JPH03115669U - - Google Patents
Info
- Publication number
- JPH03115669U JPH03115669U JP2528690U JP2528690U JPH03115669U JP H03115669 U JPH03115669 U JP H03115669U JP 2528690 U JP2528690 U JP 2528690U JP 2528690 U JP2528690 U JP 2528690U JP H03115669 U JPH03115669 U JP H03115669U
- Authority
- JP
- Japan
- Prior art keywords
- gas blowing
- silicon
- film
- carbon
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000010408 film Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2528690U JPH03115669U (US20100223739A1-20100909-C00005.png) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2528690U JPH03115669U (US20100223739A1-20100909-C00005.png) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115669U true JPH03115669U (US20100223739A1-20100909-C00005.png) | 1991-11-29 |
Family
ID=31528223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2528690U Pending JPH03115669U (US20100223739A1-20100909-C00005.png) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115669U (US20100223739A1-20100909-C00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005333091A (ja) * | 2004-05-21 | 2005-12-02 | Nec Electronics Corp | 半導体製造装置 |
-
1990
- 1990-03-13 JP JP2528690U patent/JPH03115669U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005333091A (ja) * | 2004-05-21 | 2005-12-02 | Nec Electronics Corp | 半導体製造装置 |
| JP4673578B2 (ja) * | 2004-05-21 | 2011-04-20 | ルネサスエレクトロニクス株式会社 | 半導体製造装置 |
