JPH03106728U - - Google Patents
Info
- Publication number
- JPH03106728U JPH03106728U JP1558490U JP1558490U JPH03106728U JP H03106728 U JPH03106728 U JP H03106728U JP 1558490 U JP1558490 U JP 1558490U JP 1558490 U JP1558490 U JP 1558490U JP H03106728 U JPH03106728 U JP H03106728U
- Authority
- JP
- Japan
- Prior art keywords
- support
- wiring
- hole
- rotary stage
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558490U JPH03106728U (enExample) | 1990-02-21 | 1990-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558490U JPH03106728U (enExample) | 1990-02-21 | 1990-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106728U true JPH03106728U (enExample) | 1991-11-05 |
Family
ID=31518883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1558490U Pending JPH03106728U (enExample) | 1990-02-21 | 1990-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106728U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61214520A (ja) * | 1985-03-20 | 1986-09-24 | Hitachi Ltd | 塗布装置 |
| JPS6226817A (ja) * | 1985-07-29 | 1987-02-04 | Canon Inc | スピンナ−装置 |
| JPS6253773A (ja) * | 1985-08-30 | 1987-03-09 | Nec Corp | 有機膜塗布装置 |
| JPS63250820A (ja) * | 1987-04-08 | 1988-10-18 | Mitsubishi Electric Corp | 塗布装置 |
-
1990
- 1990-02-21 JP JP1558490U patent/JPH03106728U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61214520A (ja) * | 1985-03-20 | 1986-09-24 | Hitachi Ltd | 塗布装置 |
| JPS6226817A (ja) * | 1985-07-29 | 1987-02-04 | Canon Inc | スピンナ−装置 |
| JPS6253773A (ja) * | 1985-08-30 | 1987-03-09 | Nec Corp | 有機膜塗布装置 |
| JPS63250820A (ja) * | 1987-04-08 | 1988-10-18 | Mitsubishi Electric Corp | 塗布装置 |