JPH03117840A - Clean room - Google Patents
Clean roomInfo
- Publication number
- JPH03117840A JPH03117840A JP1254043A JP25404389A JPH03117840A JP H03117840 A JPH03117840 A JP H03117840A JP 1254043 A JP1254043 A JP 1254043A JP 25404389 A JP25404389 A JP 25404389A JP H03117840 A JPH03117840 A JP H03117840A
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- air
- return duct
- partition
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims abstract description 16
- 238000004140 cleaning Methods 0.000 claims abstract 2
- 238000011045 prefiltration Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 239000011810 insulating material Substances 0.000 abstract description 3
- 238000010992 reflux Methods 0.000 abstract description 2
- 238000009423 ventilation Methods 0.000 abstract description 2
- 239000000428 dust Substances 0.000 description 5
- 241000894006 Bacteria Species 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/0263—Insulation for air ducts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、室内の空気中に含まれる塵埃、細菌等の数を
極端に減少させるため、室内の空気を塵埃、細菌等を濾
過するフィルタを通して還流するクリーンルームの改良
に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a filter that filters dust, bacteria, etc. from indoor air in order to extremely reduce the number of dust, bacteria, etc. contained in indoor air. Concerning the improvement of clean rooms with reflux through.
従来のこの種のクリーンルームにおいては、室内の空気
をフィルタを設けた送風機等から成るクリーンユニット
に導くためのリターンダクトは、第３図に示すようにク
リーンルームＡの外部に設けられ、その一端がクリーン
ルームＡの一部に吸込口として開口している。In conventional clean rooms of this type, a return duct for guiding indoor air to a clean unit consisting of a blower equipped with a filter, etc. is provided outside clean room A, as shown in Figure 3, and one end of the return duct is connected to the clean room. A part of A is opened as a suction port.
そして、このリターンダクト１の他端は、クリーンユニ
ットＢに接続され、リターンダクトｌの吸込口から吸入
されたクリーンルームＡ内の空気は、リターンダクト１
を通ってクリーンユニットＢに至り、その中に含まれて
いた塵埃、細菌が濾過されて清浄化され、クリーンルー
ムＡに還流されるものである。The other end of the return duct 1 is connected to the clean unit B, and the air in the clean room A sucked from the suction port of the return duct 1 is connected to the clean unit B.
It passes through the clean unit B, where the dust and bacteria contained therein are filtered and cleaned, and then returned to the clean room A.
前述のようなりリーンルームにおいては、通常クリーン
ルームＡ内の温度を一定化するために、第４図に示すよ
うにクリーンユニットＢは、冷暖房のための熱交換機２
、ブースタファン３、高性能フィルタ４で構成される。As mentioned above, in a lean room, in order to keep the temperature in the clean room A constant, the clean unit B normally uses a heat exchanger 2 for heating and cooling as shown in FIG.
, a booster fan 3, and a high-performance filter 4.
しかし、リターンダクト１はクリーンルームＡ外にある
ため、外気温によってリターンダクｌ−１を通る空気は
冷却、或いは暖められ、例えばクリーンルームＡ内の温
度２０“Ｃ１外気温３３°Ｃの時、リターンダクト１を
通った空気は、２３°Ｃにまで暖められる。However, since return duct 1 is outside clean room A, the air passing through return duct l-1 is cooled or warmed depending on the outside temperature.For example, when the temperature inside clean room A is 20"C1 and the outside temperature is 33°C, The air passing through 1 is heated to 23°C.
この２３°Ｃの空気を再び２０°Ｃ以下にまで冷却して
、クリーンルームＡ内に還流しなければならないので、
冷暖房機の能力として、高いものが必要となる。This 23°C air must be cooled down to below 20°C and returned to clean room A.
A high capacity air conditioner or heater is required.
又、リターンダクト１と外気間の熱交換を防ぐため、リ
ターンダクト１に断熱材を巻きつける等の工事を必要と
した。Further, in order to prevent heat exchange between the return duct 1 and the outside air, it was necessary to perform work such as wrapping a heat insulating material around the return duct 1.
更に、リターンダクトｌが外部に突出しているため、そ
の突出長とクリーンルームの巾とで囲われる面積が、ク
リーンルームＡの設置建物内の床面積に対して、無駄な
面積となってしまい、スペースファクタを悪化させてい
た。Furthermore, since the return duct l protrudes to the outside, the area enclosed by its protrusion length and the width of the clean room becomes a wasted area with respect to the floor area of the building where the clean room A is installed, which increases the space factor. It was making things worse.
一般に、クリーンルームＡの平面形は、長方形成いは正
方形に形成され、その隅部は９０°の角度となっている
。Generally, the planar shape of the clean room A is rectangular or square, and the corners thereof are at an angle of 90°.
この部分は、クリーンユニットＢから吹き出した風がリ
ターンダクトｌに吸い込まれるまでの死角となり、空気
の流通が悪くなるので、この部分にカビを生ずることが
ある等の問題点があった。This part becomes a blind spot until the wind blown from the clean unit B is sucked into the return duct 1, and the air circulation becomes poor, resulting in problems such as the formation of mold in this part.
〔発明の目的］
本発明は、従来のクリーンルームの前述の問題点を解消
し、クリーンルームのコーナの通風を良好にしてカビの
発生を防止すると共に、リターンダクトが外部に突出す
ることに起因する設置床面積のスペースファクタの悪化
、リターンダクト内での還流空気の温度変化による冷暖
機の能力の大型化等を改善できるクリーンルームを提供
することを目的とする。[Object of the Invention] The present invention solves the above-mentioned problems of conventional clean rooms, improves ventilation in the corners of the clean room, prevents the growth of mold, and prevents installation due to the return duct protruding outside. The purpose is to provide a clean room that can improve the deterioration of the floor area space factor and the increase in cooling and heating capacity due to temperature changes in the recirculating air in the return duct.
（課題を解決するための手段）
本発明は、前述の目的を達成するためのクリーンルーム
の手段に関し、４周を壁面で密閉されている室の隅部に
隔壁を形成し、この隔壁に空気吸込口を形成して隔壁と
壁面の間をリターンダクトとし、このリターンダクトを
空気還流清浄装置に接続することによって達成される。(Means for Solving the Problems) The present invention relates to means for a clean room to achieve the above-mentioned object, in which a partition wall is formed in the corner of a room that is sealed on four sides by walls, and air is sucked into the partition wall. This is achieved by forming a return duct between the partition wall and the wall surface by forming a port, and connecting this return duct to an air return purification device.
次に、本発明の実施の一例を、第１図、第２図について
説明する。Next, an example of implementation of the present invention will be described with reference to FIGS. 1 and 2.
Ａはクリーンルームで、その外壁１１は断熱性材によっ
て構成され、外気温によってクリーンルームＡ内の温度
が変化するのを防止するようになっており、この外壁１
１には、必要に応じて窓１２、ドア等が設置される。A is a clean room, and its outer wall 11 is made of a heat insulating material to prevent the temperature inside the clean room A from changing depending on the outside temperature.
1, a window 12, a door, etc. are installed as necessary.
又、このクリーンルームＡの平面形は長方形、或いは正
方形で、そのコーナは９０°の角度になっている。The planar shape of this clean room A is rectangular or square, and its corners are at an angle of 90°.
そのコーナのうちの１乃至全部に、１面に対して４５″
の角度で、プレフィルタ１３を下端近くに取付けた隔壁
１４を取付け、隔壁１４と外壁１１で構成される角形の
部分をリターンダクトＣとする。45" per side in one or all of its corners
A partition wall 14 with a pre-filter 13 attached near the lower end is attached at an angle of , and a square portion formed by the partition wall 14 and the outer wall 11 is defined as a return duct C.
このリターンダクトは、クリーンルームＡの天井１５に
おいて、接続管１６に介して、クリーンユニットＤに接
続されている。This return duct is connected to the clean unit D at the ceiling 15 of the clean room A via a connecting pipe 16.
このように、リターンダクトＣは断熱性を有する外壁１
１によって外気温と遮断され、クリーンルームＡ内の温
度は隔壁１４によって伝達されるので、外気温の影響に
よる１度変化を生じない。In this way, the return duct C
1, and the temperature inside the clean room A is transmitted through the partition wall 14, so that it does not change by 1 degree due to the influence of the outside temperature.
又、従来のように、リターンダクトがクリーンルーム外
に突出しないため、設置床面のスペースファクタを悪化
させることもなく、クリーンルーム内のコーナの９０°
が４５°になるため、コーナ部の空気の流通が良（なり
、カビの発生がなくなる。In addition, unlike conventional methods, the return duct does not protrude outside the clean room, so there is no need to worsen the space factor of the installation floor.
Since the angle is 45 degrees, there is good air circulation in the corners, which prevents mold from forming.
