JPH03115661U - - Google Patents
Info
- Publication number
- JPH03115661U JPH03115661U JP2386490U JP2386490U JPH03115661U JP H03115661 U JPH03115661 U JP H03115661U JP 2386490 U JP2386490 U JP 2386490U JP 2386490 U JP2386490 U JP 2386490U JP H03115661 U JPH03115661 U JP H03115661U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pressure
- vacuum
- domes
- pressure sensor
- dome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の真空蒸着装置の構
成を示す説明図、第２図はドームと真空圧測定子
との配置関係を示す説明図である。
１……真空槽、５……回転ドーム、１４……真
空圧測定子、１８……演算回路、１９……真空圧
制御回路。
FIG. 1 is an explanatory diagram showing the configuration of a vacuum evaporation apparatus according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram showing the arrangement relationship between a dome and a vacuum pressure measuring element. 1... Vacuum chamber, 5... Rotating dome, 14... Vacuum pressure measuring element, 18... Arithmetic circuit, 19... Vacuum pressure control circuit.
Claims (1)
ームを内装した真空蒸着装置において、前記真空
槽内に少なくとも２つの真空圧測定子を、一方の
真空圧測定子の前方にドームが存在するとき、他
方の真空圧測定子の前方にはドームが存在しない
ように前記ドームの配置間隔とは異なる間隔をも
つて配設し、かつ前記真空圧測定子によつて検出
された各真空圧と平均値を算出する演算回路と、
この演算回路からの出力に基づいて前記真空槽の
真空圧を調整する真空圧制御装置とを具備したこ
とを特徴とする真空蒸着装置。 In a vacuum evaporation apparatus equipped with a plurality of domes that perform planetary motion in a vacuum chamber, when at least two vacuum pressure measuring elements are installed in the vacuum chamber and a dome is present in front of one of the vacuum pressure measuring elements, In front of the other vacuum pressure sensor, domes are arranged at intervals different from those of the domes so that no dome exists in front of the other vacuum pressure sensor, and each vacuum pressure detected by the vacuum pressure sensor and the average value are an arithmetic circuit that calculates
A vacuum evaporation apparatus comprising: a vacuum pressure control device that adjusts the vacuum pressure of the vacuum chamber based on the output from the arithmetic circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (en) | 1990-03-09 | 1990-03-09 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (en) | 1990-03-09 | 1990-03-09 | Vacuum deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115661U true JPH03115661U (en) | 1991-11-29 |
| JPH0740523Y2 JPH0740523Y2 (en) | 1995-09-20 |
Family
ID=31526845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2386490U Expired - Lifetime JPH0740523Y2 (en) | 1990-03-09 | 1990-03-09 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740523Y2 (en) |
-
1990
- 1990-03-09 JP JP2386490U patent/JPH0740523Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740523Y2 (en) | 1995-09-20 |
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