JPH03120028U - - Google Patents

Info

Publication number
JPH03120028U
JPH03120028U JP2806190U JP2806190U JPH03120028U JP H03120028 U JPH03120028 U JP H03120028U JP 2806190 U JP2806190 U JP 2806190U JP 2806190 U JP2806190 U JP 2806190U JP H03120028 U JPH03120028 U JP H03120028U
Authority
JP
Japan
Prior art keywords
heat transfer
transfer plate
heater block
substrate
resist film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2806190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0621233Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2806190U priority Critical patent/JPH0621233Y2/ja
Publication of JPH03120028U publication Critical patent/JPH03120028U/ja
Application granted granted Critical
Publication of JPH0621233Y2 publication Critical patent/JPH0621233Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2806190U 1990-03-19 1990-03-19 ベーキング装置 Expired - Lifetime JPH0621233Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2806190U JPH0621233Y2 (ja) 1990-03-19 1990-03-19 ベーキング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2806190U JPH0621233Y2 (ja) 1990-03-19 1990-03-19 ベーキング装置

Publications (2)

Publication Number Publication Date
JPH03120028U true JPH03120028U (enrdf_load_stackoverflow) 1991-12-10
JPH0621233Y2 JPH0621233Y2 (ja) 1994-06-01

Family

ID=31530885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2806190U Expired - Lifetime JPH0621233Y2 (ja) 1990-03-19 1990-03-19 ベーキング装置

Country Status (1)

Country Link
JP (1) JPH0621233Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0621233Y2 (ja) 1994-06-01

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