JPH03104009A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH03104009A
JPH03104009A JP24132089A JP24132089A JPH03104009A JP H03104009 A JPH03104009 A JP H03104009A JP 24132089 A JP24132089 A JP 24132089A JP 24132089 A JP24132089 A JP 24132089A JP H03104009 A JPH03104009 A JP H03104009A
Authority
JP
Japan
Prior art keywords
thin film
magnetic head
substrate
layer
magnetic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24132089A
Other languages
Japanese (ja)
Inventor
Shigeyuki Iwatani
岩谷 重之
Fumio Shiyoubuda
菖蒲田 普美雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP24132089A priority Critical patent/JPH03104009A/en
Publication of JPH03104009A publication Critical patent/JPH03104009A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent a thin film magnetic head from being destroyed by conducting a coil conductor and a slider substrate. CONSTITUTION:Is charged with static electricity plastic case housing the thin film magnetic head static electricity by friction at the time of conveyance. When the lead wire of the head gets contact with this case, a high voltage is applied to a coil conductor 15. Since an insulated protecting film 12 is interposed between the conductor 15 and an upper magnetic layer 14, an inverse electric charge is generated in the layer 14. A slider substrate 11 equipped with sufficiently larger conductivity than that of the layer 14 apparently comes to a ground and it can be considered that the inverse electric charge is leaked to the substrate 11. Thus, by conducting the substrate 11 and the conductor 15, the voltage acts on the whole substrate 11 and the layer 14 is prevented from being charged with the inverse electric charge. Then, the conductor 15 and the substrate 11 are set to the same potential and the material of the thin film magnetic head can be prevented from being destoryed.

Description

【発明の詳細な説明】 [概要] 導電性のスライダ基板上に絶縁保護膜を形成し、この絶
縁保護膜上に一端部が接続され、他端部には磁気ギャッ
プが形戊されるように下部磁性層と上部磁性層とを設け
、これら下部磁性層及び上部磁性層間にコイル導体を設
けた薄膜磁気ヘッドに関し、 運搬段階等における薄膜磁気ヘッドの上部磁性層,スラ
イダ基板の材料の破壊を防止しうる薄膜磁気ヘッドを提
供することを目的とし、前記コイル導体と前記スライダ
基板とを導通させるように構成する。
[Detailed Description of the Invention] [Summary] An insulating protective film is formed on a conductive slider substrate, one end is connected to the insulating protective film, and a magnetic gap is formed at the other end. Regarding a thin film magnetic head that has a lower magnetic layer and an upper magnetic layer and a coil conductor between the lower magnetic layer and the upper magnetic layer, this prevents the destruction of the upper magnetic layer of the thin film magnetic head and the material of the slider substrate during the transportation stage, etc. The present invention aims to provide a thin film magnetic head that can be used in a thin film magnetic head, and is constructed so that the coil conductor and the slider substrate are electrically connected to each other.

[産業上の利用分野] 導電性のスライダ基板上に絶縁保護膜を形成し、この絶
縁保謹膜上に一端部が接続され、他端部には磁気ギャッ
プが形成されるように下部磁性層と上部磁性層とを設け
、これら下部磁性層及び上部磁性層間にコイル導体を設
けた薄膜磁気ヘッドに関する。
[Industrial Application Field] An insulating protective film is formed on a conductive slider substrate, and a lower magnetic layer is connected to the insulating protective film at one end and a magnetic gap is formed at the other end. The present invention relates to a thin film magnetic head having a coil conductor between the lower magnetic layer and the upper magnetic layer.

近年、磁気ディスク装置においては、記憶容量の増大が
要望されている。記憶容量を増大させるための一手段と
して、線記録密度を上げることがなされている。線記録
密度の向上のためには、高保磁力媒体とこの媒体を十分
に磁化できる高飽和磁束密度の磁気ヘッドの一つである
薄膜磁気ヘッドが必要となっている。
In recent years, there has been a demand for increased storage capacity in magnetic disk devices. One way to increase storage capacity is to increase linear recording density. In order to improve the linear recording density, a high coercive force medium and a thin film magnetic head, which is a type of magnetic head with a high saturation magnetic flux density that can sufficiently magnetize the medium, are required.

