JPH03109751U - - Google Patents
Info
- Publication number
- JPH03109751U JPH03109751U JP1762990U JP1762990U JPH03109751U JP H03109751 U JPH03109751 U JP H03109751U JP 1762990 U JP1762990 U JP 1762990U JP 1762990 U JP1762990 U JP 1762990U JP H03109751 U JPH03109751 U JP H03109751U
- Authority
- JP
- Japan
- Prior art keywords
- tool
- cutting
- tool mounting
- piezoelectric element
- contact signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Automatic Control Of Machine Tools (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1762990U JPH03109751U (OSRAM) | 1990-02-22 | 1990-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1762990U JPH03109751U (OSRAM) | 1990-02-22 | 1990-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109751U true JPH03109751U (OSRAM) | 1991-11-11 |
Family
ID=31520814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1762990U Pending JPH03109751U (OSRAM) | 1990-02-22 | 1990-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109751U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101333738B1 (ko) * | 2011-11-09 | 2013-11-28 | 한국생산기술연구원 | 별도의 선형이동유닛이 구비된 나노스테이지 |
| JP2016521213A (ja) * | 2013-04-04 | 2016-07-21 | マイクロルーション・インコーポレイテッドＭｉｃｒｏｌｕｔｉｏｎ Ｉｎｃ． | ファストライブツールシステム |
-
1990
- 1990-02-22 JP JP1762990U patent/JPH03109751U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101333738B1 (ko) * | 2011-11-09 | 2013-11-28 | 한국생산기술연구원 | 별도의 선형이동유닛이 구비된 나노스테이지 |
| JP2016521213A (ja) * | 2013-04-04 | 2016-07-21 | マイクロルーション・インコーポレイテッドＭｉｃｒｏｌｕｔｉｏｎ Ｉｎｃ． | ファストライブツールシステム |
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