JPH03117167U - - Google Patents

Info

Publication number
JPH03117167U
JPH03117167U JP2609990U JP2609990U JPH03117167U JP H03117167 U JPH03117167 U JP H03117167U JP 2609990 U JP2609990 U JP 2609990U JP 2609990 U JP2609990 U JP 2609990U JP H03117167 U JPH03117167 U JP H03117167U
Authority
JP
Japan
Prior art keywords
diaphragm
fluid passage
center plate
plunger
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2609990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2609990U priority Critical patent/JPH03117167U/ja
Publication of JPH03117167U publication Critical patent/JPH03117167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP2609990U 1990-03-16 1990-03-16 Pending JPH03117167U (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2609990U JPH03117167U (US07714131-20100511-C00024.png) 1990-03-16 1990-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2609990U JPH03117167U (US07714131-20100511-C00024.png) 1990-03-16 1990-03-16

Publications (1)

Publication Number Publication Date
JPH03117167U true JPH03117167U (US07714131-20100511-C00024.png) 1991-12-04

Family

ID=31529010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2609990U Pending JPH03117167U (US07714131-20100511-C00024.png) 1990-03-16 1990-03-16

Country Status (1)

Country Link
JP (1) JPH03117167U (US07714131-20100511-C00024.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06185650A (ja) * 1992-07-29 1994-07-08 Protein Technologies Inc Dnaシーケンス又はペプチド配列を同時合成する弁マトリックス
JP2001519878A (ja) * 1997-04-04 2001-10-23 ロボバルブ アクチエボーラグ ダイヤフラムバルブ
JP2007285416A (ja) * 2006-04-17 2007-11-01 Hitachi Metals Ltd 遮断弁装置及びこれを組み込んだ質量流量制御装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06185650A (ja) * 1992-07-29 1994-07-08 Protein Technologies Inc Dnaシーケンス又はペプチド配列を同時合成する弁マトリックス
JP2001519878A (ja) * 1997-04-04 2001-10-23 ロボバルブ アクチエボーラグ ダイヤフラムバルブ
JP2007285416A (ja) * 2006-04-17 2007-11-01 Hitachi Metals Ltd 遮断弁装置及びこれを組み込んだ質量流量制御装置

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