JPH03112864U - - Google Patents

Info

Publication number
JPH03112864U
JPH03112864U JP2096190U JP2096190U JPH03112864U JP H03112864 U JPH03112864 U JP H03112864U JP 2096190 U JP2096190 U JP 2096190U JP 2096190 U JP2096190 U JP 2096190U JP H03112864 U JPH03112864 U JP H03112864U
Authority
JP
Japan
Prior art keywords
ultraviolet
capillary tube
discharge chamber
optical path
extracting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2096190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2096190U priority Critical patent/JPH03112864U/ja
Publication of JPH03112864U publication Critical patent/JPH03112864U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
JP2096190U 1990-02-28 1990-02-28 Pending JPH03112864U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2096190U JPH03112864U (enExample) 1990-02-28 1990-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2096190U JPH03112864U (enExample) 1990-02-28 1990-02-28

Publications (1)

Publication Number Publication Date
JPH03112864U true JPH03112864U (enExample) 1991-11-19

Family

ID=31524040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2096190U Pending JPH03112864U (enExample) 1990-02-28 1990-02-28

Country Status (1)

Country Link
JP (1) JPH03112864U (enExample)

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