[従来の技術] 第5図は薄膜磁気ヘッドの一例を示す平面図、第6図は
第5図におけるA−A断面図である。
[Prior Art] FIG. 5 is a plan view showing an example of a thin film magnetic head, and FIG. 6 is a sectional view taken along line AA in FIG.

まず、これらの図を用いてマイクロフォトリソグラフィ
で作られる薄膜磁気ヘッドの構造を説明する。図におい
て、1はスライダ基板である。このスライダ基板1は、
一般に非磁性かつ導電性の材料であるアルチック(Af
f 2 03 T i C)が使用される。2はスライ
ダ基板1上に形成された絶縁保護膜、3,4は絶縁保護
膜2上に設けられ、一端部(基端部)Sが接続され、他
端部(先端部)には磁気ギャップGが形成されたバーマ
ロイの下部磁性層及び上部磁性層である。下部磁性層3
上には磁気ギャップGを充填するように非磁性のギャッ
プ層5が形成されている。このギャップ層5上には絶縁
保護膜6が形成され、この絶縁保護膜6上にはスパイラ
ル状にパターン化されたコイル導体7が設けられている
。そして、下部磁性層3及び上部磁性層4の残りの空間
には絶縁保護膜8で充填されている。9は磁気記録媒体
で、この磁気記録媒体9は第6図において、矢印方向に
移動する。
First, the structure of a thin film magnetic head made by microphotolithography will be explained using these figures. In the figure, 1 is a slider substrate. This slider board 1 is
Artic (Af) is generally a non-magnetic and conductive material.
f 2 03 T i C) is used. 2 is an insulating protective film formed on the slider substrate 1, 3 and 4 are provided on the insulating protective film 2, one end (base end) S is connected, and the other end (tip) is connected to a magnetic gap. These are the lower magnetic layer and the upper magnetic layer of Vermalloy in which G is formed. Lower magnetic layer 3
A nonmagnetic gap layer 5 is formed thereon to fill the magnetic gap G. An insulating protective film 6 is formed on this gap layer 5, and a spirally patterned coil conductor 7 is provided on this insulating protective film 6. The remaining space between the lower magnetic layer 3 and the upper magnetic layer 4 is filled with an insulating protective film 8. 9 is a magnetic recording medium, and this magnetic recording medium 9 moves in the direction of the arrow in FIG.

そして、ギャップGに発生する磁界によって、記録/再
生がなされる。
Then, recording/reproduction is performed by the magnetic field generated in the gap G.

[発明が解決しようとする課題] しかし、上記構或の従来例における薄膜磁気ヘッドにお
いては、スライダ基板1とコイル導体7との間は、絶縁
保護膜層2,6を用いて絶縁されている。
[Problems to be Solved by the Invention] However, in the conventional thin film magnetic head having the above structure, the slider substrate 1 and the coil conductor 7 are insulated using the insulating protective film layers 2 and 6. .

また、このような薄膜磁気ヘッドは、端部が被覆されて
いないリード線が取り付けられた状態で、製造後、直ち
に磁気ディスク装置に組込まれず、使用される迄の間、
プラスチック性のケース等に収納され、倉庫等に運搬さ
れて格納される。
In addition, such thin-film magnetic heads are not assembled into magnetic disk drives immediately after manufacture, with lead wires with uncoated ends attached, and are not assembled into magnetic disk drives until they are used.
It is stored in a plastic case, etc., and is transported and stored in a warehouse or the like.

このような従来の薄膜磁気ヘッドにおいては、プラスチ
ック性のケースから取出した時に上部磁性層4の先端部
とこの先端部に最も近いスライダ基板1にリークによる
と考えられる材料の破壊が発生していることがあった。
In such a conventional thin film magnetic head, when taken out from the plastic case, material destruction occurs at the tip of the upper magnetic layer 4 and the slider substrate 1 closest to this tip, which is thought to be due to leakage. Something happened.

