JPH03119764U - - Google Patents
Info
- Publication number
- JPH03119764U JPH03119764U JP2805590U JP2805590U JPH03119764U JP H03119764 U JPH03119764 U JP H03119764U JP 2805590 U JP2805590 U JP 2805590U JP 2805590 U JP2805590 U JP 2805590U JP H03119764 U JPH03119764 U JP H03119764U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- mark
- metallic inclusions
- inspection device
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 238000012790 confirmation Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000010365 information processing Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
Description
第１図は本考案による一実施例の非金属介在物
の検査装置の構成を示すブロツク図、第２図は第
１図に示した検査装置におけるホールダを示す図
、第３図は第１図に示した検査装置における位置
確認の処理動作を示すフローチヤート、第４図は
従来の検査装置を説明するための図、第５図はス
テージ上における試料とホールダの様子を拡大し
て示す図、第６図は非金属介在物の分類を示す図
である。
１００……試料、２００……光学系、２１０…
…ホールダ、２１１……上蓋、２１２……下箱、
２１３……試料窓、２１４……目印穴、２２０…
…顕微鏡、２６０……ステージ、３００……処理
系、３１０……情報処理装置、３２０……画像処
理装置、３３０，３４０……画像モニタ、３５０
……ビデオプリンタ、３６０……印字プリンタ。
FIG. 1 is a block diagram showing the configuration of an inspection device for non-metallic inclusions according to an embodiment of the present invention, FIG. 2 is a diagram showing a holder in the inspection device shown in FIG. 1, and FIG. 3 is a diagram similar to that shown in FIG. FIG. 4 is a diagram for explaining the conventional inspection device; FIG. 5 is an enlarged diagram showing the state of the sample and holder on the stage; FIG. 6 is a diagram showing the classification of nonmetallic inclusions. 100...sample, 200...optical system, 210...
...Holder, 211...Top lid, 212...Lower box,
213...sample window, 214...marker hole, 220...
... Microscope, 260 ... Stage, 300 ... Processing system, 310 ... Information processing device, 320 ... Image processing device, 330, 340 ... Image monitor, 350
...Video printer, 360...Print printer.
Claims (1)
このホールダを座標軸によつて規定されたステー
ジに載置して顕微鏡により拡大視し、前記非金属
介在物の解析を行う非金属介在物の検査装置にお
いて、 前記ホールダは該ホールダの所定部位に位置確
認用の目印が形成され、 前記ステージをあらかじめ入力された目印の座
標位置に移動させた時、前記顕微鏡の視野に前記
目印が所定の面積割合で入つたかを検出する目印
検出手段を備えたことを特徴とする非金属介在物
の検査装置。[Scope of claim for utility model registration] A sample containing non-metallic inclusions is stored in a holder,
In a non-metallic inclusion inspection device that analyzes the non-metallic inclusions by placing the holder on a stage defined by coordinate axes and viewing it under magnification using a microscope, the holder is located at a predetermined portion of the holder. A confirmation mark is formed, and a mark detection means is provided for detecting whether the mark enters the field of view of the microscope in a predetermined area ratio when the stage is moved to the coordinate position of the mark inputted in advance. An inspection device for non-metallic inclusions, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2805590U JPH084615Y2 (en) | 1990-03-19 | 1990-03-19 | Inspection device for non-metallic inclusions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2805590U JPH084615Y2 (en) | 1990-03-19 | 1990-03-19 | Inspection device for non-metallic inclusions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03119764U true JPH03119764U (en) | 1991-12-10 |
| JPH084615Y2 JPH084615Y2 (en) | 1996-02-07 |
Family
ID=31530879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2805590U Expired - Lifetime JPH084615Y2 (en) | 1990-03-19 | 1990-03-19 | Inspection device for non-metallic inclusions |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084615Y2 (en) |
-
1990
- 1990-03-19 JP JP2805590U patent/JPH084615Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH084615Y2 (en) | 1996-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R323531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R323533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |