JPH03102738U - - Google Patents
Info
- Publication number
- JPH03102738U JPH03102738U JP1990012165U JP1216590U JPH03102738U JP H03102738 U JPH03102738 U JP H03102738U JP 1990012165 U JP1990012165 U JP 1990012165U JP 1216590 U JP1216590 U JP 1216590U JP H03102738 U JPH03102738 U JP H03102738U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- semiconductor wafer
- spring
- similar
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990012165U JPH03102738U (enExample) | 1990-02-09 | 1990-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990012165U JPH03102738U (enExample) | 1990-02-09 | 1990-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03102738U true JPH03102738U (enExample) | 1991-10-25 |
Family
ID=31515655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990012165U Pending JPH03102738U (enExample) | 1990-02-09 | 1990-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03102738U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014507072A (ja) * | 2011-02-16 | 2014-03-20 | テックスチェム アドバンスド プロダクツ インコーポレイテッド スンディリアン ブルハド | １段階および２段階のウエハ緩衝材 |
-
1990
- 1990-02-09 JP JP1990012165U patent/JPH03102738U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014507072A (ja) * | 2011-02-16 | 2014-03-20 | テックスチェム アドバンスド プロダクツ インコーポレイテッド スンディリアン ブルハド | １段階および２段階のウエハ緩衝材 |