JPH03101191A - Method of filling via-hole - Google Patents

Method of filling via-hole

Info

Publication number
JPH03101191A
JPH03101191A JP23686989A JP23686989A JPH03101191A JP H03101191 A JPH03101191 A JP H03101191A JP 23686989 A JP23686989 A JP 23686989A JP 23686989 A JP23686989 A JP 23686989A JP H03101191 A JPH03101191 A JP H03101191A
Authority
JP
Japan
Prior art keywords
board
balls
solder material
brazing material
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23686989A
Other languages
Japanese (ja)
Inventor
Masanori Gotou
後藤 正伯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP23686989A priority Critical patent/JPH03101191A/en
Publication of JPH03101191A publication Critical patent/JPH03101191A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To fill via-holes with solder material securely by a method wherein the via-holes are formed in a ceramic board and solder material balls are positioned and pressed down and the board is heated and baked. CONSTITUTION:A number of small diameter via-holes 2 are formed in a board 1 and solder material balls 3 determined by the via-hole diameter and the via- hole depth are positioned. A flat plate 4 is positioned so as to press down the balls 3. It is recommended to use the flat plate 4 made of carbon system or ceramic system metal which is not wetted well with solder material and can sufficiently withstand a soldering temperature. The board 1 is heated and soldered in an N2 furnace or the like to melt the balls 3. A pressure is applied to the balls 3 by the self-weight of the flat plate 4 and the via-holes 2 are securely filled with solder material 3' without forming voids. The surface and rear of the board 1 are polished and wiring patterns are formed to complete a printed wiring board.

Description

【発明の詳細な説明】 〔概要〕 ビア充填方法に係り、特にロウ材にてセラミック系プリ
ント基板に形成された表裏接続用のビアを充填する方法
に関し、 ビア充填後、ビア内に空洞、へこみ等が発生せず、信軌
性の高いセラミック系プリント基板を製造することを目
的とし、 セラミック系プリント基板にビアを形成する工程と、該
ビアが形成された位置に球状ロウ材を位置決めする工程
と、該球状ロウ材を上面から加圧する工程と、該セラミ
ック系プリント基板を加熱・焼成する工程とにより構成
される。
[Detailed Description of the Invention] [Summary] This invention relates to a via filling method, in particular a method of filling vias for connecting the front and back sides formed on a ceramic printed circuit board with a brazing material, in which cavities or dents are formed in the vias after filling the vias. With the aim of manufacturing a ceramic printed circuit board with high reliability without the occurrence of such problems, the process includes a process of forming vias on a ceramic printed circuit board, and a process of positioning a spherical brazing material at the position where the via is formed. , a step of pressurizing the spherical brazing material from above, and a step of heating and firing the ceramic printed circuit board.

〔産業上の利用分野〕[Industrial application field]

本発明は、ビア充填方法に係り、特にロウ材にてセラミ
ック系プリント基板に形成された表裏接続用のとアを充
填する方法に関するものである。
The present invention relates to a via filling method, and more particularly to a method of filling vias for connecting the front and back sides formed on a ceramic printed circuit board with a brazing material.

近年、セラミック系プリント基板は熱伝導率が優れてい
る点や、多層化、高密度化設計が可能であることからそ
の用途が増えている。
In recent years, the use of ceramic printed circuit boards has been increasing because they have excellent thermal conductivity and can be designed with multiple layers and high density.

小型電子機器においては、単層型セラミック系プリント
基板がその適用に最も適しており、この単層型セラミッ
ク系プリント基板において高密度化を図ろうには基板の
両面に部品実装を行うことで達成されており、そのため
基板の表裏接続を行う必要がある。
Single-layer ceramic printed circuit boards are most suitable for use in small electronic devices, and high density can be achieved with single-layer ceramic printed circuit boards by mounting components on both sides of the board. Therefore, it is necessary to connect the front and back sides of the board.

、そのた、めには、ビアと呼ばれる孔を形成し、このビ
アを口゛つ材にて接続することが知られマいる。
For this purpose, it is known to form a hole called a via and connect this via with a spout.

