JPH0311064U - - Google Patents

Info

Publication number
JPH0311064U
JPH0311064U JP7224389U JP7224389U JPH0311064U JP H0311064 U JPH0311064 U JP H0311064U JP 7224389 U JP7224389 U JP 7224389U JP 7224389 U JP7224389 U JP 7224389U JP H0311064 U JPH0311064 U JP H0311064U
Authority
JP
Japan
Prior art keywords
raw material
furnace
silicon single
single crystal
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7224389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0640592Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7224389U priority Critical patent/JPH0640592Y2/ja
Publication of JPH0311064U publication Critical patent/JPH0311064U/ja
Application granted granted Critical
Publication of JPH0640592Y2 publication Critical patent/JPH0640592Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7224389U 1989-06-20 1989-06-20 シリコン単結晶の成長装置 Expired - Lifetime JPH0640592Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7224389U JPH0640592Y2 (ja) 1989-06-20 1989-06-20 シリコン単結晶の成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7224389U JPH0640592Y2 (ja) 1989-06-20 1989-06-20 シリコン単結晶の成長装置

Publications (2)

Publication Number Publication Date
JPH0311064U true JPH0311064U (enrdf_load_html_response) 1991-02-01
JPH0640592Y2 JPH0640592Y2 (ja) 1994-10-26

Family

ID=31610011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7224389U Expired - Lifetime JPH0640592Y2 (ja) 1989-06-20 1989-06-20 シリコン単結晶の成長装置

Country Status (1)

Country Link
JP (1) JPH0640592Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110760931B (zh) * 2019-11-22 2024-03-19 中国电子科技集团公司第十三研究所 一种利用铟磷混合物制备磷化铟晶体的系统

Also Published As

Publication number Publication date
JPH0640592Y2 (ja) 1994-10-26

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