JPH0298807A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH0298807A
JPH0298807A JP24975288A JP24975288A JPH0298807A JP H0298807 A JPH0298807 A JP H0298807A JP 24975288 A JP24975288 A JP 24975288A JP 24975288 A JP24975288 A JP 24975288A JP H0298807 A JPH0298807 A JP H0298807A
Authority
JP
Japan
Prior art keywords
magnetic
elements
channel
film
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24975288A
Other languages
Japanese (ja)
Inventor
Yuji Kasanuki
有二 笠貫
Takayuki Yagi
隆行 八木
Kiyozumi Niitsuma
清純 新妻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP24975288A priority Critical patent/JPH0298807A/en
Publication of JPH0298807A publication Critical patent/JPH0298807A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/332Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using thin films

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Magnetic Variables (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To increase the output of one channel of the thin film magnetic head by adding outputs of plural quantum interference elements and fetching the result as the output of one channel. CONSTITUTION:Four superconductor rings which each have two Josephson junction parts (a), i.e. four DC driving type superconducting quantum interference elements(SQUID) elements are composed of upper superconductor films 5a-5d and lower superconducting materials 2a and 2b. Those four SQUID elements are provided with electrodes 6a-6c for fetching the detection voltage of signal magnetic flux out by applying bias currents. The four SQUID elements are connected in series through those electrodes 6a-6c and the detection output voltages of the four SQUID elements are put together by addition and fetched as the output voltage of one channel. Consequently, the output voltage which is four times as high as that when one SQUID element is provided for one channel is obtained and the output voltage is nearly of millivolt.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は磁気記録媒体に記録された磁気記録情報の再生
を行なう再生用薄II!ij tin気ヘッドに関し、
特に直流駆動型の超伝導量子干渉素子(以後5QUID
素子と呼ぶ)を利用した再生用の薄膜磁気ヘッドに関す
るものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a reproducing thin II! for reproducing magnetically recorded information recorded on a magnetic recording medium. Regarding the ij tin ki head,
In particular, a DC-driven superconducting quantum interference device (hereinafter referred to as 5QUID)
This invention relates to a thin film magnetic head for reproduction that utilizes a thin film magnetic head (referred to as an element).

[従来の技術] 近年、6n気記録再生装置は記録の大容量化、高密度化
の一途をたどっており、そのために種々の開発が行なわ
れて来た。薄@磁気ヘッドはそのような開発の代表例で
ある。従来の薄膜磁気ヘッドは一般的には誘導型であり
、基板上に磁気回路を構成する磁気ヨーク、コイル、及
び引き出し電極等を薄膜堆積法とフォトリソグラフィに
より薄膜として形成して構成されている。このような薄
膜磁気ヘッドによれば記録再生素子全体を極めて小さく
構成でき磁気ギャップのトラック幅をきわめて小さくす
ることができることなどにより、記録の高密度化が図れ
る。
[Prior Art] In recent years, 6N recording and reproducing devices have been steadily increasing their recording capacity and density, and various developments have been made for this purpose. Thin@magnetic heads are a typical example of such a development. Conventional thin-film magnetic heads are generally of the induction type, and are constructed by forming a magnetic yoke, a coil, an extraction electrode, and the like constituting a magnetic circuit on a substrate as a thin film using a thin-film deposition method and photolithography. According to such a thin film magnetic head, the entire recording/reproducing element can be made extremely small, and the track width of the magnetic gap can be made extremely small, so that high density recording can be achieved.

[発明が解決しようとする課題] しかしながら近年の記録の大容量化、高密度化への要望
はとどまる所を知らず、更なる大容量化、高密度化が望
まれている。これに対して従来の誘導型の薄@磁気ヘッ
ドでは再生感度が記録の高密度化に対する障害になって
いる。即ち記録の高密度化に伴なって、記録波長が短か
くなるにつれて、記録は行なえても充分なS/N比で信
号磁束を検出できず、再生を行なうことができない。
[Problems to be Solved by the Invention] However, in recent years, there has been an unstoppable demand for higher capacity and higher recording density, and even higher capacity and higher density are desired. On the other hand, in the conventional inductive type thin@magnetic head, the reproduction sensitivity is an obstacle to increasing the recording density. That is, as the recording wavelength becomes shorter as the density of recording increases, even if recording is possible, signal magnetic flux cannot be detected with a sufficient S/N ratio and reproduction cannot be performed.

