JPH03119432U - - Google Patents
Info
- Publication number
- JPH03119432U JPH03119432U JP2732790U JP2732790U JPH03119432U JP H03119432 U JPH03119432 U JP H03119432U JP 2732790 U JP2732790 U JP 2732790U JP 2732790 U JP2732790 U JP 2732790U JP H03119432 U JPH03119432 U JP H03119432U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- pipe
- processing chambers
- branch pipe
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2732790U JPH03119432U (ro) | 1990-03-16 | 1990-03-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2732790U JPH03119432U (ro) | 1990-03-16 | 1990-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03119432U true JPH03119432U (ro) | 1991-12-10 |
Family
ID=31530188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2732790U Pending JPH03119432U (ro) | 1990-03-16 | 1990-03-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03119432U (ro) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008264127A (ja) * | 2007-04-18 | 2008-11-06 | Sri Sports Ltd | グリーンフォーク付きゴルフ用ボールマーカー |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61296038A (ja) * | 1985-06-24 | 1986-12-26 | Toyoda Gosei Co Ltd | プラズマ処理装置 |
-
1990
- 1990-03-16 JP JP2732790U patent/JPH03119432U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61296038A (ja) * | 1985-06-24 | 1986-12-26 | Toyoda Gosei Co Ltd | プラズマ処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008264127A (ja) * | 2007-04-18 | 2008-11-06 | Sri Sports Ltd | グリーンフォーク付きゴルフ用ボールマーカー |