JPH03116782U - - Google Patents
Info
- Publication number
- JPH03116782U JPH03116782U JP7603390U JP7603390U JPH03116782U JP H03116782 U JPH03116782 U JP H03116782U JP 7603390 U JP7603390 U JP 7603390U JP 7603390 U JP7603390 U JP 7603390U JP H03116782 U JPH03116782 U JP H03116782U
- Authority
- JP
- Japan
- Prior art keywords
- generating means
- wave generating
- surface wave
- flow path
- micropump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7603390U JPH03116782U (enExample) | 1990-01-24 | 1990-07-17 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP546390 | 1990-01-24 | ||
| JP7603390U JPH03116782U (enExample) | 1990-01-24 | 1990-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116782U true JPH03116782U (enExample) | 1991-12-03 |
Family
ID=31717087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7603390U Pending JPH03116782U (enExample) | 1990-01-24 | 1990-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116782U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006161717A (ja) * | 2004-12-08 | 2006-06-22 | Tama Tlo Kk | マイクロポンプ・ミキサ一体化装置の流量制御装置及びマイクロポンプ・ミキサ一体化装置の流量制御方法 |
| WO2007066777A1 (ja) * | 2005-12-09 | 2007-06-14 | Kyocera Corporation | 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置 |
| JP2022144515A (ja) * | 2021-03-19 | 2022-10-03 | 株式会社Ｓｃｒｅｅｎホールディングス | マイクロ流体チップ、およびその製造方法 |
-
1990
- 1990-07-17 JP JP7603390U patent/JPH03116782U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006161717A (ja) * | 2004-12-08 | 2006-06-22 | Tama Tlo Kk | マイクロポンプ・ミキサ一体化装置の流量制御装置及びマイクロポンプ・ミキサ一体化装置の流量制御方法 |
| WO2007066777A1 (ja) * | 2005-12-09 | 2007-06-14 | Kyocera Corporation | 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置 |
| JP2012237319A (ja) * | 2005-12-09 | 2012-12-06 | Kyocera Corp | 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置 |
| JP5229988B2 (ja) * | 2005-12-09 | 2013-07-03 | 京セラ株式会社 | 流体アクチュエータ並びにこれを用いた発熱装置及び分析装置 |
| JP2022144515A (ja) * | 2021-03-19 | 2022-10-03 | 株式会社Ｓｃｒｅｅｎホールディングス | マイクロ流体チップ、およびその製造方法 |