JPH03115846U - - Google Patents
Info
- Publication number
- JPH03115846U JPH03115846U JP2578390U JP2578390U JPH03115846U JP H03115846 U JPH03115846 U JP H03115846U JP 2578390 U JP2578390 U JP 2578390U JP 2578390 U JP2578390 U JP 2578390U JP H03115846 U JPH03115846 U JP H03115846U
- Authority
- JP
- Japan
- Prior art keywords
- manipulator
- vacuum chamber
- arm
- cryostat
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１〜３図は本考案の実施例を示し、第１図は
断正面図、第２図は真空チヤンバのふたを除いた
平面図、第３図はマニピユレータの移動説明図、
第４〜５図は従来例を示し、第４図は断正面図、
第５図は真空チヤンバのふたを除いた平面図であ
る。
１……真空チヤンバ、３ａ，３ｂ……マニピユ
レータ、４ａ，４ｂ……アーム、６ａ，６ｂ……
ベローズ、７ａ，４ｂ……取付ベース、８ａ，８
ｂ……回転ステージ、１１ａ，１１ｂ……直進ス
テージ。
1 to 3 show an embodiment of the present invention, FIG. 1 is a sectional front view, FIG. 2 is a plan view with the lid of the vacuum chamber removed, and FIG. 3 is an explanatory diagram of the movement of the manipulator.
4 and 5 show a conventional example, and FIG. 4 is a sectional front view,
FIG. 5 is a plan view of the vacuum chamber with the lid removed. 1... Vacuum chamber, 3a, 3b... Manipulator, 4a, 4b... Arm, 6a, 6b...
Bellows, 7a, 4b...Mounting base, 8a, 8
b... Rotating stage, 11a, 11b... Straight stage.
Claims (1)
て、そのアームが真空チヤンバ内に挿入され、か
つ前記アームを、その突出方向、この突出方向と
直交する水平方向、上下方向に操作するウエハー
クライオスタツトのマニピユレータにおいて、前
記真空チヤンバとマニピユレータとが、フレキシ
ブル筒体で気密に接続され、かつマニピユレータ
を、アームの突出方向と平行方向に往復動させる
直進ステージと、水平面で回転させる回転ステー
ジとが設けられたことを特徴とするウエハークラ
イオスタツトのマニピユレータ。 In a manipulator for a wafer cryostat, the manipulator is connected to the outside of the vacuum chamber, the arm thereof is inserted into the vacuum chamber, and the arm is operated in the direction of protrusion, in the horizontal direction perpendicular to the direction of protrusion, and in the vertical direction, The vacuum chamber and the manipulator are airtightly connected by a flexible cylindrical body, and the manipulator is provided with a linear stage that reciprocates the manipulator in a direction parallel to the protruding direction of the arm, and a rotation stage that rotates the manipulator in a horizontal plane. Manipulator for wafer cryostat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2578390U JPH03115846U (en) | 1990-03-14 | 1990-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2578390U JPH03115846U (en) | 1990-03-14 | 1990-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115846U true JPH03115846U (en) | 1991-12-02 |
Family
ID=31528704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2578390U Pending JPH03115846U (en) | 1990-03-14 | 1990-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115846U (en) |
-
1990
- 1990-03-14 JP JP2578390U patent/JPH03115846U/ja active Pending