このような破壊の生じた薄膜磁気ヘッドはバーマロイよ
り成る上部性層4の特性が劣化し、また、スライダ基板
l側に生起された凹凸面,黒焦げ部から発生する微粒子
の作用によりヘッドクラッシュが発生することがあった
In a thin-film magnetic head with such damage, the properties of the upper layer 4 made of vermalloy deteriorate, and head crashes occur due to the action of fine particles generated from the uneven surface and charred portions on the slider substrate l side. I had something to do.

本発明は、上記問題点に鑑みてなされたもので、その目
的は、上部磁性層及びスライダ基板の破壊を防止しうる
薄膜磁気ヘッドを提供することにある。
The present invention has been made in view of the above problems, and an object thereof is to provide a thin film magnetic head that can prevent the upper magnetic layer and the slider substrate from being destroyed.

[課題を解決するための手段] 第1図は本発明の原理図であり、(a)は一部破断した
平面図、(b)は(a)におけるB−B断面図、(C)
は(b)におけるC−C断而図である。図において、1
1は非磁性かつ導電性のスライダ基板、12はスライダ
基板11上に形成された絶縁保護膜である。13.14
はこの絶縁保護膜12上に一端部が接続され、他端部に
は磁気ギャップGが形成されるように設けられた下部磁
性層と上部磁性層である。15はこれら下部磁性層13
及び上部磁性層14間に設けられたコイル導体である。
[Means for Solving the Problems] Fig. 1 is a diagram showing the principle of the present invention, in which (a) is a partially broken plan view, (b) is a BB sectional view in (a), and (C) is a partially broken plan view.
is a C-C diagram in (b). In the figure, 1
1 is a nonmagnetic and conductive slider substrate; 12 is an insulating protective film formed on the slider substrate 11; 13.14
are a lower magnetic layer and an upper magnetic layer which are connected at one end to the insulating protective film 12 and are provided so that a magnetic gap G is formed at the other end. 15 are these lower magnetic layers 13
and a coil conductor provided between the upper magnetic layer 14.

そして、(C)に示すように、コイル導体15とスライ
ダ基板11とは導通せしめられている。
As shown in (C), the coil conductor 15 and the slider substrate 11 are electrically connected.

[作用] 第1図に示す薄膜磁気ヘッドおいて、コイル導体15と
スライダ基板11とは導通しているので、コイル導体1
5とスライダ基板11との電位は常に等しい。
[Function] In the thin film magnetic head shown in FIG. 1, since the coil conductor 15 and the slider substrate 11 are electrically connected, the coil conductor 1
5 and the slider substrate 11 are always at the same potential.

すなわち、本出願人が上部磁性層14の先端部とこの先
端部に近いスライダ基板11の材料の破壊が生じる原因
を調査した結果、以下のことがi11った。
That is, as a result of the applicant's investigation into the cause of destruction of the material of the tip of the upper magnetic layer 14 and the material of the slider substrate 11 near the tip, the following was found i11.

つまり、薄膜磁気ヘッドが収納されるプラスチック性の
ケースは、運搬時の振動により、摩擦による静電気を帯
びる。
In other words, the plastic case in which the thin-film magnetic head is housed is charged with static electricity due to friction due to vibration during transportation.

この静電気の帯びている部分に薄膜磁気ヘッドのリード
線が触れると、コイル導体に静電気による高電圧が加わ
る。
When a lead wire of a thin-film magnetic head touches a portion charged with static electricity, a high voltage is applied to the coil conductor due to the static electricity.

この時、コイル導体15と上部磁性層14との間は絶縁
保護膜が介在しているので、コイル導体15に高電圧が
加わった時にコンデンサの作用と同様に上部磁性層4に
逆電荷が生起すると考えられる。
At this time, since an insulating protective film is interposed between the coil conductor 15 and the upper magnetic layer 14, when a high voltage is applied to the coil conductor 15, a reverse charge is generated in the upper magnetic layer 4, similar to the action of a capacitor. It is thought that then.

そして、この上部磁性層14に帯びた逆電荷は、上部磁
性層14に比し充分に大きな導電性のスライダ基板11
が見掛け上グランドとなり、スライダ基板11にリーク
したものと考えられる。
The reverse charge on the upper magnetic layer 14 is caused by the slider substrate 11 having a sufficiently large conductivity compared to the upper magnetic layer 14.
It is considered that the ground apparently became a ground and leaked to the slider substrate 11.