前記の接続管１６はクリーンユニットＤの冷暖房用の熱
交換器室１７に接続され、リターンダクトＣからの空気
は所要の温度にまで冷却、或いは暖房される。The connecting pipe 16 is connected to a heat exchanger chamber 17 for heating and cooling of the clean unit D, and the air from the return duct C is cooled or heated to a required temperature.
この熱交換器室１７の空気出口に対向して、プレフィル
タ１８を設けた漏斗状のダクト１９が設置され、その吸
込口の背面にはブースタファン２０、該ブースタファン
２０による送風口には高性能フィルタ２１が設置されて
いる。A funnel-shaped duct 19 equipped with a pre-filter 18 is installed opposite to the air outlet of the heat exchanger chamber 17, and a booster fan 20 is installed on the back of the suction port, and a high A performance filter 21 is installed.
従って、熱交換器室１７で冷却された空気は、ダクト１
９からブースタファン２０によって吸い込まれ、高性能
フィルタ２１で濾過されて、クリーンルームＡに還流さ
れる。Therefore, the air cooled in the heat exchanger chamber 17 is transferred to the duct 1
9 by the booster fan 20, filtered by the high performance filter 21, and returned to the clean room A.
一般的に、１ｒｒｒ当り１００，０００個程度の塵埃や
細菌を含有するクリーンルームにおいては、熱交換器室
１７内のファンで吸引される空気量に対し、清浄化され
てクリーンルームに送出される空気量の比は一定に保た
れている。Generally, in a clean room containing about 100,000 particles of dust and bacteria per rrr, the amount of air that is purified and sent to the clean room is compared to the amount of air that is sucked in by the fan in the heat exchanger room 17. The ratio is kept constant.
クリーンルームの清浄度を１１Ｔ？当りの塵埃量が１０
．０００、或いはｌ、０００以上に上げようとすると、
前記の比を高めなければならない。Clean room cleanliness 11T? The amount of dust per unit is 10
．． If you try to raise it above 000 or l, 000,
Said ratio must be increased.
そこで、熱交換器室１７とダクト１９の間隙を拡げ、ブ
ースタファン２０の回転数を上げる等によって、その吸
引能力を高める。Therefore, by widening the gap between the heat exchanger chamber 17 and the duct 19, increasing the rotational speed of the booster fan 20, etc., the suction capacity is increased.
例えば、１００，０００クラスのクリーンルームのため
のクリーンルームＡからの吸引空気量が２Ｑｒｒｒ／ｗ
ｉｎである時に、１０．０００クラスのクリーンルーム
に変更しようとする時には、クリーンルームＡに還流す
る空気量は４Ｑｍ／ｗｉｎでなければならない。For example, the amount of suction air from clean room A for a 100,000 class clean room is 2 Qrrr/w.
When changing to a 10,000 class clean room when the clean room is in the clean room, the amount of air returned to the clean room A must be 4Qm/win.
この差の空気量を熱交換器室１７とダクト１９の間隙か
ら吸い込んで、クリーンルームＡに還流することにより
、１００，０００クラスのクリーンルームを１０，００
０クラスにまで高めることができるものである。By sucking this difference in air volume through the gap between the heat exchanger chamber 17 and the duct 19 and returning it to the clean room A, the 100,000 class clean room can be
It can be raised to 0 class.
そして、クリーンルームＡに送出された空気量４０ｒｄ
／ｌ１ｉｎと吸引される空気量２Ｏｎ？／ｗｉｎの差の
空気量２０ｎ？／ｓｉｎは、クリーンルームＡの一例に
設けられた調圧ダンパー２２から、クリーンルームＡ外
に排出されるものである。Then, the amount of air sent to clean room A was 40rd.
/l1in and the amount of air sucked in is 2On? /win difference in air volume 20n? /sin is discharged from the pressure regulating damper 22 provided in an example of the clean room A to the outside of the clean room A.
（発明の効果〕
本発明は枝上のように、クリーンルームのコーナを隔壁
で斜めに仕切り、３角形のリターンダクトとしたもので
ある。(Effects of the Invention) According to the present invention, the corners of a clean room are diagonally partitioned with partition walls to form a triangular return duct like a branch.
