JPH03120557U - - Google Patents

Info

Publication number
JPH03120557U
JPH03120557U JP3009990U JP3009990U JPH03120557U JP H03120557 U JPH03120557 U JP H03120557U JP 3009990 U JP3009990 U JP 3009990U JP 3009990 U JP3009990 U JP 3009990U JP H03120557 U JPH03120557 U JP H03120557U
Authority
JP
Japan
Prior art keywords
vacuum vessel
observation
thin film
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3009990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3009990U priority Critical patent/JPH03120557U/ja
Publication of JPH03120557U publication Critical patent/JPH03120557U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP3009990U 1990-03-23 1990-03-23 Pending JPH03120557U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3009990U JPH03120557U (cs) 1990-03-23 1990-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3009990U JPH03120557U (cs) 1990-03-23 1990-03-23

Publications (1)

Publication Number Publication Date
JPH03120557U true JPH03120557U (cs) 1991-12-11

Family

ID=31532835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3009990U Pending JPH03120557U (cs) 1990-03-23 1990-03-23

Country Status (1)

Country Link
JP (1) JPH03120557U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142164A (ja) * 2012-01-10 2013-07-22 Sumitomo Heavy Ind Ltd 成膜装置
KR102214955B1 (ko) * 2020-09-28 2021-02-10 케이스타주식회사 분무수단이 구비되는 야외용 먼지털이장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334165B2 (cs) * 1978-03-10 1988-07-08 Mitsubishi Petrochemical Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334165B2 (cs) * 1978-03-10 1988-07-08 Mitsubishi Petrochemical Co

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142164A (ja) * 2012-01-10 2013-07-22 Sumitomo Heavy Ind Ltd 成膜装置
KR102214955B1 (ko) * 2020-09-28 2021-02-10 케이스타주식회사 분무수단이 구비되는 야외용 먼지털이장치

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