JPH0298628U - - Google Patents
Info
- Publication number
- JPH0298628U JPH0298628U JP705189U JP705189U JPH0298628U JP H0298628 U JPH0298628 U JP H0298628U JP 705189 U JP705189 U JP 705189U JP 705189 U JP705189 U JP 705189U JP H0298628 U JPH0298628 U JP H0298628U
- Authority
- JP
- Japan
- Prior art keywords
- rotary plate
- carbon pedestal
- pedestal
- carbon
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
Description
第１図は本考案の実施例を示すカーボンペデス
タルの上面図、第２図はその上方から見た断面図
、第３図はその側方から見た断面図、第４図は第
２図のＡ部拡大断面図、第５図は従来のカーボン
ペデスタルの上面図、第６図はその上方から見た
断面図、第７図はその側方から見た断面図である
。
１……駆動部分、２……歯車装置、３……回転
皿、４……基台部分、６……軸。
Fig. 1 is a top view of a carbon pedestal showing an embodiment of the present invention, Fig. 2 is a cross-sectional view of the carbon pedestal seen from above, Fig. 3 is a cross-sectional view of the carbon pedestal seen from the side, and Fig. 4 is the same as that of Fig. 2. 5 is a top view of a conventional carbon pedestal, FIG. 6 is a sectional view seen from above, and FIG. 7 is a sectional view seen from the side. 1... Drive part, 2... Gear device, 3... Rotating plate, 4... Base part, 6... Shaft.
Claims (1)
、半導体を気相により成長する横型の反応炉内で
使用され、外部からの回転を伝える駆動ギア部分
、半導体を成長すべき基板を載置して回転する回
転皿及びこれらを支持する基台から成る基板回転
機構付きカーボンペデスタルにおいて、 前記回転皿の軸を角を丸くした多角柱としたこ
とを特徴とする基板回転機構付きカーボンペデス
タル。[Claim for Utility Model Registration] Used in a horizontal reactor that heats a carbon pedestal using high-frequency induction and grows semiconductors in a vapor phase. A carbon pedestal with a substrate rotation mechanism comprising a rotary plate that is placed and rotated and a base that supports them, characterized in that the axis of the rotary plate is a polygonal column with rounded corners. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705189U JPH0650980Y2 (en) | 1989-01-26 | 1989-01-26 | Carbon pedestal with substrate rotation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP705189U JPH0650980Y2 (en) | 1989-01-26 | 1989-01-26 | Carbon pedestal with substrate rotation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0298628U true JPH0298628U (en) | 1990-08-06 |
| JPH0650980Y2 JPH0650980Y2 (en) | 1994-12-21 |
Family
ID=31211739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP705189U Expired - Fee Related JPH0650980Y2 (en) | 1989-01-26 | 1989-01-26 | Carbon pedestal with substrate rotation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650980Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017221435A (en) * | 2016-06-15 | 2017-12-21 | 文治 松本 | toothbrush |
-
1989
- 1989-01-26 JP JP705189U patent/JPH0650980Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017221435A (en) * | 2016-06-15 | 2017-12-21 | 文治 松本 | toothbrush |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650980Y2 (en) | 1994-12-21 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |