JPH03108645A - Composition tomographic analyzer - Google Patents

Abstract

PURPOSE:To nondestructively analyze inside an object for every composition by detecting intensity of characteristic radiation radiated according to composition of a specimen when a high energy beam passes through the object (specimen) to be analyzed. CONSTITUTION:An X-ray beam, for example, which has been emitted from a radiation source 1 is incident from an inlet of a radiation detecting element 3 to pass through a specimen 2, when a characteristic X-ray peculiar to a composition element of the specimen is generated. This characteristic X-ray is detected by the detecting element 2 formed in a circle around the specimen 2, and the element 3 generates a pulse signal having height in proportion to the energy of the X-ray at a frequency in proportion to the intensity of the X-ray and transmits the signal via a cable 8 to an arithmetic unit 4. A driver 6 drives the specimen in X, Y, Z and theta directions based on an instruction from the unit 4 while the unit 4 having a pulse-height analyzer and Fourier-transform or back-projection and memory functions can calculate tomographic composition of the specimen 2 based on the signal from the element 3 and display the results on a CRT5.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Field of Application> The present invention relates to a composition tomography analysis device that displays the internal composition distribution of one analysis object for each element.

<Conventional technology> Conventionally, X-ray CT has been used as a device for measuring the inside of an analysis target.
The device is known.

<Problems to be Solved by the Invention> However, although it is possible to measure the density distribution of an object to be analyzed using conventional CT apparatuses, there is a problem in that it is not possible to analyze even the distribution of zero composition. In addition, 1. For example, when inspecting a product whose composition is graded by intermixing the composition of ceramic and metal at the boundary, which has a slope as designed, use an upper surface analysis device that cuts that part. There was a problem that it had to be done.

The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to realize an apparatus that non-destructively analyzes the inside of an object to be analyzed for each composition.

Apparatus for Solving the Problems> The configuration of the present invention for solving the problems of the prior art described above includes at least one radiation source that generates high-energy ionizing radiation, one analysis target, and at least pre-ionizing radiation. A plurality of radiation detection elements arranged surrounding the analysis target except for the input and output portions.

The object to be analyzed is rotated within the radiation detection element, and X relative to the traveling direction of the ionizing radiation.

Calculate the tomographic composition of the analysis target based on a drive device that moves in the Y and Z directions and a signal from the radiation detection element that is generated by absorbing characteristic radiation emitted when the ionizing radiation passes through the analysis target. The present invention is characterized in that it is equipped with an arithmetic display device that displays the results.

Effect> When high-energy X-rays, electron beams, positron beams, and neutron beams pass through an object to be analyzed (hereinafter referred to as a sample), the sample emits characteristic radiation according to its composition. The intensity of the radiation is detected by multiple radiation detection elements, and the signal is sent to a calculation device to perform various calculations, and the cross-sectional composition of the sample is determined by the CRT.
Display above.

<Example> The present invention will be described below with reference to one drawing. FIG. 1 is a diagram showing the configuration of essential parts of an embodiment of the compositional J-analyzer of the present invention.

In the figure, 1 is a radiation source, 2 is a sample, and 3 is a plurality of radiation detection elements. This radiation detection element 3 is formed in an annular shape around the measurement object 2 except for the input position and the output position of the radiation source 1, and the signals detected by each element are transmitted via a gable 9 to an arithmetic display device 7. is input. 4 is a calculation device including wave height analysis and Fourier transform 1 image reproduction device; 5
is a CRT. Reference numeral 6 denotes a driving device, which supports the sample at one end thereof and positions it approximately at the center of the radiation detection element 3, based on commands from the arithmetic device 4.

The sample is driven in the x, y, z, and θ directions.

Here, as the radiation source 1, for example, in the case of an X-ray source, there is a photon factory (owned by the Light Energy Research Institute in Tsukuba Academy City), a synchrotron radiation (SOR), an X-ray source using a linear accelerator, etc. (Mitsubishi Electric linac),
A cyclotron and a linear accelerator are used as the electron beam source and the proton beam source, and a nuclear reactor is used as the neutron source.

Further, as the radiation detection element, it is preferable to use a Cd'T"e single crystal which is resistant to radiation damage and has a high specific resistance. The smaller the area of one element, the larger the number, the higher the resolution.

