JPH03115661U - - Google Patents
Info
- Publication number
- JPH03115661U JPH03115661U JP2386490U JP2386490U JPH03115661U JP H03115661 U JPH03115661 U JP H03115661U JP 2386490 U JP2386490 U JP 2386490U JP 2386490 U JP2386490 U JP 2386490U JP H03115661 U JPH03115661 U JP H03115661U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pressure
- vacuum
- domes
- pressure sensor
- dome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115661U true JPH03115661U (en, 2012) | 1991-11-29 |
| JPH0740523Y2 JPH0740523Y2 (ja) | 1995-09-20 |
Family
ID=31526845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2386490U Expired - Lifetime JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740523Y2 (en, 2012) |
-
1990
- 1990-03-09 JP JP2386490U patent/JPH0740523Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740523Y2 (ja) | 1995-09-20 |