このため、本発明では、スライダ基板11とコイル導体
15とを導通することにより、スライダ基板11全体に
電圧が作用し、上部磁性層14に逆電荷を帯びないよう
にしたものである。
Therefore, in the present invention, the slider substrate 11 and the coil conductor 15 are electrically connected so that a voltage acts on the entire slider substrate 11 and the upper magnetic layer 14 is not charged with a reverse charge.

[実施例] 次に、図面を用いて本発明の一実施例を説明する。第2
図は本発明の一実施例の薄膜磁気ヘッドを示す平面図、
第3図は第2図におけるD−D断面図、第4図は第2図
におけるE−E断面図である。
[Example] Next, an example of the present invention will be described using the drawings. Second
The figure is a plan view showing a thin film magnetic head according to an embodiment of the present invention.
3 is a sectional view taken along the line DD in FIG. 2, and FIG. 4 is a sectional view taken along the line EE in FIG.

これらの図において、21はスライダ基板である。この
スライダ基板21は、一般に非磁性かつ導電性の材料で
あるアルチック (AN 2 0s T i C)が使用される。22は
スライダ基板21上に形成された絶縁保護膜、23.2
4は絶縁保謹膜22上に設けられ、一端部(基端部)S
が接続され、他端部(先端部)には磁気ギャップGが形
成されたパーマロイの下部磁性層及び上部磁性層である
。下部磁性層23上には磁気ギャップGを充填するよう
に非磁性のギャップ層25が形成されている。このギャ
ップ層25上には絶縁保護膜26が形成され、この絶縁
保護膜26上にはスバイラル状にパターン化されたコイ
ル導体27が設けられている。そして、下部磁性層23
及び上部磁性層24の残りの空間には絶縁保護膜28で
充填されている。29は磁気記録媒体で、この磁気記録
媒体29は第3図において、矢印方向に移動する。
In these figures, 21 is a slider substrate. The slider substrate 21 is generally made of AlTiC (AN 20s TiC), which is a non-magnetic and conductive material. 22 is an insulating protective film formed on the slider substrate 21, 23.2
4 is provided on the insulation protection film 22, and one end (base end) S
are connected to each other, and a permalloy lower magnetic layer and an upper magnetic layer are formed with a magnetic gap G at the other end (tip end). A nonmagnetic gap layer 25 is formed on the lower magnetic layer 23 so as to fill the magnetic gap G. An insulating protective film 26 is formed on this gap layer 25, and a spirally patterned coil conductor 27 is provided on this insulating protective film 26. And the lower magnetic layer 23
The remaining space of the upper magnetic layer 24 is filled with an insulating protective film 28. 29 is a magnetic recording medium, and this magnetic recording medium 29 moves in the direction of the arrow in FIG.

本実施例においては、スライダ基板21は長さ4mm,
幅3,2mm,高さ0.85mmであるが上部磁性層2
4は幅及び長さが0.15mm,厚みが0.005mm
であり、上部磁性層24の体積に対しスライダ基板21
の体積が充分に大きい。
In this embodiment, the slider substrate 21 has a length of 4 mm,
Although the width is 3.2 mm and the height is 0.85 mm, the upper magnetic layer 2
4 has a width and length of 0.15mm and a thickness of 0.005mm
The slider substrate 21 has a volume of the upper magnetic layer 24.
The volume of is large enough.

更に、コイル導体27の一方の端子部は第4図に示すよ
うに、スライダ基板21に接触し、導通がなされている
。また、このスライダ基板21は磁気ディスク装置の揺
動型へッドアームに絶縁性の接着剤等を用いることによ
り、ヘッドアームとは絶縁状態で取り付けられる。これ
により、記録/再生時にコイル導体に流れるべき電流が
スライダ基板21を介してヘッドアーム等の接地された
部材に流れ込まないようにしている。
Furthermore, as shown in FIG. 4, one terminal portion of the coil conductor 27 is in contact with the slider substrate 21 to establish electrical continuity. Further, the slider substrate 21 is attached to the swing type head arm of the magnetic disk device in an insulated state from the head arm by using an insulating adhesive or the like. This prevents the current that should flow through the coil conductor during recording/reproduction from flowing into a grounded member such as the head arm via the slider substrate 21.

