JPH03101848U - - Google Patents
Info
- Publication number
- JPH03101848U JPH03101848U JP1129790U JP1129790U JPH03101848U JP H03101848 U JPH03101848 U JP H03101848U JP 1129790 U JP1129790 U JP 1129790U JP 1129790 U JP1129790 U JP 1129790U JP H03101848 U JPH03101848 U JP H03101848U
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- arc chamber
- filament
- ion source
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1129790U JPH03101848U (ko) | 1990-02-06 | 1990-02-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1129790U JPH03101848U (ko) | 1990-02-06 | 1990-02-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03101848U true JPH03101848U (ko) | 1991-10-23 |
Family
ID=31514830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1129790U Pending JPH03101848U (ko) | 1990-02-06 | 1990-02-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03101848U (ko) |
-
1990
- 1990-02-06 JP JP1129790U patent/JPH03101848U/ja active Pending