JPH03112588U - - Google Patents
Info
- Publication number
- JPH03112588U JPH03112588U JP2235090U JP2235090U JPH03112588U JP H03112588 U JPH03112588 U JP H03112588U JP 2235090 U JP2235090 U JP 2235090U JP 2235090 U JP2235090 U JP 2235090U JP H03112588 U JPH03112588 U JP H03112588U
- Authority
- JP
- Japan
- Prior art keywords
- check valve
- housing
- pump chamber
- chamber forming
- forming member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2235090U JPH03112588U (sv) | 1990-03-05 | 1990-03-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2235090U JPH03112588U (sv) | 1990-03-05 | 1990-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03112588U true JPH03112588U (sv) | 1991-11-18 |
Family
ID=31525361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2235090U Pending JPH03112588U (sv) | 1990-03-05 | 1990-03-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03112588U (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009001757A1 (ja) * | 2007-06-27 | 2008-12-31 | Alps Electric Co., Ltd. | ドライバ内蔵圧電ポンプ |
CN104976102A (zh) * | 2014-04-11 | 2015-10-14 | 东京理化器械株式会社 | 隔膜真空泵 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62186077A (ja) * | 1986-02-10 | 1987-08-14 | Misuzu Erii:Kk | 圧電ポンプの駆動方法 |
JPH01285681A (ja) * | 1988-05-11 | 1989-11-16 | Olympus Optical Co Ltd | バイモルフ式ポンプ |
-
1990
- 1990-03-05 JP JP2235090U patent/JPH03112588U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62186077A (ja) * | 1986-02-10 | 1987-08-14 | Misuzu Erii:Kk | 圧電ポンプの駆動方法 |
JPH01285681A (ja) * | 1988-05-11 | 1989-11-16 | Olympus Optical Co Ltd | バイモルフ式ポンプ |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009001757A1 (ja) * | 2007-06-27 | 2008-12-31 | Alps Electric Co., Ltd. | ドライバ内蔵圧電ポンプ |
CN104976102A (zh) * | 2014-04-11 | 2015-10-14 | 东京理化器械株式会社 | 隔膜真空泵 |
JP2015203310A (ja) * | 2014-04-11 | 2015-11-16 | 東京理化器械株式会社 | ダイヤフラム真空ポンプ |
CN104976102B (zh) * | 2014-04-11 | 2019-07-05 | 东京理化器械株式会社 | 隔膜真空泵 |
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