そこで本出願人は先に特願昭63−25442号により
直流駆動型のSQU I D素子を利用した再生用薄膜
磁気ヘッドを提案した。その構造は第3図に示すように
なっている。
Therefore, the present applicant previously proposed a reproduction thin film magnetic head using a DC-driven SQUID element in Japanese Patent Application No. 63-25442. Its structure is shown in FIG.

第3図において符号1は高透磁率磁性材からなる磁性基
板である。磁性基板1において図中左手前側の端面が再
生時に不図示の磁気記録媒体に平行に対向させられる。
In FIG. 3, reference numeral 1 denotes a magnetic substrate made of a high permeability magnetic material. The end surface of the magnetic substrate 1 on the front left side in the figure is opposed in parallel to a magnetic recording medium (not shown) during reproduction.

1iil性基板1において磁気記録媒体に対向する側縁
に沿って溝1aが形成されており、この満1a内には下
部超伝導材2が埋設されている。その上には磁気記録媒
体から信号磁束゛を導く高透磁率の磁性膜から成る磁気
ヨーク4が不図示の絶縁層から成る磁気ギャップ3を介
して設けられている。磁気ヨーク4の後端部は磁性基板
1に直接接合される。
A groove 1a is formed along the side edge of the substrate 1 facing the magnetic recording medium, and a lower superconducting material 2 is buried within this groove 1a. A magnetic yoke 4 made of a high magnetic permeability magnetic film that guides signal magnetic flux from the magnetic recording medium is provided above the magnetic yoke 4 through a magnetic gap 3 made of an insulating layer (not shown). The rear end portion of the magnetic yoke 4 is directly joined to the magnetic substrate 1.

更に磁気ヨーク4上には上部超伝導体膜5が設けられる
。上部超伝導体膜5は不図示の絶縁層を介して磁気ヨー
ク4上にまたがるようにして形成され、その両端部は下
部超伝導材2に接合される。その接合部は掻く薄い酸化
絶縁膜を介したジョセフソン接合部aとなっている。こ
のようにして下部超伝導材2と上部超伝導体膜5から2
つのジョセフソン接合部aを有した超伝導体リング即ち
直流駆動型の5QUID素子が構成される。
Furthermore, an upper superconductor film 5 is provided on the magnetic yoke 4. The upper superconductor film 5 is formed so as to straddle the magnetic yoke 4 via an insulating layer (not shown), and both ends thereof are joined to the lower superconductor material 2. The junction is a Josephson junction a with a thin oxide insulating film interposed therebetween. In this way, the lower superconductor material 2 and the upper superconductor film 5 to 2
A superconductor ring, that is, a DC-driven 5QUID element having two Josephson junctions a is constructed.

更に磁性基板1上にはSQU I D素子にバイアス電
流を印加し、SQU I D素子から信号6u束の検出
信号を取り出すための電極6.6′が設けられる。電極
6.6′は良導体の薄膜から成り、方の電$i 6は上
部超伝導体II! 5に接続され、他方の電極6′は下
部超伝導材2に接続される。
Furthermore, electrodes 6,6' are provided on the magnetic substrate 1 for applying a bias current to the SQU ID element and extracting a detection signal of signal 6u from the SQU ID element. The electrode 6.6' consists of a thin film of good conductor, and the other electrode 6 is the upper superconductor II! 5, and the other electrode 6' is connected to the lower superconducting material 2.

更に磁性基板1上の以上の構成の上に不図示の保護板を
接合して薄膜磁気ヘッドが構成される。
Furthermore, a protective plate (not shown) is bonded to the above structure on the magnetic substrate 1 to construct a thin film magnetic head.

次にこの薄[磁気ヘッドの動作について説明する。Next, the operation of this thin magnetic head will be explained.

