JPH03111562U - - Google Patents
Info
- Publication number
- JPH03111562U JPH03111562U JP2098090U JP2098090U JPH03111562U JP H03111562 U JPH03111562 U JP H03111562U JP 2098090 U JP2098090 U JP 2098090U JP 2098090 U JP2098090 U JP 2098090U JP H03111562 U JPH03111562 U JP H03111562U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- closed
- mass flow
- flow controller
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098090U JPH0623566Y2 (ja) | 1990-02-28 | 1990-02-28 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098090U JPH0623566Y2 (ja) | 1990-02-28 | 1990-02-28 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03111562U true JPH03111562U (enExample) | 1991-11-14 |
| JPH0623566Y2 JPH0623566Y2 (ja) | 1994-06-22 |
Family
ID=31524059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2098090U Expired - Lifetime JPH0623566Y2 (ja) | 1990-02-28 | 1990-02-28 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623566Y2 (enExample) |
-
1990
- 1990-02-28 JP JP2098090U patent/JPH0623566Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623566Y2 (ja) | 1994-06-22 |