In the above configuration, for example, the X-ray beam emitted from the radiation source enters the radiation detection element from the entrance, passes through the sample, and exits from the exit, but at this time, characteristic X-rays unique to the constituent elements of the sample are generated. . This characteristic X-ray is captured by a detection element provided around the X-ray, and the detection element generates a pulse having a height proportional to the energy of the X-ray at a frequency proportional to the intensity of the X-ray.

This signal is transmitted to the arithmetic unit 4 via the cable 8. The arithmetic unit 4 includes a pulse height analyzer, a Fourier transform or back projection, a memory function, etc., and the signal processed here is displayed on a CRT 5. The pulse height analyzer detects the height of the pulse and sends the signal to the Tourier transform or back-10 transformation.

These devices detect the wavelength of X-rays according to the wave height, and the intensity of the X-rays can be determined from the number of pulse counts.

The drive device 6 moves or rotates the sample in the x, y, and z directions with respect to the beam.

The sample performs operations as shown in FIGS. 2(a) to 2(e), for example. This figure shows a cross section of the sample viewed from above. That is, Fig. 1A shows a state in which the beam passes through the left end of the sample, and the detection element detects the intensity distribution of the characteristic X-rays generated at this time.

The arithmetic unit stores the signal values from each detection element at that time.(a) As shown in the figure opening, the drive unit 6 is rotated, the sample is tilted by, for example, 25 degrees, and the beam passes through the sample. The signal value of the characteristic X-ray detected by the detection element is memorized, and the same detection is performed with the sample tilted by 45° as shown in (a) Figure C.6 Next, in (b) A, the beam position (a) Shift the beam slightly to the right of figure A to transmit the beam, and then (e) store the signals up to C in the same manner.
These values are combined to display what kind of components are distributed in the cross section of the sample as an image on the CRTG. The CRT screen in FIG. 1 is a conceptual diagram showing the distribution of elements in a cross section of a sample detected by the above-mentioned apparatus.

3(a) to 3(c) show other embodiments of the detection element, the symbols are the same as those in the first embodiment, (a) is a sectional view of the detection element, and (b) is a (a> figure). The Z parent diagram (C) is a side view of Figure <b>, and in this example, the detection element surrounds the entire sample 2. If the detection element is configured in this way, it will be the same as the detection element in Figure 1. It is possible to display more details compared to the placement status.

In FIG. 4, the detection element is spherical as in FIG. 3.

A total of six radiation source entrance and exit holes are provided in the detection element.

This shows a state in which a point P on the sample is irradiated with radiation sources from three directions. With this configuration, 1 at the intersection of the beams
One beam excites an atom, which can then be further excited by another beam, improving sensitivity and resolution.

<Effects of the Invention> As specifically explained above in conjunction with the embodiments, according to the present invention, it is possible to obtain a tomographic image of the distribution of one element. A destructive inspection device can be realized. In this embodiment, the detection element is illustrated as ring-shaped and spherical, but the shape of the detection element may be hemispherical or cylindrical (not limited to the embodiment).

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the configuration of a compositional tomography analyzer showing an embodiment of the present invention, FIG. 2 is a diagram showing the operational relationship when a beam passes through a sample, and FIG. 3 is a diagram showing other shapes of the detection element. The figure shown in FIG. 4 is a conceptual diagram showing a state in which a sample is irradiated with different beams from three directions. DESCRIPTION OF SYMBOLS 1... Radiation source, 2... Analysis object (sample), 3... Radiation detection element, 4... Arithmetic device, 5... CR'l'
, 6... Drive device, 7... Arithmetic display device.

Claims (1)

[Claims] at least one radiation source that generates high-energy ionizing radiation, an analysis target, a plurality of radiation detection elements arranged surrounding the analysis target except for at least a portion where the ionizing radiation enters and exits, and the analysis target a drive device that rotates the radiation detecting element in the radiation detection element and moves it in the X, Y, and Z directions with respect to the traveling direction of the ionizing radiation; and a characteristic radiation that is emitted when the ionizing radiation passes through the analysis target. calculating the tomographic composition of the analysis target based on the signal from the radiation detection element generated by absorbing the radiation;
A compositional tomography analysis device characterized by being equipped with a calculation display device that displays the results.