate heating device, 13, 23... Filament wire, 14, 2
4...electrode, 15...arm, 16...rotation axis,
17... Balance weight, 18... Pillar, 19
...Pull-out terminal.
Claims (1)
に張架されるフイラメント線と、フイラメント線
の両端を固定する電極とを備え、炭化水素または
炭素化合物気体と水素との混合ガスよりなる原料
ガスを高温に加熱されたフイラメント線で分解し
、前記基板上にダイヤモンドを合成する気相合成
装置において、電極をフイラメント線の長さ方向
に変位させる可動機構を配設したことを特徴とす
る気相合成装置。 (2) 請求項(1)に記載の可動機構が、電極を支承
するアームと、アームを回動可能に軸支する回動
軸と、アームをフイラメント線の伸張方向に付勢
するバランスウエイトとでなることを特徴とする
気相合成装置。[Claims for Utility Model Registration] (1) A heating device comprising a substrate and a substrate heating device, a filament wire stretched above the substrate, and electrodes fixing both ends of the filament wire, In a vapor phase synthesis apparatus that synthesizes diamond on the substrate by decomposing a raw material gas consisting of a gas mixture with hydrogen using a filament wire heated to a high temperature, a movable mechanism for displacing an electrode in the length direction of the filament wire is provided. A vapor phase synthesis apparatus characterized by: (2) The movable mechanism according to claim (1) includes an arm that supports the electrode, a rotation shaft that rotatably supports the arm, and a balance weight that biases the arm in the direction of extension of the filament wire. A gas phase synthesis device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2916690U JPH03120571U (en) | 1990-03-23 | 1990-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2916690U JPH03120571U (en) | 1990-03-23 | 1990-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120571U true JPH03120571U (en) | 1991-12-11 |
Family
ID=31531941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2916690U Pending JPH03120571U (en) | 1990-03-23 | 1990-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120571U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012509826A (en) * | 2008-11-24 | 2012-04-26 | ディアッコン ゲーエムベーハー | Device and method for coating a substrate using chemical vapor deposition |
-
1990
- 1990-03-23 JP JP2916690U patent/JPH03120571U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012509826A (en) * | 2008-11-24 | 2012-04-26 | ディアッコン ゲーエムベーハー | Device and method for coating a substrate using chemical vapor deposition |
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