JPH03116782U - - Google Patents

Info

Publication number
JPH03116782U
JPH03116782U JP7603390U JP7603390U JPH03116782U JP H03116782 U JPH03116782 U JP H03116782U JP 7603390 U JP7603390 U JP 7603390U JP 7603390 U JP7603390 U JP 7603390U JP H03116782 U JPH03116782 U JP H03116782U
Authority
JP
Japan
Prior art keywords
generating means
wave generating
surface wave
flow path
micropump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7603390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7603390U priority Critical patent/JPH03116782U/ja
Publication of JPH03116782U publication Critical patent/JPH03116782U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP7603390U 1990-01-24 1990-07-17 Pending JPH03116782U (hu)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7603390U JPH03116782U (hu) 1990-01-24 1990-07-17

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP546390 1990-01-24
JP7603390U JPH03116782U (hu) 1990-01-24 1990-07-17

Publications (1)

Publication Number Publication Date
JPH03116782U true JPH03116782U (hu) 1991-12-03

Family

ID=31717087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7603390U Pending JPH03116782U (hu) 1990-01-24 1990-07-17

Country Status (1)

Country Link
JP (1) JPH03116782U (hu)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006161717A (ja) * 2004-12-08 2006-06-22 Tama Tlo Kk マイクロポンプ・ミキサ一体化装置の流量制御装置及びマイクロポンプ・ミキサ一体化装置の流量制御方法
WO2007066777A1 (ja) * 2005-12-09 2007-06-14 Kyocera Corporation 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006161717A (ja) * 2004-12-08 2006-06-22 Tama Tlo Kk マイクロポンプ・ミキサ一体化装置の流量制御装置及びマイクロポンプ・ミキサ一体化装置の流量制御方法
JP4654378B2 (ja) * 2004-12-08 2011-03-16 タマティーエルオー株式会社 マイクロポンプ・ミキサ一体化装置の流量制御装置及びマイクロポンプ・ミキサ一体化装置の流量制御方法
WO2007066777A1 (ja) * 2005-12-09 2007-06-14 Kyocera Corporation 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置
JP2012237319A (ja) * 2005-12-09 2012-12-06 Kyocera Corp 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置
JP5229988B2 (ja) * 2005-12-09 2013-07-03 京セラ株式会社 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置

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