JPH03112588U - - Google Patents

Info

Publication number
JPH03112588U
JPH03112588U JP2235090U JP2235090U JPH03112588U JP H03112588 U JPH03112588 U JP H03112588U JP 2235090 U JP2235090 U JP 2235090U JP 2235090 U JP2235090 U JP 2235090U JP H03112588 U JPH03112588 U JP H03112588U
Authority
JP
Japan
Prior art keywords
check valve
housing
pump chamber
chamber forming
forming member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2235090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2235090U priority Critical patent/JPH03112588U/ja
Publication of JPH03112588U publication Critical patent/JPH03112588U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP2235090U 1990-03-05 1990-03-05 Pending JPH03112588U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2235090U JPH03112588U (sv) 1990-03-05 1990-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2235090U JPH03112588U (sv) 1990-03-05 1990-03-05

Publications (1)

Publication Number Publication Date
JPH03112588U true JPH03112588U (sv) 1991-11-18

Family

ID=31525361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2235090U Pending JPH03112588U (sv) 1990-03-05 1990-03-05

Country Status (1)

Country Link
JP (1) JPH03112588U (sv)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001757A1 (ja) * 2007-06-27 2008-12-31 Alps Electric Co., Ltd. ドライバ内蔵圧電ポンプ
CN104976102A (zh) * 2014-04-11 2015-10-14 东京理化器械株式会社 隔膜真空泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62186077A (ja) * 1986-02-10 1987-08-14 Misuzu Erii:Kk 圧電ポンプの駆動方法
JPH01285681A (ja) * 1988-05-11 1989-11-16 Olympus Optical Co Ltd バイモルフ式ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62186077A (ja) * 1986-02-10 1987-08-14 Misuzu Erii:Kk 圧電ポンプの駆動方法
JPH01285681A (ja) * 1988-05-11 1989-11-16 Olympus Optical Co Ltd バイモルフ式ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001757A1 (ja) * 2007-06-27 2008-12-31 Alps Electric Co., Ltd. ドライバ内蔵圧電ポンプ
CN104976102A (zh) * 2014-04-11 2015-10-14 东京理化器械株式会社 隔膜真空泵
JP2015203310A (ja) * 2014-04-11 2015-11-16 東京理化器械株式会社 ダイヤフラム真空ポンプ
CN104976102B (zh) * 2014-04-11 2019-07-05 东京理化器械株式会社 隔膜真空泵

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