一方、更に実装密度の高密度化の要求に伴い、このビア
の系も年々小さくなりつつあり、系が小さくとも確実に
そのビア内にロウ材を充填することが可能である方法の
開発が要求されている。
On the other hand, with the demand for higher packaging density, these via systems are becoming smaller year by year, and there is a need to develop a method that can reliably fill brazing material into the vias even if the system is small. has been done.

〔従来の技術〕[Conventional technology]

従来、かかるビアの充填方法としては、無電解+電解メ
ツキ等のメツキプロセスで構成する方法が知られている
が、この方法では液体の性質上、限界があるため、第2
図(a)、(b)に示される方法が用いられている。
Conventionally, as a method for filling such vias, a plating process such as electroless + electrolytic plating is known, but since this method has limitations due to the nature of the liquid,
The methods shown in Figures (a) and (b) are used.

この方法は、−船釣にスクリーン印刷方法と呼ばれ、そ
の要旨はビア22が形成されたセラミック系プリント基
板21に、スキージ等の治具を用いてロウ材、例えば導
体ペースト(銅粉)23を充填しくa)、その後窒素炉
等の加熱か中で加熱・ロウ材することで、かかる導体ペ
ースト(銅粉)23を熔融させ、ビア22内に充填して
いた。
This method is called a screen printing method, and its gist is that a ceramic printed circuit board 21 on which vias 22 are formed is coated with a soldering material, such as conductive paste (copper powder) 23, using a jig such as a squeegee. The conductor paste (copper powder) 23 is melted and filled into the via 22 by heating and brazing in a nitrogen furnace or the like.

〔本発明が解決しようとする課題〕[Problems to be solved by the present invention]

しかしながら従来の充填方法では、ビアの系が小さくな
るとビア内に導体ペーストが入り難く、一方、銅粉の場
合は、充填時に空気がビア内に入ると、第2図(b)の
如く、加熱・ロウ付後に空洞A、へこみBが発生し、基
板の信軌性を損なう問題があった。
However, in the conventional filling method, when the via system becomes small, it is difficult for the conductive paste to enter the via.On the other hand, in the case of copper powder, if air enters the via during filling, it may cause heating as shown in Figure 2 (b). - There was a problem that cavities A and dents B were formed after soldering, impairing the reliability of the board.

従って、本発明は、ビア充填後、ビア内に空洞。Therefore, the present invention eliminates cavities within the via after filling the via.

へこみ等が発生せず、信転性の高いセラミ・ンク系プリ
ント基板を製造することを目的とするものである。
The purpose is to manufacture a ceramic ink-based printed circuit board that is free from dents and has high reliability.

〔課題を解決するための手段] かかる目的は、セラミック系プリント基板にビアを形成
する工程と、 該ビアが形成された位置に球状ロウ材を位置決めする工
程と、 該球状ロウ材を上面から加圧する工程と、該セラミック
系プリント基板を加熱・焼成する工程とを有することを
特徴とするビア充填方法、により達成される。
[Means for Solving the Problems] This purpose includes a step of forming a via in a ceramic printed circuit board, a step of positioning a spherical brazing material at the position where the via is formed, and a step of processing the spherical brazing material from above. This is achieved by a via filling method characterized by comprising a step of pressing and a step of heating and firing the ceramic printed circuit board.

〔作用〕[Effect]

本発明においては上記のような方法を用いているので、
球状であるロウ材の表面張力および、かかるロウ材を上
面から加圧するため、ビア内に確実にロウ材が充填され
る。
Since the present invention uses the method described above,
Because of the surface tension of the spherical brazing material and because the brazing material is pressurized from above, the brazing material is reliably filled into the via.

〔実施例〕〔Example〕

以下、本発明の実施例を図面を用いて詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は、本発明の実施例を示す図であり、同図(a)
は、ロウ材ポールの位置決め工程同図(b)は、加圧工
程 同図(c)は、充填状態をそれぞれ示す。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG.
(b) shows the brazing material pole positioning process, and (c) shows the pressing process, and the filling state.

