JPH03114824U - - Google Patents
Info
- Publication number
- JPH03114824U JPH03114824U JP5732490U JP5732490U JPH03114824U JP H03114824 U JPH03114824 U JP H03114824U JP 5732490 U JP5732490 U JP 5732490U JP 5732490 U JP5732490 U JP 5732490U JP H03114824 U JPH03114824 U JP H03114824U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- blades
- shutter blades
- opening
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Shutters For Cameras (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5732490U JPH03114824U (ko) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5732490U JPH03114824U (ko) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03114824U true JPH03114824U (ko) | 1991-11-26 |
Family
ID=31581926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5732490U Pending JPH03114824U (ko) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03114824U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7161745B2 (en) | 2003-10-29 | 2007-01-09 | Konica Minolta Opto, Inc. | Aperture stop mechanism, illumination optical system, projection optical system, and projector |
| JP2019516125A (ja) * | 2016-03-31 | 2019-06-13 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | リソグラフィ・マシンの露光に用いるシャッタ・デバイスおよびその使用方法 |
-
1990
- 1990-05-31 JP JP5732490U patent/JPH03114824U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7161745B2 (en) | 2003-10-29 | 2007-01-09 | Konica Minolta Opto, Inc. | Aperture stop mechanism, illumination optical system, projection optical system, and projector |
| JP2019516125A (ja) * | 2016-03-31 | 2019-06-13 | シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド | リソグラフィ・マシンの露光に用いるシャッタ・デバイスおよびその使用方法 |