再生時には上記5QUID素子の下部超伝導材2と上部
超伝導体11!5が超伝導状態となるように薄膜磁気ヘ
ッドが冷却されて不図示の回転駆動される磁気記録媒体
に対向させられる。そして媒体から磁気記録情報の信号
磁束が磁気ヨーク4を介してSQU I D素子内に導
かれる。
During reproduction, the thin-film magnetic head is cooled and made to face a rotationally driven magnetic recording medium (not shown) so that the lower superconductor 2 and upper superconductor 11!5 of the 5QUID element become superconducting. Then, the signal magnetic flux of the magnetically recorded information from the medium is guided into the SQUID element via the magnetic yoke 4.

ここで下部超伝導材2と上部超伝導体膜5から構成され
る5QtJID素子内の磁束φがφ=nφ0およびφ=
 (n+1/2)φ0での5QUID素子の電流−電圧
特性は第4図のようになる。尚ここでφ0は量子磁束で
あり、φ。=2.07x 10−” Wbである。
Here, the magnetic flux φ in the 5QtJID element composed of the lower superconducting material 2 and the upper superconducting film 5 is φ=nφ0 and φ=
The current-voltage characteristics of the 5QUID element at (n+1/2)φ0 are as shown in FIG. Here, φ0 is quantum magnetic flux, and φ. = 2.07x 10-” Wb.

第4図に示すように5QUID素子の電流−電圧特性は
磁束φの変化に従って特性A、B間を連続的に変化する
。ここでジョセフソン接合部aの臨界電流値1oの2倍
よりも大きな電流I、を電8i6からSQU I D素
子に印加しておくと、磁気記録媒体から磁気ヨーク4に
流れ込んだ信号磁束の変化は5QUID素子の上部超伝
導体膜5と下部超伝導材2の間の電圧の変化として取り
出すことができる。この場合の磁束と出力電圧の関係は
第5図のようになり、出力電圧■は量子磁束φ0を周期
にして所定の振幅voで周期的に変化する。
As shown in FIG. 4, the current-voltage characteristics of the 5QUID element continuously change between characteristics A and B according to changes in magnetic flux φ. If a current I larger than twice the critical current value 1o of the Josephson junction a is applied from the electric current 8i6 to the SQU ID element, the signal magnetic flux flowing from the magnetic recording medium into the magnetic yoke 4 will change. can be extracted as a change in voltage between the upper superconductor film 5 and the lower superconductor material 2 of the 5QUID element. The relationship between the magnetic flux and the output voltage in this case is as shown in FIG. 5, and the output voltage (2) changes periodically with a predetermined amplitude vo with the period of the quantum magnetic flux φ0.

実際のSQU I D素子の再生回路では雑音を小さく
するため、適当な娠IS Y rをもった交流磁束φ、
にmね合せて、φX=φ、+φrsInωjに対する出
力電圧を位相検波する方法が取られている。出力電圧の
周期的変化の回数を計数回路で計数することにより信号
磁束φ、を検出することができる。
In the actual reproduction circuit of the SQU ID element, in order to reduce noise, the AC magnetic flux φ with an appropriate stress IS Y r,
In accordance with this, a method is adopted in which the output voltage for φX=φ and +φrsInωj is phase detected. The signal magnetic flux φ can be detected by counting the number of periodic changes in the output voltage using a counting circuit.

このようにして信号6i1束の検出を直流駆動型のSQ
U r D素子により行なう薄膜磁気ヘッドでは従来の
リングヘッド、8導型の薄膜磁気ヘッドあるいはMRヘ
ッドと比較して信号磁束の検出能力において遥かに優れ
ている。
In this way, the detection of the signal 6i1 bundle is performed using the DC-driven SQ.
A thin film magnetic head using a U r D element has a much superior ability to detect signal magnetic flux compared to a conventional ring head, an 8-conductor thin film magnetic head, or an MR head.

しかしながらこのような直流駆動型の5QUID素子を
用いた薄膜磁気ヘッドでは、信号bn束の検出感度は優
れているが、SQU r D素子から発生する電圧が極
めて小さく、出方電圧が極めて小さいという問題があっ
た。
However, in a thin film magnetic head using such a DC-driven 5QUID element, although the detection sensitivity of the signal bn flux is excellent, the problem is that the voltage generated from the SQU r D element is extremely small, and the output voltage is extremely small. was there.

