JPH03109751U - - Google Patents
Info
- Publication number
- JPH03109751U JPH03109751U JP1762990U JP1762990U JPH03109751U JP H03109751 U JPH03109751 U JP H03109751U JP 1762990 U JP1762990 U JP 1762990U JP 1762990 U JP1762990 U JP 1762990U JP H03109751 U JPH03109751 U JP H03109751U
- Authority
- JP
- Japan
- Prior art keywords
- tool
- cutting
- tool mounting
- piezoelectric element
- contact signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Description
第1図乃至第4図は本考案の実施例になる微小
切込み切削装置に係り、第1図はその模式的構成
説明図、第2図は薄膜と膜厚と検出電圧関係説明
図、第3図は設定切込み量に対する実切削深さ関
係説明図、第4図aと第4図bは切削工具の刃先
形状説明図、第5図と第6図とは従来例になる微
小切込み切削装置に係り、第5図はその模式的構
成説明図、第6図は接触点検出信号の出力状態を
示すグラフ図である。
1……工具台の溝部、2……シヤンク、3……
工具取付部、4……圧電素子、5…工具台、7…
…検出回路、8……電源装置、9……変位計、1
0……制御用CPU、13……切削工具、13a
,14a……電極、14……被削材。
1 to 4 relate to a micro-cutting device according to an embodiment of the present invention, in which FIG. 1 is a diagram schematically illustrating its configuration, FIG. The figure is an explanatory diagram of the relationship between the set depth of cut and the actual cutting depth, Figures 4a and 4b are explanatory diagrams of the shape of the cutting tool's cutting edge, and Figures 5 and 6 are of a conventional micro-cutting device. Accordingly, FIG. 5 is a schematic diagram for explaining the configuration, and FIG. 6 is a graph diagram showing the output state of the contact point detection signal. 1...Groove of tool stand, 2...Shank, 3...
Tool mounting portion, 4... Piezoelectric element, 5... Tool stand, 7...
...Detection circuit, 8...Power supply device, 9...Displacement meter, 1
0... Control CPU, 13... Cutting tool, 13a
, 14a... Electrode, 14... Work material.
Claims (1)
向中間部に溝部が形成され、該溝部内に、印加電
圧に応じて工具取付部を切込み方向へ押圧する圧
電素子が設けられ、前記工具取付部は、切込み方
向へ撓み得る平行ばね構造を備える他、該工具取
付部に切込み量を検知する変位計を備えた微小切
込み用切削装置において、 前記工具取付部に、導電物質からなる薄膜を成
膜した切削工具を装着し、該切削工具と被削材と
の接触信号を検知する接触信号検知装置を配備す
ると共に、該接触信号検知装置からの出力信号と
前記変位計からの変位信号とに基づいて前記圧電
素子への印加電圧を制御する制御装置を配備して
なることを特徴とする微小切込み用切削装置。[Claims for Utility Model Registration] A groove is formed in the axially intermediate portion of the tool stand having a shank and a tool mounting portion, and a piezoelectric element is provided in the groove to press the tool mounting portion in the cutting direction in accordance with an applied voltage. The tool mounting section is provided with a parallel spring structure capable of deflecting in the cutting direction, and the tool mounting section is equipped with a displacement meter for detecting the depth of cut. A cutting tool on which a thin film of a substance is deposited is mounted, and a contact signal detection device for detecting a contact signal between the cutting tool and the workpiece is installed, and an output signal from the contact signal detection device and the displacement meter are provided. 1. A cutting device for making minute cuts, comprising: a control device for controlling a voltage applied to the piezoelectric element based on a displacement signal from the piezoelectric element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1762990U JPH03109751U (en) | 1990-02-22 | 1990-02-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1762990U JPH03109751U (en) | 1990-02-22 | 1990-02-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03109751U true JPH03109751U (en) | 1991-11-11 |
Family
ID=31520814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1762990U Pending JPH03109751U (en) | 1990-02-22 | 1990-02-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03109751U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101333738B1 (en) * | 2011-11-09 | 2013-11-28 | 한국생산기술연구원 | Nano Stage Having Separate Linear Moving Unit |
JP2016521213A (en) * | 2013-04-04 | 2016-07-21 | マイクロルーション・インコーポレイテッドMicrolution Inc. | Fast live tool system |
-
1990
- 1990-02-22 JP JP1762990U patent/JPH03109751U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101333738B1 (en) * | 2011-11-09 | 2013-11-28 | 한국생산기술연구원 | Nano Stage Having Separate Linear Moving Unit |
JP2016521213A (en) * | 2013-04-04 | 2016-07-21 | マイクロルーション・インコーポレイテッドMicrolution Inc. | Fast live tool system |
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