そして、ギャップGに発生する磁界によって、記録媒体
2つに対して記録/再生がなされる。
Then, by the magnetic field generated in the gap G, recording/reproduction is performed on the two recording media.

上記構成によれば、コイル導体27とスライダ基板21
との電位は常に等しくなる。よって、運搬時等における
薄膜磁気ヘッドの上部磁性層24とスライダ基板21の
材料の破壊を防止することができる。
According to the above configuration, the coil conductor 27 and the slider board 21
The potentials are always equal. Therefore, it is possible to prevent the materials of the upper magnetic layer 24 and slider substrate 21 of the thin film magnetic head from being destroyed during transportation or the like.

[発明の効果] 以上説明したように本発明によれば、コイル導体とスラ
イダ基板とを導通させるように構成したことにより、コ
イル導体とスライダ基板との電位が等しくなり、薄膜磁
気ヘッドの材料の破壊を防止しうる薄膜磁気ヘッドを実
現できる。
[Effects of the Invention] As explained above, according to the present invention, since the coil conductor and the slider substrate are configured to be electrically connected, the potentials of the coil conductor and the slider substrate are equalized, and the material of the thin film magnetic head is A thin film magnetic head that can prevent damage can be realized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理図、 第2図は本発明の一実施例の薄膜磁気ヘッドを示す平面
図、 第3図は第2図におけるD−D断面図、第4図は第2図
におけるE−E断面図、第5図は薄膜磁気ヘッドの一例
を示す平面図、第6図は第5図におけるA−A断面図で
ある。 第1図乃至第4図において、 II−;21はスライダ基板、 12, 13, 14, 15, 22は絶縁保護膜、 23は下部磁性層、 24は上部磁性層、 25はコイル導体である。
FIG. 1 is a diagram of the principle of the present invention, FIG. 2 is a plan view showing a thin film magnetic head according to an embodiment of the present invention, FIG. 3 is a sectional view taken along line DD in FIG. 2, and FIG. 5 is a plan view showing an example of a thin film magnetic head, and FIG. 6 is a sectional view taken along A-A in FIG. 1 to 4, II-; 21 is a slider substrate; 12, 13, 14, 15, and 22 are insulating protective films; 23 is a lower magnetic layer; 24 is an upper magnetic layer; and 25 is a coil conductor.

Claims (1)

【特許請求の範囲】 導電性のスライダ基板(11)上に絶縁保護膜(12)
を形成し、この絶縁保護膜(12)上に一端部が接続さ
れ、他端部には磁気ギャップ(G)が形成されるように
下部磁性層(13)と上部磁性層(14)とを設け、こ
れら下部磁性層(13)及び上部磁性層(14)間にコ
イル導体(15)を設けた薄膜磁気ヘッドにおいて、 前記コイル導体(15)と前記スライダ基板(11)と
を導通させたことを特徴とする薄膜磁気ヘッド。
[Claims] An insulating protective film (12) on a conductive slider substrate (11).
A lower magnetic layer (13) and an upper magnetic layer (14) are formed such that one end is connected to the insulating protective film (12) and a magnetic gap (G) is formed at the other end. In a thin film magnetic head in which a coil conductor (15) is provided between the lower magnetic layer (13) and the upper magnetic layer (14), the coil conductor (15) and the slider substrate (11) are electrically connected. A thin film magnetic head featuring:
JP24132089A 1989-09-18 1989-09-18 Thin film magnetic head Pending JPH03104009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24132089A JPH03104009A (en) 1989-09-18 1989-09-18 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24132089A JPH03104009A (en) 1989-09-18 1989-09-18 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH03104009A true JPH03104009A (en) 1991-05-01

Family

ID=17072542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24132089A Pending JPH03104009A (en) 1989-09-18 1989-09-18 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH03104009A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546929A (en) * 1991-08-13 1993-02-26 Tdk Corp Thin film magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546929A (en) * 1991-08-13 1993-02-26 Tdk Corp Thin film magnetic head

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