そこで本発明の課題はこのような直流駆動型のSQU 
I D素子を用いた再生用のi 膜磁気ヘッドにおいて
充分に大きな出力電圧が得られるようにすることにある
Therefore, the problem of the present invention is to develop such a DC-driven SQU.
The object of the present invention is to make it possible to obtain a sufficiently large output voltage in an i-film magnetic head for reproduction using an I-D element.

[課題を解決するための手段] 本発明においては上述した課題を解決するために、基板
上に、磁気記録媒体から信号磁束を導く磁性膜からなる
磁気ヨークと、この磁気ヨークに流れる信号磁束を検出
する超伝導体膜から成る直流駆動型の超伝導量子干渉素
子とを設けて構成される再生用の薄膜磁気ヘッドにおい
て、前記量子干渉素子を1つの61気ヨークに対して複
数設け、この複数の量子干渉素子を直列に接続して各量
子干渉素子の出力を合成し1チャンネルの出力として取
り出すように構成した。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides a magnetic yoke made of a magnetic film that guides signal magnetic flux from a magnetic recording medium on a substrate, and a magnetic yoke that guides the signal magnetic flux flowing through the magnetic yoke. In a thin-film magnetic head for reproduction configured with a DC-driven superconducting quantum interference element made of a superconductor film for detection, a plurality of quantum interference elements are provided for one 61st yoke, and the plurality of quantum interference elements are Quantum interference devices were connected in series, and the outputs of each quantum interference device were combined and extracted as one channel output.

[作 用] このような構成によれば、複数の量子干渉素子の出力を
合成、即ち加算して1チャンネルの出力として取り出す
ことにより、薄In気ヘッドの1チャンネルの出力を増
大できる。
[Function] According to such a configuration, the output of one channel of the thin Indium gas head can be increased by combining, that is, adding, the outputs of a plurality of quantum interference elements and taking out the output of one channel.

[実施例] 以下、図を参照して本発明の実施例の詳細を説明する。[Example] Hereinafter, details of embodiments of the present invention will be described with reference to the drawings.

第1図及び第2図は本発明の実施例による直流駆動型の
SQU I D素子を用いた再生用の薄膜磁気ヘッドの
要部の構造を示す断面図及び平面図である。両図におい
て先述した第3図中と共通もしくは対応する部分には共
通の参照数字もしくは共通の参照数字にアルファベット
を付した符号で示してあり、共通部分の説明は省略する
1 and 2 are a cross-sectional view and a plan view showing the structure of a main part of a thin film magnetic head for reproduction using a DC-driven SQUID element according to an embodiment of the present invention. In both figures, parts common or corresponding to those in FIG. 3 described above are indicated by common reference numerals or symbols with alphabets added to common reference numerals, and explanations of the common parts will be omitted.

第1図及び第2図に示すように本実施例の薄膜磁気ヘッ
ドでは第3図のヘッドと比較して以下の点が異なってい
る。
As shown in FIGS. 1 and 2, the thin film magnetic head of this embodiment differs from the head shown in FIG. 3 in the following points.

即ちまず磁性基板1の上面において不図示の磁気記録媒
体に対向する図中左側面に沿って2木のpla、1bが
形成されており、このt’f41a、1bのそれぞれに
下部超伝導材2a、2bがそれぞれ帯状に埋設されてい
る。
That is, first, on the upper surface of the magnetic substrate 1, two pieces of pla, 1b are formed along the left side in the figure, which faces a magnetic recording medium (not shown), and a lower superconducting material 2a is formed on each of these t'f41a, 1b. , 2b are each buried in a band shape.

又上部超伝導体膜は符号5a〜5dで示ずようにそれぞ
れ磁気ボーク4上にまたがるようにして4つ平行に設け
られる。このうち上部超伝導体膜5a、5bのそれぞれ
の両端部は一方の下部超伝導材2a1.:接合される。
Further, four upper superconductor films are provided in parallel so as to straddle the magnetic balks 4, respectively, as shown by reference numerals 5a to 5d. Of these, both ends of each of the upper superconductor films 5a and 5b are connected to one lower superconductor material 2a1. : Joined.