従って、このリターンダクトは、外気との間にクリーン
ルームの断熱性の外壁によって、熱を遮断されるので、
外気温による吸入空気の温度変化が防止でき、リターン
ダクトを断熱材で包む工事が不要となるばかりでなく、
冷暖房機として低能率のものを使用でき、クリーンルー
ムのコストを引き下げることができる。Therefore, this return duct is isolated from the outside air by the heat insulating outer wall of the clean room.
This not only prevents temperature changes in the intake air due to outside temperature, but also eliminates the need to wrap the return duct with insulation material.
It is possible to use low-efficiency air conditioners and heaters, reducing clean room costs.
又、リターンダクトがクリーンルームの外部に突出する
ことによる設置床面のスペースファクタの悪化も防止で
きる。In addition, it is possible to prevent deterioration of the space factor of the installation floor due to the return duct protruding to the outside of the clean room.
更に、９０″であったクリーンルームのコーナ４゜
が、４５°等の空気の流通し易いコーナとなり、コーナ
にカビの発生するのが防止できる等の効果を有するもの
である。Furthermore, the 4° corner of the clean room, which used to be 90'', becomes a corner such as 45° where air can easily circulate, which has the effect of preventing mold from forming in the corner.
第１図は本発明の一実施例の天井部を切除した斜面図、
第２図は同上の天井部の斜面図、第３図は従来のクリー
ンルームのリターンダクト部の斜面図、第４図は同上の
クリーンユニット部の斜面図である。
Ａ−クリーンルーム、Ｃ−リターンダクト、Ｄクリーン
ユニント、１１−外壁、１３−プレフィルタ、１４−隔
壁。FIG. 1 is a perspective view of an embodiment of the present invention with the ceiling portion cut away;
FIG. 2 is a slope view of the ceiling portion of the same as above, FIG. 3 is a slope view of the return duct portion of a conventional clean room, and FIG. 4 is a slope view of the clean unit portion of the same. A-Clean room, C-Return duct, D Clean unit, 11-Outer wall, 13-Pre-filter, 14-Partition wall.
Claims (1)
この隔壁に空気吸入口を形成して隔壁と壁面の間をリタ
ーンダクトとし、このリターンダクトを空気還流清浄装
置に接続したことを特徴とするクリーンルーム。A partition wall is formed in the corner of a chamber whose four circumferences are sealed with walls,
A clean room characterized in that an air intake port is formed in the partition wall, a return duct is formed between the partition wall and the wall surface, and the return duct is connected to an air recirculation cleaning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1254043A JPH03117840A (en) | 1989-09-29 | 1989-09-29 | Clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1254043A JPH03117840A (en) | 1989-09-29 | 1989-09-29 | Clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03117840A true JPH03117840A (en) | 1991-05-20 |
Family
ID=17259444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1254043A Pending JPH03117840A (en) | 1989-09-29 | 1989-09-29 | Clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03117840A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1002491C2 (en) * | 1996-02-29 | 1997-09-01 | Ind En Handelmaatschappij Berg | Ventilation trunking |
| WO2001003167A1 (en) * | 1999-07-02 | 2001-01-11 | Tokyo Electron Limited | Semiconductor manufacture equipment, and method and apparatus for semiconductor manufacture |
| JP2007198666A (en) * | 2006-01-26 | 2007-08-09 | Shimizu Corp | Chemical filter unit and air conditioning system for clean room |
| JP2007230521A (en) * | 2006-03-03 | 2007-09-13 | Toyota Motor Corp | Side structure of vehicle |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63116037A (en) * | 1986-11-03 | 1988-05-20 | Hirayama Setsubi Kk | Clean room system and apparatus for said clean room system |
-
1989
- 1989-09-29 JP JP1254043A patent/JPH03117840A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63116037A (en) * | 1986-11-03 | 1988-05-20 | Hirayama Setsubi Kk | Clean room system and apparatus for said clean room system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1002491C2 (en) * | 1996-02-29 | 1997-09-01 | Ind En Handelmaatschappij Berg | Ventilation trunking |
| WO2001003167A1 (en) * | 1999-07-02 | 2001-01-11 | Tokyo Electron Limited | Semiconductor manufacture equipment, and method and apparatus for semiconductor manufacture |
| US6547660B1 (en) | 1999-07-02 | 2003-04-15 | Tokyo Electron Limited | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method |
| JP2007198666A (en) * | 2006-01-26 | 2007-08-09 | Shimizu Corp | Chemical filter unit and air conditioning system for clean room |
| JP2007230521A (en) * | 2006-03-03 | 2007-09-13 | Toyota Motor Corp | Side structure of vehicle |
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