図において、1はセラミック系プリント基板(以下、基
板と略す)、2はビア、3はロウ材ボール、3°は溶融
したロウ材、4は平板をそれぞれ示す。
In the figure, 1 is a ceramic printed circuit board (hereinafter abbreviated as "substrate"), 2 is a via, 3 is a soldering material ball, 3° is a melted soldering material, and 4 is a flat plate.

尚、企図を通じて同一符号を付したものは同一対象物を
示す。
In addition, the same reference numerals throughout the plan indicate the same objects.

基板1にドリル等で小径のビア2を複数形成した後、第
1図(a)に示すように、そのビア2の位置に対応する
ように充填すると72の径の大小。
After forming a plurality of small-diameter vias 2 on the substrate 1 with a drill or the like, as shown in FIG.

深さによって決定された量を有するロウ材ボール3を位
置決めする。
A braze ball 3 having an amount determined by the depth is positioned.

この位置決めの方法としては、基板1の表面に多数のロ
ウ材ボール3を供給し、一方、基板1の背面にビア位置
と対応したマスク板を配置し、基板1の背面から真空吸
着する。その後、この基板1を反転させると、ビア2に
位置したロウ材ポール3は基板1の背面から吸着されて
いるため落下せず、他のロウ材ポール3は落下する。よ
って、ビア2にロウ材ボール3が1対1の関係に位置決
めが可能である。かかる方法を用いても若干ロウ材ボー
ル3がビア2に位置決めされない恐れもあるので、その
場合は作業者がピンセット等を用いて手作業で位置決め
されていないビア2にロウ材ボール3を供給するように
している。
As a method for this positioning, a large number of solder balls 3 are supplied to the surface of the substrate 1, and a mask plate corresponding to the via position is placed on the back surface of the substrate 1, and vacuum suction is performed from the back surface of the substrate 1. Thereafter, when the substrate 1 is turned over, the brazing material poles 3 located in the vias 2 are attracted from the back surface of the substrate 1 and do not fall, while the other brazing material poles 3 fall. Therefore, the brazing material balls 3 can be positioned in a one-to-one relationship with the vias 2. Even if such a method is used, there is a possibility that the brazing material balls 3 may not be positioned in the vias 2, so in that case, the operator uses tweezers or the like to manually feed the brazing material balls 3 to the vias 2 that have not been positioned. That's what I do.

次に同図(b)に示されるように、ロウ材ボール3を上
面から加圧するように平板4を位置決めする。
Next, as shown in FIG. 4B, the flat plate 4 is positioned so as to press the brazing material ball 3 from above.

この平板4はロウ材との濡れ性が悪く、且つ少なくとも
基板1をロウ材する際の温度に充分耐えうる耐熱性に優
れた、例えばカーボン系またはセラミック性の金属より
なる物体であることが望ましい。
This flat plate 4 is desirably an object made of carbon-based or ceramic metal, which has poor wettability with the brazing material and has excellent heat resistance that can withstand at least the temperature at which the substrate 1 is brazed. .

次に(b)の状態を保ったままで窒素炉等の加熱炉中で
加熱・ロウ材することで、かかるロウ材ボール3を溶融
する(同図(C))。
Next, while maintaining the state of (b), the solder ball 3 is melted by heating and brazing in a heating furnace such as a nitrogen furnace ((C) in the same figure).

ここで、本発明では、ロウ材ボール3の上面に配置した
平板4の自重により、ロウ材ボーク3は絶えず図中下方
向に圧力が働いている。よって、溶融したロウ材3゛が
ビア2内に充填されずに基板の表面上に逃げるといった
減少を軽減することかでき、ビア2内に気泡が介入され
ることを同様に軽減することができる。
Here, in the present invention, pressure is constantly exerted on the brazing material ball 3 in the downward direction in the figure due to the weight of the flat plate 4 disposed on the upper surface of the brazing material ball 3. Therefore, it is possible to reduce the problem that the melted brazing material 3 is not filled into the via 2 and escape onto the surface of the substrate, and it is also possible to reduce the occurrence of air bubbles entering the via 2. .

次に、基板1の平面化のため基板1の表裏両面研磨し、
且つ所定の肯定を用いて配線パターン等を形成すること
で1枚の基板1が製造される。
Next, both the front and back sides of the substrate 1 are polished to planarize the substrate 1,
One substrate 1 is manufactured by forming a wiring pattern and the like using a predetermined pattern.

