JPH03120557U - - Google Patents
Info
- Publication number
- JPH03120557U JPH03120557U JP3009990U JP3009990U JPH03120557U JP H03120557 U JPH03120557 U JP H03120557U JP 3009990 U JP3009990 U JP 3009990U JP 3009990 U JP3009990 U JP 3009990U JP H03120557 U JPH03120557 U JP H03120557U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- observation
- thin film
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 3
- 239000011521 glass Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3009990U JPH03120557U (sv) | 1990-03-23 | 1990-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3009990U JPH03120557U (sv) | 1990-03-23 | 1990-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03120557U true JPH03120557U (sv) | 1991-12-11 |
Family
ID=31532835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3009990U Pending JPH03120557U (sv) | 1990-03-23 | 1990-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03120557U (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013142164A (ja) * | 2012-01-10 | 2013-07-22 | Sumitomo Heavy Ind Ltd | 成膜装置 |
KR102214955B1 (ko) * | 2020-09-28 | 2021-02-10 | 케이스타주식회사 | 분무수단이 구비되는 야외용 먼지털이장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6334165B2 (sv) * | 1978-03-10 | 1988-07-08 | Mitsubishi Petrochemical Co |
-
1990
- 1990-03-23 JP JP3009990U patent/JPH03120557U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6334165B2 (sv) * | 1978-03-10 | 1988-07-08 | Mitsubishi Petrochemical Co |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013142164A (ja) * | 2012-01-10 | 2013-07-22 | Sumitomo Heavy Ind Ltd | 成膜装置 |
KR102214955B1 (ko) * | 2020-09-28 | 2021-02-10 | 케이스타주식회사 | 분무수단이 구비되는 야외용 먼지털이장치 |
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