JPH03109330U - - Google Patents

Info

Publication number
JPH03109330U
JPH03109330U JP1739690U JP1739690U JPH03109330U JP H03109330 U JPH03109330 U JP H03109330U JP 1739690 U JP1739690 U JP 1739690U JP 1739690 U JP1739690 U JP 1739690U JP H03109330 U JPH03109330 U JP H03109330U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
cleaning
cleaning tank
conical part
carrier jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1739690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1739690U priority Critical patent/JPH03109330U/ja
Publication of JPH03109330U publication Critical patent/JPH03109330U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP1739690U 1990-02-26 1990-02-26 Pending JPH03109330U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1739690U JPH03109330U (US20110009641A1-20110113-C00185.png) 1990-02-26 1990-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1739690U JPH03109330U (US20110009641A1-20110113-C00185.png) 1990-02-26 1990-02-26

Publications (1)

Publication Number Publication Date
JPH03109330U true JPH03109330U (US20110009641A1-20110113-C00185.png) 1991-11-11

Family

ID=31520608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1739690U Pending JPH03109330U (US20110009641A1-20110113-C00185.png) 1990-02-26 1990-02-26

Country Status (1)

Country Link
JP (1) JPH03109330U (US20110009641A1-20110113-C00185.png)

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