JPH03101516U - - Google Patents

Info

Publication number

JPH03101516U

JPH03101516U JP969390U JP969390U JPH03101516U JP H03101516 U JPH03101516 U JP H03101516U JP 969390 U JP969390 U JP 969390U JP 969390 U JP969390 U JP 969390U JP H03101516 U JPH03101516 U JP H03101516U

Authority

JP

Japan

Prior art keywords

insulating film

integrated circuit

signal line

semiconductor integrated

electrode

Prior art date

1990-02-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000011229 interlayer Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010410 layer Substances 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 230000003071 parasitic effect Effects 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1