又上部超伝導体膜5c。Also, an upper superconductor film 5c.

5dのそれぞれの両端部は他方の下部超伝導材2bに接
合される。上部超伝導体膜58〜5dと下部超伝導材2
a、2bの接合部はそれぞれジョセフソン接合部aとし
て構成される。尚上部超伝導体膜58〜5dの間には絶
縁膜7a〜7cが形成されており、これにより絶縁がな
されている。
5d are joined to the other lower superconducting material 2b. Upper superconductor film 58 to 5d and lower superconductor material 2
The junctions a and 2b are each configured as a Josephson junction a. Incidentally, insulating films 7a to 7c are formed between the upper superconductor films 58 to 5d, thereby providing insulation.

このような構造で上部超伝導体膜58〜5dと下部超伝
導材2a、2bによりそれぞれ2つのジョセフソン接合
部aを有した4つの超伝導体リング、即ち4つの直流駆
動型のSQU I D素子が構成されている。
With this structure, the upper superconductor films 58 to 5d and the lower superconducting materials 2a and 2b form four superconductor rings each having two Josephson junctions a, that is, four DC-driven SQUIDs. The element is configured.

尚この4つのSQU I D素子に対してバイアス電流
を印加し信号磁束の検出電圧を取り出すための電極は符
号6a〜6cで示すように3つ設けられる。電極6aは
上部超伝導体MS a上に設けられる。電極6bは上部
超伝導体膜5b上から5c上にわたって設けられる。又
電極6cは上部超伝導体膜5d上に設けられる。両端の
電極6a。
Three electrodes are provided as shown by reference numerals 6a to 6c for applying a bias current to the four SQU ID elements and extracting a detection voltage of the signal magnetic flux. Electrode 6a is provided on the upper superconductor MSa. The electrode 6b is provided over the upper superconductor film 5b and over the upper superconductor film 5c. Further, the electrode 6c is provided on the upper superconductor film 5d. Electrodes 6a at both ends.

6cはバイアス電流の印加と出力信号の取り出しのだめ
の端子として外部の再生回路に接続される。このため電
極6a、6cには不図示のリード線がワイヤボンディン
グされるか、あるいは電極6a、6cは図示した形状よ
り延長されて、磁性基板1上を引き回される。
6c is connected to an external reproducing circuit as a terminal for applying a bias current and taking out an output signal. For this purpose, lead wires (not shown) are wire-bonded to the electrodes 6a, 6c, or the electrodes 6a, 6c are extended from the shape shown and routed on the magnetic substrate 1.

このような電極6a〜6cを介して上記の4つの5QU
ID素子は直51fに接続される。即ち4つのSQU 
I D素子の各構成部材は符号だけでいうと、6a、5
a、2a、5b、6b、5c。
The above four 5QUs are connected via such electrodes 6a to 6c.
The ID element is directly connected to 51f. i.e. 4 SQUs
The constituent members of the ID element are 6a, 5
a, 2a, 5b, 6b, 5c.

2b、5d、6cの各部材の順序で直列に接続される。The members 2b, 5d, and 6c are connected in series in this order.

このような構造の下に再生時には電極6a。An electrode 6a is placed under such a structure during playback.

60間にバイアス電流が印加され、上記の各部材の順序
でバイアス電流が流れる。そして不図示の磁気記録媒体
から磁気ヨーク4に流れ込む61束に応じて4つのSQ
U I D素子の上部超伝導体膜5a〜5dと下部超伝
導材2a、2bのそれぞれの間に電圧が発生する。即ち
符号だけで言えば5a、2a間、2a、5b間、5c、
2b間、及び2b、5a間に電圧が発生する。これらの
4つの電圧は上記の直列接続により合成、即ち加算され
電極6a、6cから薄膜磁気ヘッドの1チャンネルの出
力電圧として取り出される。
A bias current is applied between 60 and 60, and the bias current flows through each member in the above order. Then, four SQs are generated according to the 61 bundles flowing into the magnetic yoke 4 from a magnetic recording medium (not shown).
A voltage is generated between each of the upper superconductor films 5a to 5d and the lower superconducting materials 2a and 2b of the UID element. In other words, in terms of codes only, between 5a and 2a, between 2a and 5b, 5c,
A voltage is generated between 2b and between 2b and 5a. These four voltages are combined, ie, added, by the above-mentioned series connection and taken out from the electrodes 6a and 6c as the output voltage of one channel of the thin film magnetic head.

以上のような本実施例の薄膜磁気ヘッドによれば4つの
SQU I D素子の検出出力電圧を合成、加算して1
チャンネルの出力電圧として取り出すので、第3図のよ
うにSQU I D素子が1チャンネルについて1つし
か設けられない場合に比べて4倍の出力電圧が得られ、
ミリボルトに近い出力電圧が得られる。これは現行の磁
気記録再生装置の増幅器で充分に良好に増幅できる出力
電圧値である。
According to the thin film magnetic head of this embodiment as described above, the detection output voltages of the four SQU ID elements are synthesized and added to obtain one
Since it is taken out as the output voltage of the channel, an output voltage four times as large as that in the case where only one SQU ID element is provided for each channel as shown in Fig. 3 can be obtained.
Output voltages close to millivolts can be obtained. This is an output voltage value that can be sufficiently amplified by the amplifier of the current magnetic recording/reproducing device.

尚以上の構成で下部超伝導材2a、2b及び上部超伝導
体膜5a〜5dを形成する超伝導材料としては、La−
Ba−Cu−0系、Y−Ba−Cu−0,+のセラミッ
クス、あるいはこれらにSrを加えたもの、更にB1−
5r−Ca−Cu−0系、Tl−Ba−Ca−Cu−0
系、Th−Ba−Pb−Cu−0系、Th−Ba−Zr
−Cu−0系のセラミックス、又上記セラミックス系に
希土類元素を加えたもの等が使用される。
In addition, as the superconducting material forming the lower superconducting materials 2a, 2b and the upper superconducting films 5a to 5d in the above configuration, La-
Ba-Cu-0 series, Y-Ba-Cu-0,+ ceramics, or those with Sr added, and B1-
5r-Ca-Cu-0 system, Tl-Ba-Ca-Cu-0
system, Th-Ba-Pb-Cu-0 system, Th-Ba-Zr
-Cu-0 series ceramics, or the above ceramics to which rare earth elements are added, etc. are used.

又以上の構成で再生動作は上部超伝導体膜5a〜5d及
び下部超伝導材2a、2bが超伝導状態と成るようにヘ
ッドを冷却した状態で行なわれることは勿論である。
Furthermore, with the above configuration, it goes without saying that the reproducing operation is performed with the head cooled so that the upper superconductor films 5a to 5d and the lower superconducting materials 2a and 2b are in a superconducting state.

尚以上の実施例の第1図及び第2図では薄膜磁気ヘッド
の1チャンネルの構成しか示していないが、同じ構成を
磁性基板1上に複数並設することによりマルチチャンネ
ル化できることは勿論である。この場合図示のように1
チャンネルの構成は簡単なものであるので、マルチチャ
ンネル化は容易に行なうことができる。
Although FIGS. 1 and 2 of the above embodiments only show the configuration of one channel of the thin film magnetic head, it is of course possible to create multiple channels by arranging a plurality of the same configuration on the magnetic substrate 1. . In this case, 1
Since the channel configuration is simple, multi-channeling can be easily achieved.

