JPH03114687U - - Google Patents
Info
- Publication number
- JPH03114687U JPH03114687U JP2329590U JP2329590U JPH03114687U JP H03114687 U JPH03114687 U JP H03114687U JP 2329590 U JP2329590 U JP 2329590U JP 2329590 U JP2329590 U JP 2329590U JP H03114687 U JPH03114687 U JP H03114687U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- cylinder
- valve
- piston
- inner cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2329590U JPH03114687U (ko) | 1990-03-08 | 1990-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2329590U JPH03114687U (ko) | 1990-03-08 | 1990-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03114687U true JPH03114687U (ko) | 1991-11-26 |
Family
ID=31526286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2329590U Pending JPH03114687U (ko) | 1990-03-08 | 1990-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03114687U (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000074124A1 (fr) * | 1999-05-27 | 2000-12-07 | Applied Materials Inc. | Appareil de fabrication d'un dispositif a semi-conducteurs |
| JP2004316916A (ja) * | 2003-04-16 | 2004-11-11 | Vat Holding Ag | 少なくとも一つの開口を有する真空閉塞体の閉塞装置 |
| WO2019239673A1 (ja) * | 2018-06-12 | 2019-12-19 | 株式会社アルバック | 仕切弁装置 |
-
1990
- 1990-03-08 JP JP2329590U patent/JPH03114687U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000074124A1 (fr) * | 1999-05-27 | 2000-12-07 | Applied Materials Inc. | Appareil de fabrication d'un dispositif a semi-conducteurs |
| JP2004316916A (ja) * | 2003-04-16 | 2004-11-11 | Vat Holding Ag | 少なくとも一つの開口を有する真空閉塞体の閉塞装置 |
| WO2019239673A1 (ja) * | 2018-06-12 | 2019-12-19 | 株式会社アルバック | 仕切弁装置 |
| KR20210020067A (ko) * | 2018-06-12 | 2021-02-23 | 가부시키가이샤 알박 | 게이트 밸브 장치 |
| US11002366B2 (en) | 2018-06-12 | 2021-05-11 | Ulvac, Inc. | Gate valve device |