JPH03120554U - - Google Patents

Info

Publication number
JPH03120554U
JPH03120554U JP2855590U JP2855590U JPH03120554U JP H03120554 U JPH03120554 U JP H03120554U JP 2855590 U JP2855590 U JP 2855590U JP 2855590 U JP2855590 U JP 2855590U JP H03120554 U JPH03120554 U JP H03120554U
Authority
JP
Japan
Prior art keywords
target
plate
stepped portion
brazing
outer dimension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2855590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2855590U priority Critical patent/JPH03120554U/ja
Publication of JPH03120554U publication Critical patent/JPH03120554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2855590U 1990-03-19 1990-03-19 Pending JPH03120554U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2855590U JPH03120554U (US08063081-20111122-C00044.png) 1990-03-19 1990-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2855590U JPH03120554U (US08063081-20111122-C00044.png) 1990-03-19 1990-03-19

Publications (1)

Publication Number Publication Date
JPH03120554U true JPH03120554U (US08063081-20111122-C00044.png) 1991-12-11

Family

ID=31531349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2855590U Pending JPH03120554U (US08063081-20111122-C00044.png) 1990-03-19 1990-03-19

Country Status (1)

Country Link
JP (1) JPH03120554U (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002173766A (ja) * 2000-12-01 2002-06-21 Toshiba Corp スパッタリングターゲットおよびそれを具備するスパッタリング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002173766A (ja) * 2000-12-01 2002-06-21 Toshiba Corp スパッタリングターゲットおよびそれを具備するスパッタリング装置
JP4495853B2 (ja) * 2000-12-01 2010-07-07 株式会社東芝 スパッタリングターゲットおよびそれを具備するスパッタリング装置

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