JPH03106732U - - Google Patents
Info
- Publication number
- JPH03106732U JPH03106732U JP1536390U JP1536390U JPH03106732U JP H03106732 U JPH03106732 U JP H03106732U JP 1536390 U JP1536390 U JP 1536390U JP 1536390 U JP1536390 U JP 1536390U JP H03106732 U JPH03106732 U JP H03106732U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- holding stand
- holding
- view
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1536390U JPH03106732U (enExample) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1536390U JPH03106732U (enExample) | 1990-02-19 | 1990-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106732U true JPH03106732U (enExample) | 1991-11-05 |
Family
ID=31518672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1536390U Pending JPH03106732U (enExample) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106732U (enExample) |
-
1990
- 1990-02-19 JP JP1536390U patent/JPH03106732U/ja active Pending