JPH03120028U - - Google Patents
Info
- Publication number
- JPH03120028U JPH03120028U JP2806190U JP2806190U JPH03120028U JP H03120028 U JPH03120028 U JP H03120028U JP 2806190 U JP2806190 U JP 2806190U JP 2806190 U JP2806190 U JP 2806190U JP H03120028 U JPH03120028 U JP H03120028U
- Authority
- JP
- Japan
- Prior art keywords
- heat transfer
- transfer plate
- heater block
- substrate
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806190U JPH0621233Y2 (ja) | 1990-03-19 | 1990-03-19 | ベーキング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2806190U JPH0621233Y2 (ja) | 1990-03-19 | 1990-03-19 | ベーキング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03120028U true JPH03120028U (cs) | 1991-12-10 |
| JPH0621233Y2 JPH0621233Y2 (ja) | 1994-06-01 |
Family
ID=31530885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2806190U Expired - Lifetime JPH0621233Y2 (ja) | 1990-03-19 | 1990-03-19 | ベーキング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621233Y2 (cs) |
-
1990
- 1990-03-19 JP JP2806190U patent/JPH0621233Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0621233Y2 (ja) | 1994-06-01 |