JPH03106731U - - Google Patents
Info
- Publication number
- JPH03106731U JPH03106731U JP1600090U JP1600090U JPH03106731U JP H03106731 U JPH03106731 U JP H03106731U JP 1600090 U JP1600090 U JP 1600090U JP 1600090 U JP1600090 U JP 1600090U JP H03106731 U JPH03106731 U JP H03106731U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- susceptor
- inert gas
- reaction chamber
- hollow part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1600090U JP2501436Y2 (ja) | 1990-02-20 | 1990-02-20 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1600090U JP2501436Y2 (ja) | 1990-02-20 | 1990-02-20 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03106731U true JPH03106731U (tr) | 1991-11-05 |
| JP2501436Y2 JP2501436Y2 (ja) | 1996-06-19 |
Family
ID=31519287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1600090U Expired - Fee Related JP2501436Y2 (ja) | 1990-02-20 | 1990-02-20 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501436Y2 (tr) |
-
1990
- 1990-02-20 JP JP1600090U patent/JP2501436Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2501436Y2 (ja) | 1996-06-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |