JPH03103716A - Position detector - Google Patents
Position detectorInfo
- Publication number
- JPH03103716A JPH03103716A JP24275589A JP24275589A JPH03103716A JP H03103716 A JPH03103716 A JP H03103716A JP 24275589 A JP24275589 A JP 24275589A JP 24275589 A JP24275589 A JP 24275589A JP H03103716 A JPH03103716 A JP H03103716A
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- Prior art keywords
- signals
- phase
- instantaneous
- moving body
- signal
- Prior art date
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- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 230000000737 periodic effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は位置検出装置に関するものであり、特にアブソ
リュート型位置検出装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a position detection device, and particularly to an absolute type position detection device.
(従来の技術)
例えば磁気式回転位置検出装置の一例を第6図に示して
説明する。ギア形状の透磁材で成るギア円板2と、外周
に1ケ所のみ切欠部3Aを有する透磁材で成る円板のZ
相円板3とが被検出体の回転体1に取付けられ、ギア円
板2の近傍に磁石を有した磁気センサ4a,4bが配置
されると共に、Z相円板3の近傍にも磁石を有した磁気
センサ5が配置されている.磁気センサ4a及び4bは
、センサ素子間がギア円板2のギアl歯の174の距離
になるように配置されているので、その出力は第7図(
A)に示すように、90°の位相差を有する2相の交流
信号Vsinθ及びVcosθとなる。また、磁気セン
サ5からの出力信号は第7図(B)に示すように、ギア
円板2の特定の歯の位置を1回転内の原点として識別す
るためのZ相信号P2となり、切欠部3Aに対応した変
化部P2゜を有している。そして、2相交流{g号Vs
inθ及びVcosθは、それぞれサンプルホールド回
路6a,6b及びA/D変換器7a,7bで成る瞬時信
号検出部l1においてディジタル変換された瞬時侶号S
8及びSeとなり、この瞬時信号S8及びSeが下位桁
信号検出部l2において除算された後、逆三角関数変換
?れることにより、ギアlm内の位置θである下位桁信
号S0が求められる。(Prior Art) For example, an example of a magnetic rotational position detection device will be described with reference to FIG. Z of the gear disk 2 made of a gear-shaped magnetically permeable material and the disk made of a magnetically permeable material having only one notch 3A on the outer periphery.
A phase disk 3 is attached to the rotating body 1 of the object to be detected, and magnetic sensors 4a and 4b having magnets are arranged near the gear disk 2, and magnets are also arranged near the Z-phase disk 3. A magnetic sensor 5 with a magnetic sensor 5 is arranged. The magnetic sensors 4a and 4b are arranged so that the distance between the sensor elements is 174 of the gear l tooth of the gear disk 2, so the output thereof is as shown in FIG.
As shown in A), two-phase alternating current signals Vsinθ and Vcosθ having a phase difference of 90° are obtained. Further, as shown in FIG. 7(B), the output signal from the magnetic sensor 5 becomes a Z-phase signal P2 for identifying the position of a specific tooth of the gear disk 2 as the origin within one rotation, and It has a changing part P2° corresponding to 3A. Then, two-phase alternating current {g Vs
inθ and Vcosθ are the instantaneous signal S which is digitally converted in the instantaneous signal detection section l1 consisting of sample and hold circuits 6a and 6b and A/D converters 7a and 7b, respectively.
8 and Se, and after these instantaneous signals S8 and Se are divided in the lower digit signal detection unit l2, an inverse trigonometric function transformation ? As a result, the lower digit signal S0, which is the position θ within the gear lm, is obtained.
一方、上位桁信号検出部13では、2相交流信号Vsi
nθ及びVcosθを比較器8a及び8bによりパルス
信号P.及びP,とすると共に、原点位置を表わすZ相
信号P■からパルス信号Pa及びP,のバルス数をバル
スカウンタ9により計数し、原点位置からのギアの歯数
に相当する上位桁信号Snを出力する。加算器10は、
この上位桁信号Snと下位桁{g号検出部12からの下
位桁信号S.とを加算し、その加算結果を位置信号S,
として出力し、移動体(回転体1)の位置を検出するよ
うになっている。On the other hand, in the upper digit signal detection section 13, the two-phase AC signal Vsi
nθ and Vcosθ are converted into pulse signals P. by comparators 8a and 8b. and P, and the number of pulses of the pulse signals Pa and P from the Z-phase signal P representing the home position is counted by the pulse counter 9, and the upper digit signal Sn corresponding to the number of teeth of the gear from the home position is obtained. Output. The adder 10 is
The upper digit signal Sn and the lower digit signal S. and add the addition result to the position signal S,
The position of the moving body (rotating body 1) is detected.
(発明が解決しようとする課題)
従来の装置では、上述の如くZ相円板3の切欠部3八を
原点として、この原点からのギアの歯数であるパルス信
号P2及びPbを計数することにより1回転内の絶対位
置としているため、絶対位置として位置{3号が確定す
るには、一度Z相円板3の切欠部3^である原点を通過
する必要があり、電源投入直後においては、移動体の絶
対位置が確定しないという問題点があった。(Problem to be Solved by the Invention) In the conventional device, as described above, the notch 38 of the Z-phase disk 3 is used as the origin, and the pulse signals P2 and Pb, which are the number of teeth of the gear, from this origin are counted. Since the absolute position within one rotation is determined by However, there was a problem in that the absolute position of the moving body was not determined.
本発明は上述のような事情よりなされたものであり、本
発明の目的は、1回転内で常に絶対位置を検出できるよ
うにした位置検出装置を提供することにある。The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a position detection device that can always detect an absolute position within one rotation.
(課題を解決するための手段)
本発明は上述の問題点を解決するためになされたもので
あり、本発明によれば、移動体の移動距離に応じた周期
的な波形を有し、かつ互いに所定の位相差を有する2相
交流信号の振幅が移動体の位置により異なるようにし、
この振幅の2乗値である2相交流信号の瞬時値の2乗和
と移動体の位置との関係に基づいて移動体の絶対位置を
検出することができる位置検出装置が提供される。(Means for Solving the Problems) The present invention has been made to solve the above-mentioned problems. The amplitude of the two-phase AC signals having a predetermined phase difference from each other is made to vary depending on the position of the moving body,
A position detection device is provided that can detect the absolute position of a moving object based on the relationship between the sum of squares of the instantaneous values of the two-phase AC signal, which is the square value of the amplitude, and the position of the moving object.
すなわち、本発明は、移動体の移iIJ距離に応じた周
期的な波形を有し、かつ互いに所定位相差を有する2相
の交流信号に基づいて前記移動体の位置を検出する位置
検出装置に関するもので、本発明の上記目的は、前記移
動体の位置に応じた異なる振幅の2相交流信号を出力す
るセンサ部と、前記2相交流信号の瞬時値を検出する瞬
時信号検出部と、瞬時信号の2乗和の演算を行なう演算
手段と、前記2乗和と前記移動体の位置との関係に基づ
いて前記移動体の位置を検出する検出手段とを設けるこ
とによって達成される。That is, the present invention relates to a position detection device that detects the position of a moving body based on two-phase AC signals having a periodic waveform corresponding to the distance traveled by the moving body and having a predetermined phase difference from each other. The above objects of the present invention include: a sensor section that outputs two-phase AC signals with different amplitudes depending on the position of the moving object; an instantaneous signal detection section that detects the instantaneous value of the two-phase AC signal; This is achieved by providing a calculating means for calculating the sum of squares of the signals, and a detecting means for detecting the position of the moving object based on the relationship between the sum of squares and the position of the moving object.
(作用)
本発明では、センサ部から、移動体の位置Pにより振幅
が異なる2相交流信号Vtprsinθ及びV (pl
cosθを出力する。そして、この2相交流信号の瞬
時値の2乗和
fV cp)sjnθ) ” (V .p)COSθ
) 2−V tp+ ・=’ (2)は、位置P
のみの関数であるので、2乗和v tp+と位置Pとの
関係を利用して移動体の位@Pをアブソリュートで検出
する。(Function) In the present invention, two-phase AC signals Vtprsinθ and V(pl
Output cosθ. Then, the sum of squares of the instantaneous values of this two-phase AC signal fV cp)sjnθ) ” (V .p)COSθ
) 2-V tp+ ・=' (2) is the position P
Therefore, the position @P of the moving object is detected in absolute terms using the relationship between the sum of squares v tp+ and the position P.
(実施例) 本発明の実施例について添付図を参照して説明する。(Example) Embodiments of the present invention will be described with reference to the accompanying drawings.
第1図に本発明の位置検出装置を第5図に対応させて示
す。回転体1に取付けられる本発明のギア円板102は
特殊ギア形状のものとなっており、磁気センサ4a及び
4bは従来と同様に90゜の位相差を有する2相交流信
号Vsjno及びVcosθを出力する。しかし、本発
明では移動体の位置により2相交流信号Vsinθ及び
Vcosθの振幅を変えるために、ギア円板102のギ
ア形状を第1図に示すように各ギアの歯の歯高を全て異
なるようにして、磁気センサ4a及び4b面からギア円
板102の歯の端面までの距離、いわゆるギャップ長を
位置により異ならせている。したがって、磁気セ:ノサ
4a及び4bからの出力信号は、第2図に示すように位
置Pに対して漸減すルv.P,Sinθ及びV tp+
COSθとなる。各ギア歯の歯高は、本実施例では上
記振幅V IP+がギャップ長に対しほぼ直線的に変化
するとみなせる範囲内なので、基準となる歯(歯高11
, )からn(≧2)番目の歯の歯高IllをHo−
11+ − n−J ・・”” (
3)(Aは定数)
になるようにしている。FIG. 1 shows a position detection device of the present invention in correspondence with FIG. The gear disk 102 of the present invention attached to the rotating body 1 has a special gear shape, and the magnetic sensors 4a and 4b output two-phase AC signals Vsjno and Vcosθ having a phase difference of 90° as in the conventional case. do. However, in the present invention, in order to change the amplitudes of the two-phase AC signals Vsinθ and Vcosθ depending on the position of the moving body, the gear shape of the gear disc 102 is changed so that the tooth heights of the teeth of each gear are all different as shown in FIG. The distance from the surfaces of the magnetic sensors 4a and 4b to the end surface of the teeth of the gear disc 102, the so-called gap length, is made different depending on the position. Therefore, the output signals from the magnetic sensors 4a and 4b gradually decrease with respect to the position P as shown in FIG. P, Sinθ and V tp+
It becomes COSθ. In this embodiment, the tooth height of each gear tooth is within a range in which the amplitude VIP+ can be considered to change approximately linearly with respect to the gap length,
, ) to the n (≧2)th tooth height Ill as Ho−
11+ − n−J ・・”” (
3) (A is a constant).
また、瞬時信号検出部1lは従来と同様にサンプルホー
ルド回路6a,6b及び^/D変換器7a,7bで成り
、上記2相交流信号V fpl SjQθ及びv tp
+ cosθをディジタル変換したデイジタルの瞬時信
号S,及びScを出力する。そして、下位桁信号検出部
l2も従来と同様に、瞬時信号S,及びScを除算して
から逆三角関数変換
を行ない、ギア1歯内の位置θである下位桁信号S0を
出力する。一方、上位桁信号検出部14内の演算回路1
41は前記瞬時信号Ss及びScよりS%+S%−
( V lplSjnθ)” ”(VIPICOS
θ)2=V IPI ・・・・・・
(5)の演算を行ない、データテーブル142として予
め記憶してある第3図に示すような位置P及びV IP
I ’の関係に基づいて、上記V IPI 2よりその
ときの1回転内絶対位置である上位桁信号Snabを出
力する。加算器lOは上述の如く求められた上位桁信号
Snahと下位桁信号S.とを加算し、位置侶号Spa
bを出力することにより、常に移動体(回転体1)の絶
対位置を検出することができる。Further, the instantaneous signal detection section 1l is composed of sample and hold circuits 6a, 6b and ^/D converters 7a, 7b as in the conventional case, and detects the two-phase AC signals V fpl SjQθ and v tp.
Digital instantaneous signals S and Sc obtained by digitally converting + cos θ are output. Similarly to the prior art, the lower digit signal detection section 12 also divides the instantaneous signals S and Sc, performs inverse trigonometric transformation, and outputs the lower digit signal S0, which is the position θ within the gear 1 tooth. On the other hand, the arithmetic circuit 1 in the upper digit signal detection section 14
41 is S%+S%- from the instantaneous signals Ss and Sc.
(V lplSjnθ)""(VIPICOS
θ)2=V IPI ・・・・・・
By performing the calculation in (5), the positions P and V IP as shown in FIG. 3 are stored in advance as the data table 142.
Based on the relationship of I', the V IPI 2 outputs the upper digit signal Snab, which is the absolute position within one revolution at that time. The adder IO receives the upper digit signal Snah and the lower digit signal S. Add and add the position number Spa
By outputting b, the absolute position of the moving body (rotating body 1) can always be detected.
第4図は本発明の他の実施例を部分的C示すものである
。FIG. 4 is a partial C view of another embodiment of the present invention.
第4図に示す如く移動体1に取付けてあるギア円板2は
第6図で説明した従来と同様のギア円板であるが、この
実施例ではギア円板2の中心と移動体lの回転中心をず
らして、いわゆる偏心した状態に取付けている。これに
より、磁気センサ4a及び4b面からギア円板2の歯ま
でのギャップ長は、偏心方向を対象軸として 180゜
内の各位置で異なるので、磁気センサ4a及び4bから
出力される2相交流信号V tpl sinθ及びV
(P) COSθの振幅の2乗値V +Pl ’ と位
置Pとの関係も第5図の如くなる。従って、この関係を
データテーブルとして求めておくことにより、前述の例
と同様の処理を行なえばl80゜内での絶対位置の検出
を行なうことができる。As shown in FIG. 4, the gear disk 2 attached to the moving body 1 is the same as the conventional gear disk explained in FIG. 6, but in this embodiment, the center of the gear disk 2 and the moving body 1 are It is mounted eccentrically, with its center of rotation shifted. As a result, the gap length from the surfaces of the magnetic sensors 4a and 4b to the teeth of the gear disk 2 differs at each position within 180° with the eccentric direction as the symmetrical axis, so the two-phase AC output from the magnetic sensors 4a and 4b Signal V tpl sin θ and V
(P) The relationship between the square value V + Pl' of the amplitude of COS θ and the position P is also as shown in FIG. Therefore, by determining this relationship as a data table, it is possible to detect the absolute position within 180 degrees by performing the same processing as in the above example.
また、第5図の関係がオフセット分を除けばほぼ正弦波
であることを考慮して、磁気センサ4a,4bと同じも
のを、この磁気センサに対し回転体中心を軸に90゜ず
れた位置に配置すること、もしくは2枚の同一ギア円板
を互いの偏心方向を90゜ずらずことにより、90’位
相の異なる2相の信号v <p+ 2を検出し、第1の
実施例の下位桁信号検出部12で行なっている処理と同
様にして1回転内の絶対位置を検出しても良い。In addition, considering that the relationship shown in Fig. 5 is almost a sine wave except for the offset, the same magnetic sensors 4a and 4b are placed at a position 90° shifted from the center of the rotating body with respect to the magnetic sensor. or by shifting the eccentric directions of two identical gear disks by 90 degrees, a two-phase signal v < p+ 2 with a 90' phase difference can be detected, and the lower order of the first embodiment can be detected. The absolute position within one rotation may be detected in the same manner as the processing performed by the digit signal detection section 12.
本発明は上述のようなギア式以外にも例えばドラム着磁
式、即ち回転体側のドラム面の磁性体に着磁を行ない、
その磁束を磁気センサて検出する場合にも適用できる。In addition to the above-mentioned gear type, the present invention also uses, for example, a drum magnetization type, in which the magnetic material on the drum surface on the rotating body side is magnetized.
It can also be applied to detecting the magnetic flux using a magnetic sensor.
この場合、前述のギャップ長を変化させる以外にも、こ
のドラム面の磁性体への着磁強度を位置により変化させ
れば、2相交流信号の振幅を変えることができるので、
前述の実施例と同様の方法により、回転体の絶対位置の
検出を行なうことが可能である。また、回転型以外の方
法、例えば直線移動型の場合においても、被検出体をセ
ンサ面に対して微小角度傾けて配置する等の方法により
、位置に対してギャップ長を変えることにより2相交流
信号の桑幅を変えたり、着磁式の場合は前述と同様に、
位置に対じ着磁強度を変えることにより2相交流信号の
振幅を変化させることで、移動体の絶対位置の検出を行
なうことができる。さらに、本発明は磁気式の位置検出
装置に限るものではなく、光学式等でも2相交流信号を
用いて位置検出を行なっているものにはi西用できる。In this case, in addition to changing the gap length mentioned above, the amplitude of the two-phase AC signal can be changed by changing the magnetization strength of the magnetic material on the drum surface depending on the position.
The absolute position of the rotating body can be detected by a method similar to that of the previous embodiment. In addition, even in the case of a method other than the rotation type, such as a linear movement type, two-phase AC can be used by changing the gap length with respect to the position by arranging the detected object at a slight angle with respect to the sensor surface. You can change the width of the signal, or in the case of a magnetized type, as described above,
By changing the amplitude of the two-phase AC signal by changing the magnetization strength with respect to the position, the absolute position of the moving object can be detected. Furthermore, the present invention is not limited to magnetic type position detection devices, but can also be applied to optical type or other types that perform position detection using two-phase AC signals.
(発明の効果)
以上のように、木発明によれば、位置Pと2相交流信号
の2乗和の関係に基づいて、常に絶対位置検出を行なう
ことができるので、位置検出の信頼性が向上する。(Effect of the invention) As described above, according to the invention, absolute position detection can be always performed based on the relationship between the position P and the sum of squares of the two-phase AC signal, so the reliability of position detection is improved. improves.
ホールト回路、7a,7b−・A/o変換器、8a,8
b ・−・比較器、9・・・パルスカウンタ、10・・
・加算器、11・・・瞬時信号検出部、12・・・下位
桁信号検出部、13j4・・・上位桁信号検出部。Halt circuit, 7a, 7b-・A/o converter, 8a, 8
b --- Comparator, 9... Pulse counter, 10...
Adder, 11... Instantaneous signal detection section, 12... Lower digit signal detection section, 13j4... Upper digit signal detection section.
第1図は本発明の一実施例である回転位置検出装置の構
成図、第2図はそのセンサ出力信号の一例を示す波形図
、第3図はセンサ出力信号の振幅の2乗値VfPl’と
位置Pとの関係例を示す図、第4図は木発明の他の実施
例を示す部分図、第5図はそのセンサ出力の波形図、第
6図は従来の位置検出装置の一例を示す構成図、第7図
はそのセンサ信号の波形図である。Fig. 1 is a block diagram of a rotational position detection device that is an embodiment of the present invention, Fig. 2 is a waveform diagram showing an example of the sensor output signal, and Fig. 3 is the square value of the amplitude of the sensor output signal VfPl' 4 is a partial diagram showing another embodiment of the wooden invention, FIG. 5 is a waveform diagram of the sensor output, and FIG. 6 is an example of a conventional position detection device. The configuration diagram shown in FIG. 7 is a waveform diagram of the sensor signal.
