JPH03106524U - - Google Patents
Info
- Publication number
- JPH03106524U JPH03106524U JP1539590U JP1539590U JPH03106524U JP H03106524 U JPH03106524 U JP H03106524U JP 1539590 U JP1539590 U JP 1539590U JP 1539590 U JP1539590 U JP 1539590U JP H03106524 U JPH03106524 U JP H03106524U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- reflecting member
- light emitting
- emitting device
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Recording Or Reproduction (AREA)
Description
第１図は請求項１記載の考案の実施例を示す側
面図、第２図は請求項２記載の考案の実施例を示
す側面図である。
１，１０……面傾斜測定装置、２……デイスク
、３……光出射装置、７，８……反射面、９……
反射部材、１１……交差部。
FIG. 1 is a side view showing an embodiment of the invention as claimed in claim 1, and FIG. 2 is a side view showing an embodiment of the invention as claimed in claim 2. 1, 10...Surface inclination measuring device, 2...Disc, 3...Light emitting device, 7, 8...Reflecting surface, 9...
Reflective member, 11... intersection.
Claims (1)
して反射された検査光を検出して前記デイスクの
表面の傾斜量を測定する面傾斜測定装置において
、前記デイスクの支持軸の軸心方向と平行に検査
光を出射する光出射装置を設け、この光出射装置
から出射された検査光を少なくとも二回反射して
前記軸心方向と平行に前記デイスクの表面に照射
する反射部材を設け、この反射部材を変位自在に
支持する駆動機構を設けたことを特徴とする面傾
斜測定装置。 ２ 各々光出射装置とデイスクの表面とに対向す
る二つの反射面を備えた反射部材を設け、この反
射部材を前記反射面の交差部を中心に回動させる
回動駆動機構を設けたことを特徴とする請求項１
記載の面傾斜測定装置。[Claims for Utility Model Registration] 1. A surface inclination measuring device that measures the amount of inclination of the surface of the disk by detecting the inspection light irradiated onto the surface of a rotatably supported disk and reflected. A light emitting device is provided that emits an inspection light parallel to the axial direction of the support shaft, and the inspection light emitted from the light emitting device is reflected at least twice to reach the surface of the disk parallel to the axial direction. 1. A surface inclination measuring device, comprising: a reflecting member for irradiation; and a drive mechanism for movably supporting the reflecting member. 2. A reflecting member having two reflecting surfaces facing each other to the light emitting device and the surface of the disk is provided, and a rotation drive mechanism is provided to rotate the reflecting member around the intersection of the reflecting surfaces. Claim 1
The surface inclination measuring device described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1539590U JPH03106524U (en) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1539590U JPH03106524U (en) | 1990-02-19 | 1990-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106524U true JPH03106524U (en) | 1991-11-05 |
Family
ID=31518703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1539590U Pending JPH03106524U (en) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106524U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003010488A1 (en) * | 2001-07-27 | 2003-02-06 | Hamamatsu Metrix Co., Ltd. | Composite optical sensor unit and optical disk inspection device using it |
-
1990
- 1990-02-19 JP JP1539590U patent/JPH03106524U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003010488A1 (en) * | 2001-07-27 | 2003-02-06 | Hamamatsu Metrix Co., Ltd. | Composite optical sensor unit and optical disk inspection device using it |