JPH03110440U

JPH03110440U -

Info

Publication number: JPH03110440U
Application number: JP1829090U
Authority: JP
Priority date: 1990-02-27
Filing date: 1990-02-27
Publication date: 1991-11-13

Description

[Brief explanation of drawings]

第１図は本考案に係るマスク保護用ペリクルの
剥離治具の一実施例を示す断面図、第２図は同治
具の平面図、第３図は本考案治具によるマスク保
護用ペリクルの剥離方法を説明するための図、第
４図は半導体用マスクとマスク保護用ペリクルの
斜視図、第５図は剥離治具の従来例を示す断面図
である。１……半導体用マスク、２……マスク保護用ペ
リクル、３……ペリクル枠、３Ａ，３Ｂ……対向
辺、４……ペリクル膜、２１ａ，２１ｂ……把持
部、２２……ハンドル、２４，２５……挟持手段
、２４Ａ，２４Ｂ，２５Ａ，２５Ｂ……挟持体、
２７……係合部、２８……係合部。 Fig. 1 is a cross-sectional view showing an embodiment of the mask protective pellicle peeling jig according to the present invention, Fig. 2 is a plan view of the same jig, and Fig. 3 is the peeling of the mask protective pellicle using the invented jig. FIG. 4 is a perspective view of a semiconductor mask and a pellicle for protecting the mask, and FIG. 5 is a sectional view showing a conventional example of a peeling jig. 1... Semiconductor mask, 2... Mask protection pellicle, 3... Pellicle frame, 3A, 3B... Opposing sides, 4... Pellicle membrane, 21a, 21b... Gripping portion, 22... Handle, 24, 25... Holding means, 24A, 24B, 25A, 25B... Holding body,
27... Engaging portion, 28... Engaging portion.

Claims

[Scope of Claim for Utility Model Registration] A peeling jig for a mask protection pellicle fixed to a semiconductor mask, which is composed of a pellicle frame and a pellicle membrane stretched over the upper opening of the pellicle frame, which has gripping parts at both ends. and a pair of clamping means each including a pair of clamping bodies that are slidably attached to the handle and clamp opposite sides of the pellicle frame from the inside and outside,
A pellicle for mask protection characterized in that, of the pair of clamping bodies of each clamping means, the clamping body that clamps the outer surface of the pellicle frame has an engaging part that engages with an engaging part provided on the pellicle frame. Peeling jig.