Claims (1)
つ互いに所定位相差を有する2相の交流信号に基づいて
前記移動体の位置を検出する位置検出装置において、前
記移動体の位置に応じた異なる振幅の2相交流信号を出
力するセンサ部と、前記2相交流信号の瞬時値を検出す
る瞬時信号検出部と、瞬時信号の2乗和の演算を行なう
演算手段と、前記2乗和と前記移動体の位置との関係に
基づいて前記移動体の位置を検出する検出手段とを具備
したことを特徴とする位置検出装置。1. In a position detection device that detects the position of the moving object based on two-phase AC signals having a periodic waveform corresponding to the moving distance of the moving object and having a predetermined phase difference from each other, a sensor unit that outputs two-phase AC signals with different amplitudes depending on the position; an instantaneous signal detection unit that detects the instantaneous value of the two-phase AC signal; a calculation unit that calculates the sum of squares of the instantaneous signals; A position detection device comprising: a detection means for detecting the position of the moving body based on the relationship between the sum of squares and the position of the moving body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24275589A JPH03103716A (en) | 1989-09-19 | 1989-09-19 | Position detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24275589A JPH03103716A (en) | 1989-09-19 | 1989-09-19 | Position detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03103716A true JPH03103716A (en) | 1991-04-30 |
Family
ID=17093786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24275589A Pending JPH03103716A (en) | 1989-09-19 | 1989-09-19 | Position detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03103716A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5893670A (en) * | 1997-08-28 | 1999-04-13 | International Business Machines Corporation | Gear with teeth of decreasing height for a printer |
US5988306A (en) * | 1997-08-29 | 1999-11-23 | Yazaki Industrial Chemical Co., Ltd. | Automatically guided vehicle |
FR2779519A1 (en) * | 1998-06-09 | 1999-12-10 | Suisse Electronique Microtech | INDUCTIVE MAGNETIC SENSOR WITH REFERENCE INDEX |
JP2010066203A (en) * | 2008-09-12 | 2010-03-25 | Mitsubishi Electric Corp | Position detector of movable part, and two-degree-of-freedom actuator |
JP2016004041A (en) * | 2014-06-12 | 2016-01-12 | 株式会社ミツトヨ | Absolute encoder scale having plates repeatedly arranged relative to varying recesses |
CN106029273A (en) * | 2014-03-20 | 2016-10-12 | 三菱重工工作机械株式会社 | Gear teeth phase calculation device, gear teeth phase calculation method, and gear teeth machining device |
JP2020071028A (en) * | 2018-10-29 | 2020-05-07 | 大銀微系統股▲分▼有限公司 | Grid encoder and grid encoder device |
-
1989
- 1989-09-19 JP JP24275589A patent/JPH03103716A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5893670A (en) * | 1997-08-28 | 1999-04-13 | International Business Machines Corporation | Gear with teeth of decreasing height for a printer |
US5971640A (en) * | 1997-08-28 | 1999-10-26 | International Business Machines Corporation | Method for cutting paper in a printer using a gear with a friction pad |
US5988306A (en) * | 1997-08-29 | 1999-11-23 | Yazaki Industrial Chemical Co., Ltd. | Automatically guided vehicle |
FR2779519A1 (en) * | 1998-06-09 | 1999-12-10 | Suisse Electronique Microtech | INDUCTIVE MAGNETIC SENSOR WITH REFERENCE INDEX |
EP0964225A1 (en) * | 1998-06-09 | 1999-12-15 | CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement | Inductive magnetic sensor with reference index |
JP2010066203A (en) * | 2008-09-12 | 2010-03-25 | Mitsubishi Electric Corp | Position detector of movable part, and two-degree-of-freedom actuator |
CN106029273A (en) * | 2014-03-20 | 2016-10-12 | 三菱重工工作机械株式会社 | Gear teeth phase calculation device, gear teeth phase calculation method, and gear teeth machining device |
CN106029273B (en) * | 2014-03-20 | 2018-04-24 | 三菱重工工作机械株式会社 | The phase calculation device of gear, the phase calculation method of gear and gear machining equipment |
JP2016004041A (en) * | 2014-06-12 | 2016-01-12 | 株式会社ミツトヨ | Absolute encoder scale having plates repeatedly arranged relative to varying recesses |
DE102015209288B4 (en) | 2014-06-12 | 2022-10-27 | Mitutoyo Corporation | Absolute locator scale with plates alternating with varying indentations |
JP2020071028A (en) * | 2018-10-29 | 2020-05-07 | 大銀微系統股▲分▼有限公司 | Grid encoder and grid encoder device |
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