[発明の効果] 以上の説明から明らかなように、本発明によれば、基板
上に、磁気記録媒体から信号磁束を導く磁性膜からなる
磁気ヨークと、この磁気ヨークに流れる信号磁束を検出
する超伝導体膜から成る直流駆動型の超伝導量子干渉素
子とを設けて構成される再生用の薄膜磁気ヘッドにおい
て、前記量子干渉素子を1つの磁気ヨークに対して複数
設け、この複数の量子干渉素子を直列に接続して各量子
干渉素子の出力を合成し1チャンネルの出力として取り
出すように構成したので、再生感度に格段に優れるとと
もに、充分に高い出力電圧が得られ、短波長記録に対し
て良好なS/N比で再生を行なえ、記録の高密度化に対
応できるという優れた効果が得られる。
[Effects of the Invention] As is clear from the above description, according to the present invention, there is a magnetic yoke made of a magnetic film on a substrate that guides signal magnetic flux from a magnetic recording medium, and a signal magnetic flux flowing through the magnetic yoke is detected. In a thin film magnetic head for reproduction configured with a DC-driven superconducting quantum interference element made of a superconductor film, a plurality of the quantum interference elements are provided for one magnetic yoke, and the plurality of quantum interference elements are provided for one magnetic yoke. Since the elements are connected in series and the outputs of each quantum interference element are combined and extracted as one channel output, the reproduction sensitivity is significantly superior and a sufficiently high output voltage can be obtained, making it suitable for short wavelength recording. The excellent effects of being able to perform reproduction with a good S/N ratio and being able to cope with higher density recording can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例による薄膜磁気ヘッドの要部の
構造を示す断面図、第2図は同ヘッドの要部の構造を示
す平面図、第3図は本出願人が先に提案した薄膜磁気ヘ
ッドの要部の構造を示す斜視図、第4図は直流駆動型の
SQU I D素子の電流−電圧特性を示す線図、第5
図は同5QLI I D素子の6fi束−電圧特性を示
す線図である。 1・・・6n性基板   2a、2b・・・下部超伝導
材3・・・磁気ギャップ 4・・・磁気ヨーク58〜5
d・・・上部超伝導体膜 68〜6c…電極 78〜7c・・・絶縁膜 a・・・ジョセフソン接合部
FIG. 1 is a cross-sectional view showing the structure of the main part of a thin-film magnetic head according to an embodiment of the present invention, FIG. 2 is a plan view showing the structure of the main part of the head, and FIG. FIG. 4 is a perspective view showing the structure of the main parts of a thin-film magnetic head, and FIG.
The figure is a diagram showing the 6fi flux-voltage characteristics of the same 5QLI ID element. 1... 6n substrate 2a, 2b... Lower superconducting material 3... Magnetic gap 4... Magnetic yokes 58-5
d... Upper superconductor film 68-6c... Electrode 78-7c... Insulating film a... Josephson junction

Claims (1)

【特許請求の範囲】[Claims] 1)基板上に、磁気記録媒体から信号磁束を導く磁性膜
からなる磁気ヨークと、この磁気ヨークに流れる信号磁
束を検出する超伝導体膜から成る直流駆動型の超伝導量
子干渉素子とを設けて構成される再生用の薄膜磁気ヘッ
ドにおいて、前記量子干渉素子を1つの磁気ヨークに対
して複数設け、この複数の量子干渉素子を直列に接続し
て各量子干渉素子の出力を合成し1チャンネルの出力と
して取り出すように構成したことを特徴とする薄膜磁気
ヘッド。
1) A magnetic yoke made of a magnetic film that guides the signal magnetic flux from the magnetic recording medium and a DC-driven superconducting quantum interference element made of a superconductor film that detects the signal magnetic flux flowing through the magnetic yoke are provided on the substrate. In a thin-film magnetic head for reproduction configured with a magnetic yoke, a plurality of quantum interference elements are provided for one magnetic yoke, and the plurality of quantum interference elements are connected in series to combine the outputs of each quantum interference element into one channel. A thin film magnetic head characterized in that it is configured to take out the output as an output.
JP24975288A 1988-10-05 1988-10-05 Thin film magnetic head Pending JPH0298807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24975288A JPH0298807A (en) 1988-10-05 1988-10-05 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24975288A JPH0298807A (en) 1988-10-05 1988-10-05 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH0298807A true JPH0298807A (en) 1990-04-11

Family

ID=17197696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24975288A Pending JPH0298807A (en) 1988-10-05 1988-10-05 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH0298807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099152A (en) * 1990-02-06 1992-03-24 Fujitsu Limited Superconducting circuit having an output conversion circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099152A (en) * 1990-02-06 1992-03-24 Fujitsu Limited Superconducting circuit having an output conversion circuit

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