JPH0296728U - - Google Patents

Info

Publication number
JPH0296728U
JPH0296728U JP461389U JP461389U JPH0296728U JP H0296728 U JPH0296728 U JP H0296728U JP 461389 U JP461389 U JP 461389U JP 461389 U JP461389 U JP 461389U JP H0296728 U JPH0296728 U JP H0296728U
Authority
JP
Japan
Prior art keywords
equipment
pressure cvd
wafer boat
alloy material
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP461389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0622982Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP461389U priority Critical patent/JPH0622982Y2/ja
Publication of JPH0296728U publication Critical patent/JPH0296728U/ja
Application granted granted Critical
Publication of JPH0622982Y2 publication Critical patent/JPH0622982Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP461389U 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート Expired - Lifetime JPH0622982Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP461389U JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP461389U JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Publications (2)

Publication Number Publication Date
JPH0296728U true JPH0296728U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-01
JPH0622982Y2 JPH0622982Y2 (ja) 1994-06-15

Family

ID=31207278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP461389U Expired - Lifetime JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Country Status (1)

Country Link
JP (1) JPH0622982Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0622982Y2 (ja) 1994-06-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term