〔発明の効果〕〔Effect of the invention〕

以上詳細に説明したように本発明においては、ロウ材ポ
ールを加圧・溶融させるため、小径ビアに良好なロウ材
充填を行うことができ、セラミック系プリント基板の信
頼性を向上させることができる。
As explained in detail above, in the present invention, since the brazing material pole is pressurized and melted, small-diameter vias can be filled with brazing material satisfactorily, and the reliability of ceramic printed circuit boards can be improved. .

ロウ材ボールを使用するので、ロウ材の量のコントロー
ルを行うことができる。
Since a brazing material ball is used, the amount of brazing material can be controlled.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の実施例を示す図であり、同図(a)
は、ロウ材ボールの位置決め工程同図(b)は、加圧工
程 同図(c)は、充填状態 第2図は、従来の充填方法を示す図であり、同図(a)
は、導体充填状態 同図(b)は、導体ロウ付状態をそれぞれ示す。 図において、 1は基板。 2はビア。 3はロウ材ポール。 4は平板。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG.
Figure 2 shows the brazing material ball positioning process, (b) shows the pressurizing process, Figure 2 (c) shows the filling state, and Figure 2 (a) shows the conventional filling method.
(b) shows a state in which the conductor is filled and a state in which the conductor is soldered. In the figure, 1 is the substrate. 2 is beer. 3 is a waxed wood pole. 4 is a flat plate.

Claims (1)

【特許請求の範囲】  セラミック系プリント基板(1)にビア(2)を形成
する工程と、 該ビア(2)が形成された位置に球状ロウ材(3)を位
置決めする工程と、 該球状ロウ材(3)を上面から加圧する工程と、該セラ
ミック系プリント基板(1)を加熱・焼成する工程と、 を有することを特徴とするビア充填方法。
[Claims] A step of forming a via (2) on a ceramic printed circuit board (1), a step of positioning a spherical solder material (3) at the position where the via (2) is formed, and a step of positioning the spherical solder material (3) at the position where the via (2) is formed. A via filling method comprising the steps of: pressurizing the material (3) from above; and heating and firing the ceramic printed circuit board (1).
JP23686989A 1989-09-14 1989-09-14 Method of filling via-hole Pending JPH03101191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23686989A JPH03101191A (en) 1989-09-14 1989-09-14 Method of filling via-hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23686989A JPH03101191A (en) 1989-09-14 1989-09-14 Method of filling via-hole

Publications (1)

Publication Number Publication Date
JPH03101191A true JPH03101191A (en) 1991-04-25

Family

ID=17007001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23686989A Pending JPH03101191A (en) 1989-09-14 1989-09-14 Method of filling via-hole

Country Status (1)

Country Link
JP (1) JPH03101191A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2709913A1 (en) * 1993-09-07 1995-03-17 Sagem Printed circuit board for vehicle dashboard.
US5454159A (en) * 1994-02-18 1995-10-03 Unisys Corporation Method of manufacturing I/O terminals on I/O pads
US5479703A (en) * 1992-12-23 1996-01-02 International Business Machines Corporation Method of making a printed circuit board or card
WO2002096170A1 (en) * 2001-05-23 2002-11-28 Pac Tech - Packaging Technologies Gmbh Method for producing a contact substrate, and corresponding contact substrate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5479703A (en) * 1992-12-23 1996-01-02 International Business Machines Corporation Method of making a printed circuit board or card
FR2709913A1 (en) * 1993-09-07 1995-03-17 Sagem Printed circuit board for vehicle dashboard.
US5454159A (en) * 1994-02-18 1995-10-03 Unisys Corporation Method of manufacturing I/O terminals on I/O pads
WO2002096170A1 (en) * 2001-05-23 2002-11-28 Pac Tech - Packaging Technologies Gmbh Method for producing a contact substrate, and corresponding contact substrate
US7049213B2 (en) 2001-05-23 2006-05-23 Pac Tech-Packaging Technologies Gmbh Method for producing a contact substrate and corresponding contact substrate

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