JPH0310460U - - Google Patents
Info
- Publication number
- JPH0310460U JPH0310460U JP7061689U JP7061689U JPH0310460U JP H0310460 U JPH0310460 U JP H0310460U JP 7061689 U JP7061689 U JP 7061689U JP 7061689 U JP7061689 U JP 7061689U JP H0310460 U JPH0310460 U JP H0310460U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode structure
- charged particle
- particle beam
- beam device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7061689U JPH0310460U (cs) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7061689U JPH0310460U (cs) | 1989-06-16 | 1989-06-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0310460U true JPH0310460U (cs) | 1991-01-31 |
Family
ID=31606919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7061689U Pending JPH0310460U (cs) | 1989-06-16 | 1989-06-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0310460U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000223054A (ja) * | 1999-02-02 | 2000-08-11 | Advantest Corp | 電子ビーム照射装置の静電偏向器 |
-
1989
- 1989-06-16 JP JP7061689U patent/JPH0310460U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000223054A (ja) * | 1999-02-02 | 2000-08-11 | Advantest Corp | 電子ビーム照射装置の静電偏向器 |